JP2003065481A5 - - Google Patents

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Publication number
JP2003065481A5
JP2003065481A5 JP2002134767A JP2002134767A JP2003065481A5 JP 2003065481 A5 JP2003065481 A5 JP 2003065481A5 JP 2002134767 A JP2002134767 A JP 2002134767A JP 2002134767 A JP2002134767 A JP 2002134767A JP 2003065481 A5 JP2003065481 A5 JP 2003065481A5
Authority
JP
Japan
Prior art keywords
tube
high purity
diameter
treatment system
fluid treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2002134767A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003065481A (ja
Filing date
Publication date
Priority claimed from US09/854,132 external-priority patent/US6513540B2/en
Application filed filed Critical
Publication of JP2003065481A publication Critical patent/JP2003065481A/ja
Publication of JP2003065481A5 publication Critical patent/JP2003065481A5/ja
Ceased legal-status Critical Current

Links

JP2002134767A 2001-05-11 2002-05-10 折り曲げたパイプを高純度流体処理システム中で用いるためのシステム及び方法 Ceased JP2003065481A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/854,132 US6513540B2 (en) 2001-05-11 2001-05-11 System and method for using bent pipes in high-purity fluid handling systems
US09/854132 2001-05-11

Publications (2)

Publication Number Publication Date
JP2003065481A JP2003065481A (ja) 2003-03-05
JP2003065481A5 true JP2003065481A5 (enExample) 2005-09-15

Family

ID=25317814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002134767A Ceased JP2003065481A (ja) 2001-05-11 2002-05-10 折り曲げたパイプを高純度流体処理システム中で用いるためのシステム及び方法

Country Status (8)

Country Link
US (2) US6513540B2 (enExample)
EP (1) EP1260745B1 (enExample)
JP (1) JP2003065481A (enExample)
KR (1) KR100883404B1 (enExample)
AT (1) ATE400760T1 (enExample)
CA (2) CA2670718A1 (enExample)
DE (1) DE60227450D1 (enExample)
TW (1) TW530139B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6513540B2 (en) * 2001-05-11 2003-02-04 Therma Corporation, Inc. System and method for using bent pipes in high-purity fluid handling systems
JP4337530B2 (ja) * 2003-12-09 2009-09-30 株式会社デンソー 赤外線吸収膜の製造方法
KR100904452B1 (ko) * 2007-12-06 2009-06-24 세메스 주식회사 오존수혼합액 공급장치 및 방법, 그리고 이를 구비하는기판 처리 설비
JP5239567B2 (ja) * 2008-07-09 2013-07-17 Ｊｓｒ株式会社 半導体製造用組成物溶液の製造装置
KR101205850B1 (ko) * 2009-05-29 2012-11-28 디아이씨 가부시끼가이샤 표면 처리된 기재, 그것을 사용한 태양 전지용 수광면측 보호 시트, 및 태양 전지 모듈
CN102284569B (zh) * 2011-06-15 2014-06-04 中国石油天然气股份有限公司 一种热煨弯管工艺方法
US8986785B2 (en) 2011-06-23 2015-03-24 Surface Activation Technologies Method and apparatus for continuous sulfonization of discrete article
TWI519756B (zh) * 2011-11-17 2016-02-01 緯創資通股份有限公司 熱管及熱管製造方法
US10322368B2 (en) * 2016-02-23 2019-06-18 The Boeing Company Centrifugal air separator coil manufacturing tools and methods
US9698042B1 (en) 2016-07-22 2017-07-04 Lam Research Corporation Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge
CN112024743B (zh) * 2020-09-08 2022-04-12 山东楚雨源环保科技有限公司 一种用于节能环保设备的管道封头装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2303949A (en) * 1940-01-13 1942-12-01 Carl H Nordell Conduit bend
JPH0698292B2 (ja) * 1986-07-03 1994-12-07 忠弘 大見 超高純度ガスの供給方法及び供給系
US5339868A (en) * 1987-01-07 1994-08-23 Nippon Steel Corporation Bent pipe having sectional form of high strength
LU86802A1 (fr) * 1987-03-09 1987-08-12 Ceodeux Sa Centrale de commande pour gaz sous pression
US5789086A (en) * 1990-03-05 1998-08-04 Ohmi; Tadahiro Stainless steel surface having passivation film
JP3122311B2 (ja) * 1994-06-29 2001-01-09 東京エレクトロン株式会社 成膜処理室への液体材料供給装置及びその使用方法
DE19617006C1 (de) * 1996-04-27 1997-06-19 Masterflex Kunststofftechnik G Rohrbogen
SE508405C2 (sv) * 1996-10-07 1998-10-05 Abb Carbon Ab Transportsystem för partikulärt material samt användning av ett dylikt transportsystem för transport av aska i en kraftanläggning
US5958195A (en) * 1997-05-22 1999-09-28 Therma Corporation, Inc. Tube inner surface electropolishing device
JP2000172343A (ja) * 1998-12-02 2000-06-23 Hitachi Ltd ガス供給装置と成膜装置
US6223770B1 (en) * 1999-09-29 2001-05-01 Lsi Logic Corporation Vacuum valve interface
US6513540B2 (en) * 2001-05-11 2003-02-04 Therma Corporation, Inc. System and method for using bent pipes in high-purity fluid handling systems

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