JP4035458B2 - 多孔質体の製造方法 - Google Patents

多孔質体の製造方法 Download PDF

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Publication number
JP4035458B2
JP4035458B2 JP2003068510A JP2003068510A JP4035458B2 JP 4035458 B2 JP4035458 B2 JP 4035458B2 JP 2003068510 A JP2003068510 A JP 2003068510A JP 2003068510 A JP2003068510 A JP 2003068510A JP 4035458 B2 JP4035458 B2 JP 4035458B2
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silicon
aluminum
germanium
porous body
atomic
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Expired - Fee Related
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Japanese (ja)
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JP2004237430A5 (enExample
JP2004237430A (ja
Inventor
和彦 福谷
透 田
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Canon Inc
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Canon Inc
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Priority to JP2003068510A priority Critical patent/JP4035458B2/ja
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  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP2003068510A 2002-03-15 2003-03-13 多孔質体の製造方法 Expired - Fee Related JP4035458B2 (ja)

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JP2003068510A JP4035458B2 (ja) 2002-03-15 2003-03-13 多孔質体の製造方法

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JP2002073111 2002-03-15
JP2002363164 2002-12-13
JP2003068510A JP4035458B2 (ja) 2002-03-15 2003-03-13 多孔質体の製造方法

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JP2004237430A JP2004237430A (ja) 2004-08-26
JP2004237430A5 JP2004237430A5 (enExample) 2007-03-01
JP4035458B2 true JP4035458B2 (ja) 2008-01-23

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JP2003068510A Expired - Fee Related JP4035458B2 (ja) 2002-03-15 2003-03-13 多孔質体の製造方法

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4518019B2 (ja) * 2005-12-26 2010-08-04 住友金属鉱山株式会社 多孔質金属箔およびその製造方法
DE102006029622A1 (de) * 2006-06-28 2008-01-03 Robert Bosch Gmbh Verfahren zur Herstellung eines Bauelements, insbesondere ein mikromechanisches und/oder mikrofluidisches und/oder mikroelektronisches Bauelement und Bauelement

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2684201B2 (ja) * 1987-11-26 1997-12-03 日立マクセル株式会社 磁気記録媒体
JP3135110B2 (ja) * 1995-11-29 2001-02-13 工業技術院長 多孔質セラミックス膜とその製造方法
JP2000327491A (ja) * 1999-05-11 2000-11-28 Hitachi Maxell Ltd 無機化合物薄膜、磁気記録媒体および磁気記録装置
JP3387897B2 (ja) * 1999-08-30 2003-03-17 キヤノン株式会社 構造体の製造方法、並びに該製造方法により製造される構造体及び該構造体を用いた構造体デバイス
WO2001071394A1 (fr) * 2000-03-21 2001-09-27 Asahi Glass Company, Limited Article antireflet et procédé de production

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