JP2004091196A - 板状物搬送装置及び隙間規制部材 - Google Patents

板状物搬送装置及び隙間規制部材 Download PDF

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Publication number
JP2004091196A
JP2004091196A JP2002258720A JP2002258720A JP2004091196A JP 2004091196 A JP2004091196 A JP 2004091196A JP 2002258720 A JP2002258720 A JP 2002258720A JP 2002258720 A JP2002258720 A JP 2002258720A JP 2004091196 A JP2004091196 A JP 2004091196A
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Japan
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bolt
plate
suction
inner peripheral
peripheral end
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JP2002258720A
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English (en)
Japanese (ja)
Inventor
Ichiro Yamahata
山端　一郎
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Disco Corp
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Disco Abrasive Systems Ltd
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Application filed by Disco Abrasive Systems Ltd filed Critical Disco Abrasive Systems Ltd
Priority to JP2002258720A priority Critical patent/JP2004091196A/ja
Priority to CNB03155797XA priority patent/CN100468682C/zh
Publication of JP2004091196A publication Critical patent/JP2004091196A/ja
Pending legal-status Critical Current

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JP2002258720A 2002-09-04 2002-09-04 板状物搬送装置及び隙間規制部材 Pending JP2004091196A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002258720A JP2004091196A (ja) 2002-09-04 2002-09-04 板状物搬送装置及び隙間規制部材
CNB03155797XA CN100468682C (zh) 2002-09-04 2003-09-03 板状物输送装置及间隙限制部件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002258720A JP2004091196A (ja) 2002-09-04 2002-09-04 板状物搬送装置及び隙間規制部材

Publications (1)

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JP2004091196A true JP2004091196A (ja) 2004-03-25

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ID=32063268

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JP2002258720A Pending JP2004091196A (ja) 2002-09-04 2002-09-04 板状物搬送装置及び隙間規制部材

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JP (1) JP2004091196A (zh)
CN (1) CN100468682C (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009158682A (ja) * 2007-12-26 2009-07-16 Disco Abrasive Syst Ltd ウエーハの搬送装置
DE102010040221A1 (de) 2009-09-07 2011-03-10 Disco Corporation Schleifvorrichtung mit Waferlademechanismus
CN111874623A (zh) * 2020-07-17 2020-11-03 苏州精濑光电有限公司 一种吸附机构及搬运装置
CN113003214A (zh) * 2021-02-23 2021-06-22 杭州娃哈哈精密机械有限公司 一种瓶胚水平接料转运装置
TWI772128B (zh) * 2020-12-30 2022-07-21 盟立自動化股份有限公司 固持裝置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102367107B (zh) * 2011-10-08 2014-07-16 张家港市玉龙科技板材有限公司 用于输送模板的模板滚取装置
CN105345830B (zh) * 2015-12-15 2018-04-10 清华大学 吸盘式机械手

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009158682A (ja) * 2007-12-26 2009-07-16 Disco Abrasive Syst Ltd ウエーハの搬送装置
DE102010040221A1 (de) 2009-09-07 2011-03-10 Disco Corporation Schleifvorrichtung mit Waferlademechanismus
CN111874623A (zh) * 2020-07-17 2020-11-03 苏州精濑光电有限公司 一种吸附机构及搬运装置
TWI772128B (zh) * 2020-12-30 2022-07-21 盟立自動化股份有限公司 固持裝置
CN113003214A (zh) * 2021-02-23 2021-06-22 杭州娃哈哈精密机械有限公司 一种瓶胚水平接料转运装置

Also Published As

Publication number Publication date
CN100468682C (zh) 2009-03-11
CN1500710A (zh) 2004-06-02

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