JP2003501841A - 基板通気孔を有する集積回路パッケージ - Google Patents

基板通気孔を有する集積回路パッケージ

Info

Publication number
JP2003501841A
JP2003501841A JP2001502624A JP2001502624A JP2003501841A JP 2003501841 A JP2003501841 A JP 2003501841A JP 2001502624 A JP2001502624 A JP 2001502624A JP 2001502624 A JP2001502624 A JP 2001502624A JP 2003501841 A JP2003501841 A JP 2003501841A
Authority
JP
Japan
Prior art keywords
substrate
integrated circuit
opening
forming
package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001502624A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003501841A5 (https=
Inventor
ラマリンガム,サレシュ
ヴォドラハリ,ナゲシュ
コステロ,マイケル・ジェイ
ローク,ムン・レオン
マハジャン,ラヴィ・ヴイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of JP2003501841A publication Critical patent/JP2003501841A/ja
Publication of JP2003501841A5 publication Critical patent/JP2003501841A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W95/00Packaging processes not covered by the other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • H10W74/012Manufacture or treatment of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • H10W70/681Shapes or dispositions thereof comprising holes not having chips therein, e.g. for outgassing, underfilling or bond wire passage
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/853On the same surface
    • H10W72/856Bump connectors and die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49146Assembling to base an electrical component, e.g., capacitor, etc. with encapsulating, e.g., potting, etc.
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • Y10T29/49163Manufacturing circuit on or in base with sintering of base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • Y10T29/49165Manufacturing circuit on or in base by forming conductive walled aperture in base

Landscapes

  • Wire Bonding (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP2001502624A 1999-06-11 2000-06-05 基板通気孔を有する集積回路パッケージ Pending JP2003501841A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/330,373 US6490166B1 (en) 1999-06-11 1999-06-11 Integrated circuit package having a substrate vent hole
US09/330,373 1999-06-11
PCT/US2000/040107 WO2000078103A1 (en) 1999-06-11 2000-06-05 Integrated circuit package having a substrate vent hole

Publications (2)

Publication Number Publication Date
JP2003501841A true JP2003501841A (ja) 2003-01-14
JP2003501841A5 JP2003501841A5 (https=) 2007-03-22

Family

ID=23289477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001502624A Pending JP2003501841A (ja) 1999-06-11 2000-06-05 基板通気孔を有する集積回路パッケージ

Country Status (9)

Country Link
US (2) US6490166B1 (https=)
EP (1) EP1186212B1 (https=)
JP (1) JP2003501841A (https=)
KR (1) KR100456443B1 (https=)
AU (1) AU5790700A (https=)
DE (1) DE60026028T2 (https=)
HK (1) HK1042013B (https=)
IL (2) IL146865A0 (https=)
WO (1) WO2000078103A1 (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1154658A (ja) * 1997-07-30 1999-02-26 Hitachi Ltd 半導体装置及びその製造方法並びにフレーム構造体
US6483101B1 (en) 1999-12-08 2002-11-19 Amkor Technology, Inc. Molded image sensor package having lens holder
US6861720B1 (en) * 2001-08-29 2005-03-01 Amkor Technology, Inc. Placement template and method for placing optical dies
US6693239B2 (en) * 2001-09-06 2004-02-17 Delphi Technologies Inc. Overmolded circuit board with underfilled surface-mount component and method therefor
US6800946B2 (en) * 2002-12-23 2004-10-05 Motorola, Inc Selective underfill for flip chips and flip-chip assemblies
US7242097B2 (en) * 2003-06-30 2007-07-10 Intel Corporation Electromigration barrier layers for solder joints
US20050218528A1 (en) * 2004-03-31 2005-10-06 Beatty John J Capillary underfill channel
US20060046321A1 (en) * 2004-08-27 2006-03-02 Hewlett-Packard Development Company, L.P. Underfill injection mold
US20070087481A1 (en) * 2005-10-19 2007-04-19 Himax Technologies, Inc. Underfill aiding process for a tape
WO2009044863A1 (ja) * 2007-10-03 2009-04-09 Fujikura Ltd. モジュール、配線板、及びモジュールの製造方法
US9105647B2 (en) * 2010-05-17 2015-08-11 Stats Chippac, Ltd. Method of forming perforated opening in bottom substrate of flipchip pop assembly to reduce bleeding of underfill material
US8522426B2 (en) * 2010-06-05 2013-09-03 Raytheon Company Vent blocking on vented ball grid arrays to provide a cleaner solution barrier
AU2013201130B2 (en) * 2012-02-29 2014-12-11 Robert Bosch (Australia) Pty Ltd Printed circuit board
KR101970667B1 (ko) 2012-07-31 2019-04-19 삼성전자주식회사 반도체 패키지 및 이의 제조 방법
KR101934917B1 (ko) * 2012-08-06 2019-01-04 삼성전자주식회사 반도체 패키지 및 그 제조 방법
US9331370B1 (en) 2013-03-14 2016-05-03 Altera Corporation Multilayer integrated circuit packages with localized air structures
US9917068B2 (en) * 2014-03-14 2018-03-13 Taiwan Semiconductor Manufacturing Company Package substrates, packaged semiconductor devices, and methods of packaging semiconductor devices
EP3045909B1 (en) 2015-01-14 2020-11-04 Sensirion AG Sensor package
KR102437774B1 (ko) 2015-11-17 2022-08-30 삼성전자주식회사 인쇄 회로 기판
US9721812B2 (en) * 2015-11-20 2017-08-01 International Business Machines Corporation Optical device with precoated underfill
US20220028704A1 (en) * 2018-12-18 2022-01-27 Octavo Systems Llc Molded packages in a molded device
KR102932547B1 (ko) 2020-05-22 2026-03-03 삼성전자주식회사 반도체 패키지 및 그의 제조 방법

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173766A (en) * 1990-06-25 1992-12-22 Lsi Logic Corporation Semiconductor device package and method of making such a package
US5218234A (en) 1991-12-23 1993-06-08 Motorola, Inc. Semiconductor device with controlled spread polymeric underfill
US5311059A (en) * 1992-01-24 1994-05-10 Motorola, Inc. Backplane grounding for flip-chip integrated circuit
US5313365A (en) * 1992-06-30 1994-05-17 Motorola, Inc. Encapsulated electronic package
US5612576A (en) * 1992-10-13 1997-03-18 Motorola Self-opening vent hole in an overmolded semiconductor device
KR100280762B1 (ko) * 1992-11-03 2001-03-02 비센트 비.인그라시아 노출 후부를 갖는 열적 강화된 반도체 장치 및 그 제조방법
US5385869A (en) * 1993-07-22 1995-01-31 Motorola, Inc. Semiconductor chip bonded to a substrate and method of making
US5473512A (en) * 1993-12-16 1995-12-05 At&T Corp. Electronic device package having electronic device boonded, at a localized region thereof, to circuit board
US5721450A (en) 1995-06-12 1998-02-24 Motorola, Inc. Moisture relief for chip carriers
US5710071A (en) * 1995-12-04 1998-01-20 Motorola, Inc. Process for underfilling a flip-chip semiconductor device
US5766982A (en) * 1996-03-07 1998-06-16 Micron Technology, Inc. Method and apparatus for underfill of bumped or raised die
CA2198305A1 (en) 1996-05-01 1997-11-02 Yinon Degani Integrated circuit bonding method and apparatus
JPH10261661A (ja) 1997-03-19 1998-09-29 Toshiba Corp アンダーフィル充填方法及びプリント配線板構造
US5981312A (en) * 1997-06-27 1999-11-09 International Business Machines Corporation Method for injection molded flip chip encapsulation
US5919329A (en) * 1997-10-14 1999-07-06 Gore Enterprise Holdings, Inc. Method for assembling an integrated circuit chip package having at least one semiconductor device
US6038136A (en) 1997-10-29 2000-03-14 Hestia Technologies, Inc. Chip package with molded underfill
JPH11340375A (ja) 1998-05-26 1999-12-10 Toshiba Corp 配線基板および電子ユニットおよび電子部品実装方法

Also Published As

Publication number Publication date
EP1186212B1 (en) 2006-02-15
WO2000078103A1 (en) 2000-12-21
KR100456443B1 (ko) 2004-11-09
HK1042013A1 (en) 2002-07-26
USRE44629E1 (en) 2013-12-10
DE60026028D1 (de) 2006-04-20
DE60026028T2 (de) 2006-08-10
HK1042013B (en) 2006-06-02
EP1186212A1 (en) 2002-03-13
KR20020007424A (ko) 2002-01-26
IL146865A0 (en) 2002-07-25
AU5790700A (en) 2001-01-02
US6490166B1 (en) 2002-12-03
IL146865A (en) 2007-03-08

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