JP2004513503A5 - - Google Patents

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JP2004513503A5
JP2004513503A5 JP2000595373A JP2000595373A JP2004513503A5 JP 2004513503 A5 JP2004513503 A5 JP 2004513503A5 JP 2000595373 A JP2000595373 A JP 2000595373A JP 2000595373 A JP2000595373 A JP 2000595373A JP 2004513503 A5 JP2004513503 A5 JP 2004513503A5
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JP
Japan
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JP2000595373A
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JP4947836B2 (ja
JP2004513503A (ja
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Priority claimed from US09/488,075 external-priority patent/US6770572B1/en
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JP2000595373A 1999-01-26 2000-01-26 多官能Ｓｉに基くオリゴマー及びポリマー、若しくは、オリゴマー又はポリマーを含む面改質用のナノ多孔質シリカフィルム、およびそれを処理するプロセス、並びにそれを含む集積回路 Expired - Fee Related JP4947836B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US11724899P 1999-01-26 1999-01-26
US60/117,248 1999-01-26
US09/488,075 2000-01-19
US09/488,075 US6770572B1 (en) 1999-01-26 2000-01-19 Use of multifunctional si-based oligomer/polymer for the surface modification of nanoporous silica films
PCT/US2000/001626 WO2000044036A1 (en) 1999-01-26 2000-01-26 Use of multifunctional si-based oligomer/polymer for the surface modification of nanoporous silica films

Publications (3)

Publication Number Publication Date
JP2004513503A JP2004513503A (ja) 2004-04-30
JP2004513503A5 true JP2004513503A5 (https=) 2007-03-08
JP4947836B2 JP4947836B2 (ja) 2012-06-06

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JP2000595373A Expired - Fee Related JP4947836B2 (ja) 1999-01-26 2000-01-26 多官能Ｓｉに基くオリゴマー及びポリマー、若しくは、オリゴマー又はポリマーを含む面改質用のナノ多孔質シリカフィルム、およびそれを処理するプロセス、並びにそれを含む集積回路

Country Status (7)

Country Link
US (3) US6770572B1 (https=)
EP (1) EP1153426A1 (https=)
JP (1) JP4947836B2 (https=)
KR (1) KR100716022B1 (https=)
CN (1) CN1236480C (https=)
AU (1) AU2624300A (https=)
WO (1) WO2000044036A1 (https=)

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