JP2004237430A5 - - Google Patents
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- Publication number
- JP2004237430A5 JP2004237430A5 JP2003068510A JP2003068510A JP2004237430A5 JP 2004237430 A5 JP2004237430 A5 JP 2004237430A5 JP 2003068510 A JP2003068510 A JP 2003068510A JP 2003068510 A JP2003068510 A JP 2003068510A JP 2004237430 A5 JP2004237430 A5 JP 2004237430A5
- Authority
- JP
- Japan
- Prior art keywords
- porous body
- body according
- holes
- columnar
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000463 material Substances 0.000 description 21
- 229910052710 silicon Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910052732 germanium Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003068510A JP4035458B2 (ja) | 2002-03-15 | 2003-03-13 | 多孔質体の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002073111 | 2002-03-15 | ||
| JP2002363164 | 2002-12-13 | ||
| JP2003068510A JP4035458B2 (ja) | 2002-03-15 | 2003-03-13 | 多孔質体の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004237430A JP2004237430A (ja) | 2004-08-26 |
| JP2004237430A5 true JP2004237430A5 (enExample) | 2007-03-01 |
| JP4035458B2 JP4035458B2 (ja) | 2008-01-23 |
Family
ID=32966219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003068510A Expired - Fee Related JP4035458B2 (ja) | 2002-03-15 | 2003-03-13 | 多孔質体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4035458B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4518019B2 (ja) * | 2005-12-26 | 2010-08-04 | 住友金属鉱山株式会社 | 多孔質金属箔およびその製造方法 |
| DE102006029622A1 (de) * | 2006-06-28 | 2008-01-03 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Bauelements, insbesondere ein mikromechanisches und/oder mikrofluidisches und/oder mikroelektronisches Bauelement und Bauelement |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2684201B2 (ja) * | 1987-11-26 | 1997-12-03 | 日立マクセル株式会社 | 磁気記録媒体 |
| JP3135110B2 (ja) * | 1995-11-29 | 2001-02-13 | 工業技術院長 | 多孔質セラミックス膜とその製造方法 |
| JP2000327491A (ja) * | 1999-05-11 | 2000-11-28 | Hitachi Maxell Ltd | 無機化合物薄膜、磁気記録媒体および磁気記録装置 |
| JP3387897B2 (ja) * | 1999-08-30 | 2003-03-17 | キヤノン株式会社 | 構造体の製造方法、並びに該製造方法により製造される構造体及び該構造体を用いた構造体デバイス |
| WO2001071394A1 (fr) * | 2000-03-21 | 2001-09-27 | Asahi Glass Company, Limited | Article antireflet et procédé de production |
-
2003
- 2003-03-13 JP JP2003068510A patent/JP4035458B2/ja not_active Expired - Fee Related
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