JP2003224134A5 - - Google Patents
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- Publication number
- JP2003224134A5 JP2003224134A5 JP2002023676A JP2002023676A JP2003224134A5 JP 2003224134 A5 JP2003224134 A5 JP 2003224134A5 JP 2002023676 A JP2002023676 A JP 2002023676A JP 2002023676 A JP2002023676 A JP 2002023676A JP 2003224134 A5 JP2003224134 A5 JP 2003224134A5
- Authority
- JP
- Japan
- Prior art keywords
- defect
- region
- width
- junction diode
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 description 157
- 150000002500 ions Chemical class 0.000 description 68
- 238000009826 distribution Methods 0.000 description 64
- 238000004519 manufacturing process Methods 0.000 description 42
- 239000010408 film Substances 0.000 description 41
- 239000010409 thin film Substances 0.000 description 29
- 239000006096 absorbing agent Substances 0.000 description 27
- 239000013078 crystal Substances 0.000 description 27
- 238000000034 method Methods 0.000 description 21
- 238000002513 implantation Methods 0.000 description 16
- 238000005468 ion implantation Methods 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 13
- 239000011159 matrix material Substances 0.000 description 11
- 239000012535 impurity Substances 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- 230000015556 catabolic process Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- -1 helium ions Chemical class 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002023676A JP4146645B2 (ja) | 2002-01-31 | 2002-01-31 | ｐｎ接合ダイオードの製造方法及びｐｎ接合ダイオード |
| US10/331,646 US6709914B2 (en) | 2002-01-31 | 2002-12-31 | Manufacturing process of pn junction diode device and pn junction diode device |
| CH00145/03A CH696374A5 (de) | 2002-01-31 | 2003-01-31 | Herstellungsverfahren für eine PN-Sperrschicht-Diodenvorrichtung, und eine PN-Sperrschicht-Diodenvorrichtung. |
| DE10303942A DE10303942B4 (de) | 2002-01-31 | 2003-01-31 | Herstellungsverfahren für eine PN-Sperrschicht-Diodenvorrichtung, und eine PN-Sperrschicht-Diodenvorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002023676A JP4146645B2 (ja) | 2002-01-31 | 2002-01-31 | ｐｎ接合ダイオードの製造方法及びｐｎ接合ダイオード |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003224134A JP2003224134A (ja) | 2003-08-08 |
| JP2003224134A5 true JP2003224134A5 (https=) | 2005-06-09 |
| JP4146645B2 JP4146645B2 (ja) | 2008-09-10 |
Family
ID=27606411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002023676A Expired - Fee Related JP4146645B2 (ja) | 2002-01-31 | 2002-01-31 | ｐｎ接合ダイオードの製造方法及びｐｎ接合ダイオード |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6709914B2 (https=) |
| JP (1) | JP4146645B2 (https=) |
| CH (1) | CH696374A5 (https=) |
| DE (1) | DE10303942B4 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006108346A (ja) * | 2004-10-05 | 2006-04-20 | Matsushita Electric Ind Co Ltd | チップ型半導体素子とその製造方法 |
| CN100361316C (zh) * | 2005-10-28 | 2008-01-09 | 冯守华 | 原子级p-n结单晶整流器及其应用 |
| JP5374883B2 (ja) | 2008-02-08 | 2013-12-25 | 富士電機株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2963204B2 (ja) | 1990-12-12 | 1999-10-18 | 三菱電機株式会社 | 絶縁ゲート型バイポーラトランジスタの製造方法 |
| JPH10116998A (ja) | 1996-10-14 | 1998-05-06 | Toyota Motor Corp | 半導体装置およびその製造方法 |
| GB9709642D0 (en) | 1997-05-14 | 1997-07-02 | Plessey Semiconductors Ltd | Improvements in or relating to semiconductor devices |
| US6261874B1 (en) * | 2000-06-14 | 2001-07-17 | International Rectifier Corp. | Fast recovery diode and method for its manufacture |
-
2002
- 2002-01-31 JP JP2002023676A patent/JP4146645B2/ja not_active Expired - Fee Related
- 2002-12-31 US US10/331,646 patent/US6709914B2/en not_active Expired - Fee Related
-
2003
- 2003-01-31 CH CH00145/03A patent/CH696374A5/de not_active IP Right Cessation
- 2003-01-31 DE DE10303942A patent/DE10303942B4/de not_active Expired - Fee Related
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