JP2004219423A5 - - Google Patents

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Publication number
JP2004219423A5
JP2004219423A5 JP2004008393A JP2004008393A JP2004219423A5 JP 2004219423 A5 JP2004219423 A5 JP 2004219423A5 JP 2004008393 A JP2004008393 A JP 2004008393A JP 2004008393 A JP2004008393 A JP 2004008393A JP 2004219423 A5 JP2004219423 A5 JP 2004219423A5
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JP
Japan
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JP2004008393A
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JP2004219423A (ja
JP3950858B2 (ja
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Priority claimed from US10/750,986 external-priority patent/US7268891B2/en
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JP2004008393A 2003-01-15 2004-01-15 波面測定システム、ｅｕｖフォトリソグラフィシステム、及び光学系の波面を測定する方法 Expired - Fee Related JP3950858B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US44005003P 2003-01-15 2003-01-15
US10/750,986 US7268891B2 (en) 2003-01-15 2004-01-05 Transmission shear grating in checkerboard configuration for EUV wavefront sensor

Publications (3)

Publication Number Publication Date
JP2004219423A JP2004219423A (ja) 2004-08-05
JP2004219423A5 true JP2004219423A5 (ja) 2005-05-26
JP3950858B2 JP3950858B2 (ja) 2007-08-01

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JP2004008393A Expired - Fee Related JP3950858B2 (ja) 2003-01-15 2004-01-15 波面測定システム、ｅｕｖフォトリソグラフィシステム、及び光学系の波面を測定する方法

Country Status (7)

Country Link
US (2) US7268891B2 (ja)
EP (1) EP1439427A3 (ja)
JP (1) JP3950858B2 (ja)
KR (1) KR100730245B1 (ja)
CN (1) CN100476586C (ja)
SG (1) SG107675A1 (ja)
TW (1) TWI279590B (ja)

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