JP2003115593A - 電気光学装置及びその製造方法、電子機器並びに薄膜トランジスタ - Google Patents
電気光学装置及びその製造方法、電子機器並びに薄膜トランジスタInfo
- Publication number
- JP2003115593A JP2003115593A JP2001309107A JP2001309107A JP2003115593A JP 2003115593 A JP2003115593 A JP 2003115593A JP 2001309107 A JP2001309107 A JP 2001309107A JP 2001309107 A JP2001309107 A JP 2001309107A JP 2003115593 A JP2003115593 A JP 2003115593A
- Authority
- JP
- Japan
- Prior art keywords
- channel region
- gate electrode
- electro
- optical device
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- 238000005224 laser annealing Methods 0.000 description 1
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- 229910001507 metal halide Inorganic materials 0.000 description 1
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001309107A JP2003115593A (ja) | 2001-10-04 | 2001-10-04 | 電気光学装置及びその製造方法、電子機器並びに薄膜トランジスタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001309107A JP2003115593A (ja) | 2001-10-04 | 2001-10-04 | 電気光学装置及びその製造方法、電子機器並びに薄膜トランジスタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003115593A true JP2003115593A (ja) | 2003-04-18 |
| JP2003115593A5 JP2003115593A5 (enrdf_load_stackoverflow) | 2005-06-23 |
Family
ID=19128308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001309107A Pending JP2003115593A (ja) | 2001-10-04 | 2001-10-04 | 電気光学装置及びその製造方法、電子機器並びに薄膜トランジスタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003115593A (enrdf_load_stackoverflow) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012069842A (ja) * | 2010-09-27 | 2012-04-05 | Hitachi Displays Ltd | 表示装置 |
| JP2012235102A (ja) * | 2011-04-22 | 2012-11-29 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| CN103411101A (zh) * | 2013-07-31 | 2013-11-27 | 昆山维金五金制品有限公司 | 一种液晶屏支架 |
| JP2014106539A (ja) * | 2012-11-26 | 2014-06-09 | Boe Technology Group Co Ltd | アレイ基板及びアレイ基板の製造方法、並びにディスプレイデバイス |
| JP2015119175A (ja) * | 2013-11-15 | 2015-06-25 | 株式会社半導体エネルギー研究所 | 半導体装置及び表示装置 |
| JP2017041527A (ja) * | 2015-08-19 | 2017-02-23 | 株式会社ジャパンディスプレイ | 表示装置 |
| JP2020036026A (ja) * | 2013-06-19 | 2020-03-05 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP2020065083A (ja) * | 2015-03-27 | 2020-04-23 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP2025517041A (ja) * | 2023-03-30 | 2025-06-03 | グァンチョウ チャイナスター オプトエレクトロニクス セミコンダクター ディスプレイ テクノロジー カンパニー リミテッド | アレイ基板及び表示パネル |
-
2001
- 2001-10-04 JP JP2001309107A patent/JP2003115593A/ja active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012069842A (ja) * | 2010-09-27 | 2012-04-05 | Hitachi Displays Ltd | 表示装置 |
| JP2012235102A (ja) * | 2011-04-22 | 2012-11-29 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| JP2014106539A (ja) * | 2012-11-26 | 2014-06-09 | Boe Technology Group Co Ltd | アレイ基板及びアレイ基板の製造方法、並びにディスプレイデバイス |
| JP2020036026A (ja) * | 2013-06-19 | 2020-03-05 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP2020115547A (ja) * | 2013-06-19 | 2020-07-30 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| CN103411101A (zh) * | 2013-07-31 | 2013-11-27 | 昆山维金五金制品有限公司 | 一种液晶屏支架 |
| JP2015119175A (ja) * | 2013-11-15 | 2015-06-25 | 株式会社半導体エネルギー研究所 | 半導体装置及び表示装置 |
| JP2020065083A (ja) * | 2015-03-27 | 2020-04-23 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US11538940B2 (en) | 2015-03-27 | 2022-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
| JP2017041527A (ja) * | 2015-08-19 | 2017-02-23 | 株式会社ジャパンディスプレイ | 表示装置 |
| JP2025517041A (ja) * | 2023-03-30 | 2025-06-03 | グァンチョウ チャイナスター オプトエレクトロニクス セミコンダクター ディスプレイ テクノロジー カンパニー リミテッド | アレイ基板及び表示パネル |
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