JP2004340932A - 走査装置に使用するために好適な燐光体又はシンチレータシート及びパネルの製造方法 - Google Patents
走査装置に使用するために好適な燐光体又はシンチレータシート及びパネルの製造方法 Download PDFInfo
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- JP2004340932A JP2004340932A JP2004079889A JP2004079889A JP2004340932A JP 2004340932 A JP2004340932 A JP 2004340932A JP 2004079889 A JP2004079889 A JP 2004079889A JP 2004079889 A JP2004079889 A JP 2004079889A JP 2004340932 A JP2004340932 A JP 2004340932A
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Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
- C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
- C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
- C09K11/7728—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals containing europium
- C09K11/7732—Halogenides
- C09K11/7733—Halogenides with alkali or alkaline earth metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0694—Halides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/19—Delaminating means
- Y10T156/1928—Differential fluid pressure delaminating means
- Y10T156/1944—Vacuum delaminating means [e.g., vacuum chamber, etc.]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Conversion Of X-Rays Into Visible Images (AREA)
- Luminescent Compositions (AREA)
- Measurement Of Radiation (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP03100723A EP1460642B1 (en) | 2003-03-20 | 2003-03-20 | Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004340932A true JP2004340932A (ja) | 2004-12-02 |
| JP2004340932A5 JP2004340932A5 (cg-RX-API-DMAC7.html) | 2007-02-01 |
Family
ID=32799023
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004079889A Pending JP2004340932A (ja) | 2003-03-20 | 2004-03-19 | 走査装置に使用するために好適な燐光体又はシンチレータシート及びパネルの製造方法 |
| JP2004079890A Pending JP2004340933A (ja) | 2003-03-20 | 2004-03-19 | 燐光体又はシンチレータシートの製造方法及び走査装置に使用するために好適なパネル |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004079890A Pending JP2004340933A (ja) | 2003-03-20 | 2004-03-19 | 燐光体又はシンチレータシートの製造方法及び走査装置に使用するために好適なパネル |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7141135B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP1460642B1 (cg-RX-API-DMAC7.html) |
| JP (2) | JP2004340932A (cg-RX-API-DMAC7.html) |
| DE (2) | DE60326429D1 (cg-RX-API-DMAC7.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008108428A1 (ja) * | 2007-03-08 | 2008-09-12 | Konica Minolta Medical & Graphic, Inc. | シンチレータパネルおよびシンチレータパネルの製造方法 |
| JP2013249538A (ja) * | 2012-06-04 | 2013-12-12 | Leica Mikrosysteme Gmbh | 蒸発材料を用いてコーティングするための装置及び方法 |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7501155B2 (en) * | 2003-03-20 | 2009-03-10 | Agfa Healthcare | Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus |
| JP2005029895A (ja) * | 2003-07-04 | 2005-02-03 | Agfa Gevaert Nv | 蒸着装置 |
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| EP1691215B1 (de) | 2005-02-15 | 2012-11-28 | Agfa-Gevaert HealthCare GmbH | Auslesevorrichtung und Verfahren zum Auslesen von in Speicherleuchtstoffschichten gespeicherten Röntgenaufnahmen |
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| US20090162535A1 (en) * | 2007-12-21 | 2009-06-25 | Jean-Pierre Tahon | Method of forming a phosphor or scintillator material and vapor deposition apparatus used therefor |
| DE102008024372B4 (de) * | 2008-05-20 | 2013-08-22 | Von Ardenne Anlagentechnik Gmbh | Verfahren zum Transport von Substraten in Vakuumbeschichtungseinrichtungen |
| CN101684546B (zh) * | 2008-09-25 | 2012-05-23 | 鸿富锦精密工业（深圳）有限公司 | 软性基板镀膜治具 |
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| CN107177820B (zh) * | 2017-06-12 | 2019-05-24 | 哈尔滨光宇电源股份有限公司 | 高速连续卷绕式真空蒸镀锂设备及利用其实现基材蒸镀锂的方法 |
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2003
- 2003-03-20 DE DE60326429T patent/DE60326429D1/de not_active Expired - Lifetime
- 2003-03-20 EP EP03100723A patent/EP1460642B1/en not_active Expired - Lifetime
-
2004
- 2004-03-19 US US10/804,539 patent/US7141135B2/en not_active Expired - Fee Related
- 2004-03-19 JP JP2004079889A patent/JP2004340932A/ja active Pending
- 2004-03-19 DE DE602004018861T patent/DE602004018861D1/de not_active Expired - Lifetime
- 2004-03-19 JP JP2004079890A patent/JP2004340933A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008108428A1 (ja) * | 2007-03-08 | 2008-09-12 | Konica Minolta Medical & Graphic, Inc. | シンチレータパネルおよびシンチレータパネルの製造方法 |
| JPWO2008108428A1 (ja) * | 2007-03-08 | 2010-06-17 | コニカミノルタエムジー株式会社 | シンチレータパネルおよびシンチレータパネルの製造方法 |
| JP2012163571A (ja) * | 2007-03-08 | 2012-08-30 | Konica Minolta Medical & Graphic Inc | シンチレータパネルの製造方法 |
| JP2013249538A (ja) * | 2012-06-04 | 2013-12-12 | Leica Mikrosysteme Gmbh | 蒸発材料を用いてコーティングするための装置及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE60326429D1 (de) | 2009-04-16 |
| EP1460642A1 (en) | 2004-09-22 |
| US7141135B2 (en) | 2006-11-28 |
| US20040224084A1 (en) | 2004-11-11 |
| DE602004018861D1 (de) | 2009-02-26 |
| JP2004340933A (ja) | 2004-12-02 |
| EP1460642B1 (en) | 2009-03-04 |
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