JP2004503769A5 - - Google Patents

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Publication number
JP2004503769A5
JP2004503769A5 JP2002510916A JP2002510916A JP2004503769A5 JP 2004503769 A5 JP2004503769 A5 JP 2004503769A5 JP 2002510916 A JP2002510916 A JP 2002510916A JP 2002510916 A JP2002510916 A JP 2002510916A JP 2004503769 A5 JP2004503769 A5 JP 2004503769A5
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JP
Japan
Prior art keywords
edge portion
holder
contact
support
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002510916A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004503769A (ja
Filing date
Publication date
Priority claimed from DE2000128569 external-priority patent/DE10028569A1/de
Application filed filed Critical
Publication of JP2004503769A publication Critical patent/JP2004503769A/ja
Publication of JP2004503769A5 publication Critical patent/JP2004503769A5/ja
Pending legal-status Critical Current

Links

JP2002510916A 2000-06-09 2001-05-10 ディスク形状物体の位置決め装置 Pending JP2004503769A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2000128569 DE10028569A1 (de) 2000-06-09 2000-06-09 Vorrichtung zum Positionieren scheibenförmiger Objekte
PCT/US2001/015193 WO2001096836A1 (en) 2000-06-09 2001-05-10 Device for positioning disk-shaped objects

Publications (2)

Publication Number Publication Date
JP2004503769A JP2004503769A (ja) 2004-02-05
JP2004503769A5 true JP2004503769A5 (enExample) 2005-02-24

Family

ID=7645228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002510916A Pending JP2004503769A (ja) 2000-06-09 2001-05-10 ディスク形状物体の位置決め装置

Country Status (5)

Country Link
EP (1) EP1311826A1 (enExample)
JP (1) JP2004503769A (enExample)
AU (1) AU2001263048A1 (enExample)
DE (1) DE10028569A1 (enExample)
WO (1) WO2001096836A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10160521B4 (de) * 2001-12-05 2004-09-30 HSEB Heinze & Süllau Entwicklungsbüro Dresden GmbH Positioniereinrichtungen für Halbleiterobjekte
DE102004017114B4 (de) 2004-04-07 2012-03-15 Integrated Dynamics Engineering Gmbh Vorrichtung zur Handhabung eines scheibenartigen Elements, insbesondere zur Handhabung eines Wafers
GB0423399D0 (en) * 2004-10-22 2004-11-24 Hamilton & Royce Ltd Display device
DE102005035199A1 (de) 2005-07-27 2007-02-08 Mattson Thermal Products Gmbh Verfahren zum Ermitteln der Ist-Lage einer Drehachse eines Transportmechanismus
JP6024046B2 (ja) * 2012-04-24 2016-11-09 アテル株式会社 マクロ観察装置
KR101654844B1 (ko) * 2016-02-12 2016-09-06 (주)삼영엠아이텍 링형 검사대상물의 x-ray 검사용 지그장치
KR102003729B1 (ko) * 2017-11-15 2019-07-29 주식회사 고영테크놀러지 검사 장치
CN114054397B (zh) * 2021-11-26 2023-07-07 山东融跃肉制品有限公司 一种猪头清洗传送装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0719815B2 (ja) * 1987-05-29 1995-03-06 東京エレクトロン株式会社 ウエハプローバ
JP3107310B2 (ja) * 1988-11-30 2000-11-06 東京エレクトロン株式会社 処理装置
DE3919611A1 (de) * 1989-06-15 1990-12-20 Wacker Chemitronic Haltevorrichtung zur aufnahme von scheibenfoermigen gegenstaenden, insbesondere halbleiterscheiben, und verfahren zu deren behandlung
US5096291A (en) * 1990-05-16 1992-03-17 Irvine Optical Corporation Inspection systems having rotating motion
JPH04372150A (ja) * 1991-06-20 1992-12-25 Toshiba Corp ウェーハシールリング着脱装置
US5372612A (en) * 1993-06-28 1994-12-13 Motorola, Inc. Semiconductor material contacting member
JP3757430B2 (ja) * 1994-02-22 2006-03-22 株式会社ニコン 基板の位置決め装置及び露光装置
US5880828A (en) * 1996-07-26 1999-03-09 Hitachi Electronics Engineering Co., Ltd. Surface defect inspection device and shading correction method therefor
US5955858A (en) * 1997-02-14 1999-09-21 Applied Materials, Inc. Mechanically clamping robot wrist
JPH10247680A (ja) * 1997-03-04 1998-09-14 Tokyo Electron Ltd 高温炉への搬送用フォークおよび熱処理装置
JPH11142126A (ja) * 1997-04-15 1999-05-28 Matsushita Seiki Kk フォトマスク等の表面検査装置
JPH1197515A (ja) * 1997-09-22 1999-04-09 Toshiba Corp ウエハ支持用回転テーブル
JP2991697B1 (ja) * 1998-07-10 1999-12-20 株式会社ニデック ウェーハ検査装置
JP3298001B2 (ja) * 1998-07-27 2002-07-02 株式会社スーパーシリコン研究所 エピタキシャル成長炉
US6204917B1 (en) * 1998-09-22 2001-03-20 Kla-Tencor Corporation Backside contamination inspection device
US6143147A (en) * 1998-10-30 2000-11-07 Tokyo Electron Limited Wafer holding assembly and wafer processing apparatus having said assembly
CN1238882C (zh) * 1998-12-02 2006-01-25 纽波特公司 试片夹持机械手末端执行器

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