JP2003065481A5 - - Google Patents

Download PDF

Info

Publication number
JP2003065481A5
JP2003065481A5 JP2002134767A JP2002134767A JP2003065481A5 JP 2003065481 A5 JP2003065481 A5 JP 2003065481A5 JP 2002134767 A JP2002134767 A JP 2002134767A JP 2002134767 A JP2002134767 A JP 2002134767A JP 2003065481 A5 JP2003065481 A5 JP 2003065481A5
Authority
JP
Japan
Prior art keywords
tube
high purity
diameter
treatment system
fluid treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2002134767A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003065481A (ja
Filing date
Publication date
Priority claimed from US09/854,132 external-priority patent/US6513540B2/en
Application filed filed Critical
Publication of JP2003065481A publication Critical patent/JP2003065481A/ja
Publication of JP2003065481A5 publication Critical patent/JP2003065481A5/ja
Ceased legal-status Critical Current

Links

JP2002134767A 2001-05-11 2002-05-10 折り曲げたパイプを高純度流体処理システム中で用いるためのシステム及び方法 Ceased JP2003065481A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/854132 2001-05-11
US09/854,132 US6513540B2 (en) 2001-05-11 2001-05-11 System and method for using bent pipes in high-purity fluid handling systems

Publications (2)

Publication Number Publication Date
JP2003065481A JP2003065481A (ja) 2003-03-05
JP2003065481A5 true JP2003065481A5 (enExample) 2005-09-15

Family

ID=25317814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002134767A Ceased JP2003065481A (ja) 2001-05-11 2002-05-10 折り曲げたパイプを高純度流体処理システム中で用いるためのシステム及び方法

Country Status (8)

Country Link
US (2) US6513540B2 (enExample)
EP (1) EP1260745B1 (enExample)
JP (1) JP2003065481A (enExample)
KR (1) KR100883404B1 (enExample)
AT (1) ATE400760T1 (enExample)
CA (2) CA2670718A1 (enExample)
DE (1) DE60227450D1 (enExample)
TW (1) TW530139B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6513540B2 (en) * 2001-05-11 2003-02-04 Therma Corporation, Inc. System and method for using bent pipes in high-purity fluid handling systems
JP4337530B2 (ja) * 2003-12-09 2009-09-30 株式会社デンソー 赤外線吸収膜の製造方法
KR100904452B1 (ko) * 2007-12-06 2009-06-24 세메스 주식회사 오존수혼합액 공급장치 및 방법, 그리고 이를 구비하는기판 처리 설비
JP5239567B2 (ja) * 2008-07-09 2013-07-17 Ｊｓｒ株式会社 半導体製造用組成物溶液の製造装置
JP4656264B2 (ja) * 2009-05-29 2011-03-23 Ｄｉｃ株式会社 表面処理された基材、それを使用した太陽電池用受光面側保護シート、及び太陽電池モジュール
CN102284569B (zh) * 2011-06-15 2014-06-04 中国石油天然气股份有限公司 一种热煨弯管工艺方法
US8986785B2 (en) 2011-06-23 2015-03-24 Surface Activation Technologies Method and apparatus for continuous sulfonization of discrete article
TWI519756B (zh) * 2011-11-17 2016-02-01 緯創資通股份有限公司 熱管及熱管製造方法
US10322368B2 (en) * 2016-02-23 2019-06-18 The Boeing Company Centrifugal air separator coil manufacturing tools and methods
US9698042B1 (en) 2016-07-22 2017-07-04 Lam Research Corporation Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge
CN112024743B (zh) * 2020-09-08 2022-04-12 山东楚雨源环保科技有限公司 一种用于节能环保设备的管道封头装置
US20260136865A1 (en) * 2024-11-14 2026-05-14 Applied Materials, Inc. Multi-compartment gas panel assembly

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2303949A (en) * 1940-01-13 1942-12-01 Carl H Nordell Conduit bend
JPH0698292B2 (ja) * 1986-07-03 1994-12-07 忠弘 大見 超高純度ガスの供給方法及び供給系
US5339868A (en) * 1987-01-07 1994-08-23 Nippon Steel Corporation Bent pipe having sectional form of high strength
LU86802A1 (fr) * 1987-03-09 1987-08-12 Ceodeux Sa Centrale de commande pour gaz sous pression
US5789086A (en) * 1990-03-05 1998-08-04 Ohmi; Tadahiro Stainless steel surface having passivation film
JP3122311B2 (ja) * 1994-06-29 2001-01-09 東京エレクトロン株式会社 成膜処理室への液体材料供給装置及びその使用方法
DE19617006C1 (de) * 1996-04-27 1997-06-19 Masterflex Kunststofftechnik G Rohrbogen
SE508405C2 (sv) * 1996-10-07 1998-10-05 Abb Carbon Ab Transportsystem för partikulärt material samt användning av ett dylikt transportsystem för transport av aska i en kraftanläggning
US5958195A (en) 1997-05-22 1999-09-28 Therma Corporation, Inc. Tube inner surface electropolishing device
JP2000172343A (ja) * 1998-12-02 2000-06-23 Hitachi Ltd ガス供給装置と成膜装置
US6223770B1 (en) * 1999-09-29 2001-05-01 Lsi Logic Corporation Vacuum valve interface
US6513540B2 (en) * 2001-05-11 2003-02-04 Therma Corporation, Inc. System and method for using bent pipes in high-purity fluid handling systems

Similar Documents

Publication Publication Date Title
CN101263243B (zh) 具有纹理表面的流动形成的室组件
WO2003039642A1 (en) Stent
CN103108709A (zh) 旋压成形工艺及用于通过旋压成形来制造物品的装置
WO2001080936A1 (fr) Endoprothese vasculaire
CN103430280A (zh) 延长使用期限的纹理腔室部件与制造纹理腔室部件的方法
CN109047370B (zh) 一种镍钛形状记忆合金异形管材加工工艺
JP2008045739A5 (enExample)
TW530139B (en) System and method for using bent pipes in high-purity fluid handling systems
KR101794037B1 (ko) 나선형 블레이드 제조방법
CN202239121U (zh) 生产薄壁弯管的三头心轴
WO2010025666A1 (zh) 节状器皿及其加工方法
WO2000062953A1 (en) Method for spin forming a tube
CN119870233B (zh) 低减薄率的弯管成形方法
CN215199126U (zh) 一种钢管弯曲防皱褶装置
JPS59163024A (ja) 屈曲管材の製造法及びそのプレス装置並びに成形された製品
KR200271649Y1 (ko) 각형 파이프 조관기
JPS6114022A (ja) パイプ曲げ加工方法
JP7816221B2 (ja) パイプベンダー
CN107908809A (zh) 一种三轴自由弯曲模与导向机构配合优化设计方法
JP6818536B2 (ja) 螺旋状波形溝付管の製造方法
CN104772375A (zh) 弯管装置和弯管方法
CN107983813B (zh) 一种带约束管轴压同步成形板式换热器衬环的方法
JPS62283835A (ja) １回または数回湾曲した管状放電管容器の製造法
CN201106020Y (zh) 一种螺旋形灯管弯管机
CN218627258U (zh) 一种用于空调器的冷凝水管路支架以及空调器