JP2004504586A - 物体の幾何学的形状の無接触測定のための方法 - Google Patents

物体の幾何学的形状の無接触測定のための方法 Download PDF

Info

Publication number
JP2004504586A
JP2004504586A JP2002512626A JP2002512626A JP2004504586A JP 2004504586 A JP2004504586 A JP 2004504586A JP 2002512626 A JP2002512626 A JP 2002512626A JP 2002512626 A JP2002512626 A JP 2002512626A JP 2004504586 A JP2004504586 A JP 2004504586A
Authority
JP
Japan
Prior art keywords
laser
tracer
coordinate measuring
measuring machine
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002512626A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004504586A5 (enExample
Inventor
クリストーフ，ラルフ
Original Assignee
ベルス・メステヒニーク・ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10049303A external-priority patent/DE10049303A1/de
Application filed by ベルス・メステヒニーク・ゲーエムベーハー filed Critical ベルス・メステヒニーク・ゲーエムベーハー
Publication of JP2004504586A publication Critical patent/JP2004504586A/ja
Publication of JP2004504586A5 publication Critical patent/JP2004504586A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2002512626A 2000-07-13 2001-07-13 物体の幾何学的形状の無接触測定のための方法 Pending JP2004504586A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10034242 2000-07-13
DE10049303A DE10049303A1 (de) 2000-07-13 2000-10-04 Verfahren zum berührungslosen Messen von Geometrien von Gegenständen
PCT/EP2001/008088 WO2002006765A1 (de) 2000-07-13 2001-07-13 Verfahren zum berührungslosen messen von geometrien von gegenständen

Publications (2)

Publication Number Publication Date
JP2004504586A true JP2004504586A (ja) 2004-02-12
JP2004504586A5 JP2004504586A5 (enExample) 2005-02-03

Family

ID=26006385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002512626A Pending JP2004504586A (ja) 2000-07-13 2001-07-13 物体の幾何学的形状の無接触測定のための方法

Country Status (6)

Country Link
US (1) US6856381B2 (enExample)
EP (1) EP1299691B1 (enExample)
JP (1) JP2004504586A (enExample)
AT (1) ATE284528T1 (enExample)
AU (1) AU2001285839A1 (enExample)
WO (1) WO2002006765A1 (enExample)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004535580A (ja) * 2001-07-16 2004-11-25 ベルス・メステヒニーク・ゲーエムベーハー 表面特性の測定方法及び座標測定装置
DE10361870B4 (de) * 2003-12-29 2006-05-04 Faro Technologies Inc., Lake Mary Laserscanner und Verfahren zum optischen Abtasten und Vermessen einer Umgebung des Laserscanners
US8711365B2 (en) 2004-12-16 2014-04-29 Werth Messtechnik Gmbh Coordinate measuring device and method for measuring with a coordinate measuring device
EP2224204B1 (de) * 2004-12-16 2021-05-26 Werth Messtechnik GmbH Verfahren zum Messen von Werkstückgeometrien mit einem Koordinatenmessgerät
NL1028920C2 (nl) * 2005-04-29 2006-10-31 Bosch Gmbh Robert Elektrisch gereedschap voor het bewerken van een object.
DE202006005643U1 (de) * 2006-03-31 2006-07-06 Faro Technologies Inc., Lake Mary Vorrichtung zum dreidimensionalen Erfassen eines Raumbereichs
US7728961B2 (en) * 2006-10-31 2010-06-01 Mitutoyo Coporation Surface height and focus sensor
US20080100850A1 (en) * 2006-10-31 2008-05-01 Mitutoyo Corporation Surface height and focus sensor
DE102007024197B4 (de) * 2007-05-24 2017-01-05 Robert Bosch Gmbh Vorrichtung und Verfahren zur Formmessung von Freiform-Flächen
US7723657B2 (en) * 2007-11-16 2010-05-25 Mitutoyo Corporation Focus detection apparatus having extended detection range
EP2194357A1 (de) * 2008-12-03 2010-06-09 Leica Geosystems AG Optisches Sensorelement für eine Messmaschine, und messmaschinenseitiges Kupplungselement hierfür
DE102009010465B3 (de) * 2009-02-13 2010-05-27 Faro Technologies, Inc., Lake Mary Laserscanner
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
DE102009015920B4 (de) 2009-03-25 2014-11-20 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
DE102009035336B3 (de) 2009-07-22 2010-11-18 Faro Technologies, Inc., Lake Mary Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
DE102009035337A1 (de) 2009-07-22 2011-01-27 Faro Technologies, Inc., Lake Mary Verfahren zum optischen Abtasten und Vermessen eines Objekts
DE102009057101A1 (de) 2009-11-20 2011-05-26 Faro Technologies, Inc., Lake Mary Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9529083B2 (en) 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
DE102009055988B3 (de) 2009-11-20 2011-03-17 Faro Technologies, Inc., Lake Mary Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9113023B2 (en) 2009-11-20 2015-08-18 Faro Technologies, Inc. Three-dimensional scanner with spectroscopic energy detector
DE102009055989B4 (de) 2009-11-20 2017-02-16 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9210288B2 (en) 2009-11-20 2015-12-08 Faro Technologies, Inc. Three-dimensional scanner with dichroic beam splitters to capture a variety of signals
EP2504658B1 (de) 2009-11-26 2019-02-27 Werth Messtechnik GmbH Verfahren und anordnung zur taktil-optischen bestimmung der geometrie eines messobjektes
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9163922B2 (en) 2010-01-20 2015-10-20 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
US9879976B2 (en) 2010-01-20 2018-01-30 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
DE112011100193B4 (de) 2010-01-20 2016-07-07 Faro Technologies, Inc. Montagevorrichtung für ein Koordinatenmessgerät
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
DE102010020925B4 (de) 2010-05-10 2014-02-27 Faro Technologies, Inc. Verfahren zum optischen Abtasten und Vermessen einer Umgebung
CN101915555A (zh) * 2010-07-09 2010-12-15 上海理工大学 采用电控变焦透镜作为共焦显微系统轴向扫描方法
DE102010032723B3 (de) 2010-07-26 2011-11-24 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
DE102010032725B4 (de) 2010-07-26 2012-04-26 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
DE102010032726B3 (de) 2010-07-26 2011-11-24 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
DE102010033561B3 (de) 2010-07-29 2011-12-15 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
KR101838329B1 (ko) * 2011-05-20 2018-03-13 유니베르시타트 폴리테크니카 데 카탈루냐 표면을 비접촉 측정하기 위한 방법 및 디바이스
DE102012100609A1 (de) 2012-01-25 2013-07-25 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
DE102012107544B3 (de) 2012-08-17 2013-05-23 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
WO2014039623A1 (en) 2012-09-06 2014-03-13 Faro Technologies, Inc. Laser scanner with additional sensing device
WO2014043461A1 (en) 2012-09-14 2014-03-20 Faro Technologies, Inc. Laser scanner with dynamical adjustment of angular scan velocity
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
DE102012109481A1 (de) 2012-10-05 2014-04-10 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
DE102014108353A1 (de) 2013-06-13 2014-12-18 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Bestimmung von Geometrien an Messobjekten mittels eines kombinierten Sensorsystems
WO2015082683A2 (de) 2013-12-06 2015-06-11 Werth Messtechnik Gmbh Vorrichtung und verfahren zur messung von werkstücken
DE102014117978A1 (de) 2013-12-06 2015-06-11 Werth Messtechnik Gmbh Vorrichtung und Verfahren zur Messung von Werkstücken
DE102015122844A1 (de) 2015-12-27 2017-06-29 Faro Technologies, Inc. 3D-Messvorrichtung mit Batteriepack
DE102017129221A1 (de) 2017-01-23 2018-07-26 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Bestimmung von geometrischen Merkmalen an Werkstücken

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114321A (en) * 1976-03-19 1977-09-26 Schneider Co Optische Werke Objective lens control unit having variable focal length
JPH01503337A (ja) * 1987-05-15 1989-11-09 ヒューズ―ジェイブイシー・テクノロジー・コーポレーション 液晶ライトバルブを用いたフルカラーの画像射影のための改良された光学系
JPH06160036A (ja) * 1992-11-18 1994-06-07 Toyoda Mach Works Ltd 光学的測定装置
JPH06258239A (ja) * 1993-03-09 1994-09-16 Hitachi Ltd 欠陥検出装置およびその方法
JPH07504749A (ja) * 1992-03-13 1995-05-25 サーモマイクロスコープス　コーポレーション 走査型プローブ電子顕微鏡
JPH07174536A (ja) * 1993-12-20 1995-07-14 Minolta Co Ltd ３次元形状測定装置
JPH07239217A (ja) * 1994-02-28 1995-09-12 Agency Of Ind Science & Technol レーザ追尾式座標測定機
JPH07248213A (ja) * 1994-03-11 1995-09-26 Nikon Corp 三次元形状測定装置
JPH08327332A (ja) * 1995-05-30 1996-12-13 Ando Electric Co Ltd クリームはんだ膜厚測定装置
JPH10160740A (ja) * 1996-12-03 1998-06-19 Olympus Optical Co Ltd 走査型近接場光学顕微鏡
WO1999053268A1 (de) * 1998-04-11 1999-10-21 Werth Messtechnik Gmbh Verfahren und anordnung zur erfassung der geometrie von gegenständen mittels eines koordinatenmessgeräts
WO1999063301A1 (de) * 1998-05-29 1999-12-09 Werth Messtechnik Gmbh Anordnung zur messung von strukturen eines objektes
JP2000162318A (ja) * 1998-11-24 2000-06-16 Hamamatsu Photonics Kk 全方位距離検出装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2116872A5 (fr) * 1970-12-10 1972-07-21 Compteurs Comp D Perfectionnements aux dispositifs palpeurs optiques
US3847485A (en) * 1972-05-25 1974-11-12 Zygo Corp Optical noncontacting surface sensor for measuring distance and angle of a test surface
US4209252A (en) * 1978-07-03 1980-06-24 Arditty Herve J Optical probe assembly for detecting the position of an object surface and method
FR2548796B1 (fr) * 1983-07-08 1985-11-22 Comp Generale Electricite Dispositif optique pour determiner la position et la forme de la surface d'un objet
JPH0723844B2 (ja) * 1985-03-27 1995-03-15 オリンパス光学工業株式会社 表面形状測定器
US4732485A (en) * 1985-04-17 1988-03-22 Olympus Optical Co., Ltd. Optical surface profile measuring device
DE4327250C5 (de) * 1992-09-25 2008-11-20 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Koordinatenmessung an Werkstücken
CA2215600A1 (en) * 1995-03-17 1996-09-26 Heinz Paul Weber Process and device for determining three-dimensional structures in the submicron range
DE19747027A1 (de) * 1997-04-21 1998-10-22 Wegu Messtechnik Multisensor-Tasteinrichtung
DE19724739A1 (de) * 1997-06-12 1998-12-17 Werth Messtechnik Gmbh Taster zur Messung geometrischer Strukturen
US20050178841A1 (en) 2002-06-07 2005-08-18 Jones Guilford Ii System and methods for product and document authentication

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114321A (en) * 1976-03-19 1977-09-26 Schneider Co Optische Werke Objective lens control unit having variable focal length
JPH01503337A (ja) * 1987-05-15 1989-11-09 ヒューズ―ジェイブイシー・テクノロジー・コーポレーション 液晶ライトバルブを用いたフルカラーの画像射影のための改良された光学系
JPH07504749A (ja) * 1992-03-13 1995-05-25 サーモマイクロスコープス　コーポレーション 走査型プローブ電子顕微鏡
JPH06160036A (ja) * 1992-11-18 1994-06-07 Toyoda Mach Works Ltd 光学的測定装置
JPH06258239A (ja) * 1993-03-09 1994-09-16 Hitachi Ltd 欠陥検出装置およびその方法
JPH07174536A (ja) * 1993-12-20 1995-07-14 Minolta Co Ltd ３次元形状測定装置
JPH07239217A (ja) * 1994-02-28 1995-09-12 Agency Of Ind Science & Technol レーザ追尾式座標測定機
JPH07248213A (ja) * 1994-03-11 1995-09-26 Nikon Corp 三次元形状測定装置
JPH08327332A (ja) * 1995-05-30 1996-12-13 Ando Electric Co Ltd クリームはんだ膜厚測定装置
JPH10160740A (ja) * 1996-12-03 1998-06-19 Olympus Optical Co Ltd 走査型近接場光学顕微鏡
WO1999053268A1 (de) * 1998-04-11 1999-10-21 Werth Messtechnik Gmbh Verfahren und anordnung zur erfassung der geometrie von gegenständen mittels eines koordinatenmessgeräts
WO1999063301A1 (de) * 1998-05-29 1999-12-09 Werth Messtechnik Gmbh Anordnung zur messung von strukturen eines objektes
JP2000162318A (ja) * 1998-11-24 2000-06-16 Hamamatsu Photonics Kk 全方位距離検出装置

Also Published As

Publication number Publication date
WO2002006765A1 (de) 2002-01-24
US20030098967A1 (en) 2003-05-29
ATE284528T1 (de) 2004-12-15
EP1299691A1 (de) 2003-04-09
AU2001285839A1 (en) 2002-01-30
US6856381B2 (en) 2005-02-15
EP1299691B1 (de) 2004-12-08

Similar Documents

Publication Publication Date Title
JP2004504586A (ja) 物体の幾何学的形状の無接触測定のための方法
CN106338244B (zh) 测量机和用于获取小规模3d信息的方法
EP1062478B1 (en) Apparatus and method for optically measuring an object surface contour
US8610902B2 (en) Apparatus and method for inspecting an object with increased depth of field
US20140043610A1 (en) Apparatus for inspecting a measurement object with triangulation sensor
US6927863B2 (en) Apparatus for measuring a measurement object
KR101891182B1 (ko) 자동초점 조절장치
JP5782786B2 (ja) 形状測定装置
KR940002356B1 (ko) 비접촉자동초점위치맞춤방법 및 장치
US5432330A (en) Two-stage detection noncontact positioning apparatus having a first light detector with a central slit
US20060007449A1 (en) Method for measuring a contour of a workpiece by scanning
KR100679643B1 (ko) 자동초점 조절패턴을 채택하는 자동초점 조절장치 및그것을 사용한 자동초점 조절방법
JPH10239036A (ja) ３次元計測用光学装置
KR100240259B1 (ko) 원통 렌즈와 레이저 스캐너를 이용한 3차원 측정장치
US20240068798A1 (en) Measuring device and machining device
US10656402B2 (en) Three-dimensional infrared imaging of surfaces utilizing laser displacement sensors
JPH0469508A (ja) 非接触式形状測定装置及び形状測定法
JPH0540821A (ja) 三次元計測装置
Christoph et al. Coordinate Metrology
JP2008145268A (ja) 焦点面傾斜型共焦点表面形状計測装置
JPH0499907A (ja) 曲率半径の非接触測定方法
FI88204C (fi) Anordning foer bestaemning av ytformen av foeremaolet
JP2004212333A (ja) 非接触３次元測定方法及び装置
JP2000249516A (ja) 高さ測定装置
JPH0534121A (ja) 三次元計測装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080523

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110301

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20110527

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20110603

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20110628

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20110705

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20110729

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20110805

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110830

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111108

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20120117

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20120124

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20120406

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20120413

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120508

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120626

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20120904

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20120911

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20121109

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20121116

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121225

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20130305