JP2003179067A5 - - Google Patents

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Publication number
JP2003179067A5
JP2003179067A5 JP2002270858A JP2002270858A JP2003179067A5 JP 2003179067 A5 JP2003179067 A5 JP 2003179067A5 JP 2002270858 A JP2002270858 A JP 2002270858A JP 2002270858 A JP2002270858 A JP 2002270858A JP 2003179067 A5 JP2003179067 A5 JP 2003179067A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2002270858A
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Japanese (ja)
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JP4797185B2 (ja
JP2003179067A (ja
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Publication date
Priority claimed from US09/956,382 external-priority patent/US6759730B2/en
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Publication of JP2003179067A publication Critical patent/JP2003179067A/ja
Publication of JP2003179067A5 publication Critical patent/JP2003179067A5/ja
Application granted granted Critical
Publication of JP4797185B2 publication Critical patent/JP4797185B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002270858A 2001-09-18 2002-09-18 縦型リプレイスメント・ゲート・トランジスタと両立性のあるバイポーラ接合トランジスタ Expired - Fee Related JP4797185B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/956,382 US6759730B2 (en) 2001-09-18 2001-09-18 Bipolar junction transistor compatible with vertical replacement gate transistor
US09/956382 2001-09-18

Publications (3)

Publication Number Publication Date
JP2003179067A JP2003179067A (ja) 2003-06-27
JP2003179067A5 true JP2003179067A5 (enExample) 2005-11-04
JP4797185B2 JP4797185B2 (ja) 2011-10-19

Family

ID=25498168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002270858A Expired - Fee Related JP4797185B2 (ja) 2001-09-18 2002-09-18 縦型リプレイスメント・ゲート・トランジスタと両立性のあるバイポーラ接合トランジスタ

Country Status (5)

Country Link
US (1) US6759730B2 (enExample)
JP (1) JP4797185B2 (enExample)
KR (1) KR100918779B1 (enExample)
GB (1) GB2383190B (enExample)
TW (1) TW569451B (enExample)

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US9966456B1 (en) 2016-11-08 2018-05-08 Globalfoundries Inc. Methods of forming gate electrodes on a vertical transistor device
KR20180066708A (ko) * 2016-12-09 2018-06-19 삼성전자주식회사 반도체 장치 및 그 제조 방법
US9935018B1 (en) 2017-02-17 2018-04-03 Globalfoundries Inc. Methods of forming vertical transistor devices with different effective gate lengths
US10229999B2 (en) 2017-02-28 2019-03-12 Globalfoundries Inc. Methods of forming upper source/drain regions on a vertical transistor device
US10014370B1 (en) 2017-04-19 2018-07-03 Globalfoundries Inc. Air gap adjacent a bottom source/drain region of vertical transistor device
US10269800B2 (en) * 2017-05-26 2019-04-23 Taiwan Semiconductor Manufacturing Co., Ltd. Vertical gate semiconductor device with steep subthreshold slope
US9991359B1 (en) 2017-06-15 2018-06-05 International Business Machines Corporation Vertical transistor gated diode
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US11563084B2 (en) 2019-10-01 2023-01-24 Analog Devices International Unlimited Company Bipolar junction transistor, and a method of forming an emitter for a bipolar junction transistor
US11404540B2 (en) 2019-10-01 2022-08-02 Analog Devices International Unlimited Company Bipolar junction transistor, and a method of forming a collector for a bipolar junction transistor
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