JP2003229610A - 酸化物超電導接合基板の製造方法 - Google Patents

酸化物超電導接合基板の製造方法

Info

Publication number
JP2003229610A
JP2003229610A JP2002025398A JP2002025398A JP2003229610A JP 2003229610 A JP2003229610 A JP 2003229610A JP 2002025398 A JP2002025398 A JP 2002025398A JP 2002025398 A JP2002025398 A JP 2002025398A JP 2003229610 A JP2003229610 A JP 2003229610A
Authority
JP
Japan
Prior art keywords
oxide superconducting
film
interlayer insulating
substrate
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002025398A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003229610A5 (enExample
Inventor
Kenichi Kuroda
研一 黒田
Tetsuya Takami
哲也 高見
Kazuhisa Nishi
和久 西
Yukihiko Wada
幸彦 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Superconductivity Technology Center
Mitsubishi Electric Corp
Original Assignee
International Superconductivity Technology Center
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Superconductivity Technology Center, Mitsubishi Electric Corp filed Critical International Superconductivity Technology Center
Priority to JP2002025398A priority Critical patent/JP2003229610A/ja
Publication of JP2003229610A publication Critical patent/JP2003229610A/ja
Publication of JP2003229610A5 publication Critical patent/JP2003229610A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP2002025398A 2002-02-01 2002-02-01 酸化物超電導接合基板の製造方法 Pending JP2003229610A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002025398A JP2003229610A (ja) 2002-02-01 2002-02-01 酸化物超電導接合基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002025398A JP2003229610A (ja) 2002-02-01 2002-02-01 酸化物超電導接合基板の製造方法

Publications (2)

Publication Number Publication Date
JP2003229610A true JP2003229610A (ja) 2003-08-15
JP2003229610A5 JP2003229610A5 (enExample) 2005-07-21

Family

ID=27747562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002025398A Pending JP2003229610A (ja) 2002-02-01 2002-02-01 酸化物超電導接合基板の製造方法

Country Status (1)

Country Link
JP (1) JP2003229610A (enExample)

Similar Documents

Publication Publication Date Title
JP2002184946A (ja) Ｍｉｍキャパシタおよびその製造方法
JPS63226981A (ja) 超伝導集積回路装置およびその製造方法
JPH0766462A (ja) 超伝導回路
JP2003229610A (ja) 酸化物超電導接合基板の製造方法
JPH025580A (ja) 超伝導ビデオ検波素子
JP3169254B2 (ja) 多層配線基板
JPH01184943A (ja) 集積回路内蔵用積層コンデンサの製法
JP2989943B2 (ja) 超電導集積回路の製造方法
JPH0766461A (ja) 超伝導回路
JPS61116869A (ja) イメ−ジセンサの製造方法
JP2003198007A (ja) トンネル接合の作製方法及びトンネル接合素子
JPS62172773A (ja) トンネル型ジヨセフソン素子の製法
JPS63248187A (ja) 超伝導デバイス
JPH09135042A (ja) 超伝導接続用パッドおよびその製造方法
JP2002299163A (ja) 可変容量素子
JPS5885550A (ja) 積層集積回路素子の製造方法
JPH0360184B2 (enExample)
JP2001274470A (ja) トンネル接合素子及びその製造方法
JPH05251773A (ja) ジョセフソン素子とその作製方法
JPH01184967A (ja) ジョセフソン素子およびその製造方法
JPS63300579A (ja) ジョセフソン回路の製造方法
JPS60113485A (ja) ジョセフソン接合素子の製造方法
JPH09139527A (ja) 超伝導接続用パッドおよびその製造方法
JPH03178016A (ja) 薄膜磁気ヘッドの製造方法
JPH05190926A (ja) 超電導装置の作製方法およびこの方法による超電導装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041126

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041126

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060929

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080226

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20080624