KR100883404B1 - 고순도 유체 처리 시스템에서 구부러진 파이프를 사용하기 위한 시스템 및 방법 - Google Patents

고순도 유체 처리 시스템에서 구부러진 파이프를 사용하기 위한 시스템 및 방법 Download PDF

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KR100883404B1
KR100883404B1 KR1020020026034A KR20020026034A KR100883404B1 KR 100883404 B1 KR100883404 B1 KR 100883404B1 KR 1020020026034 A KR1020020026034 A KR 1020020026034A KR 20020026034 A KR20020026034 A KR 20020026034A KR 100883404 B1 KR100883404 B1 KR 100883404B1
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South Korea
Prior art keywords
metal tube
high purity
bend
treatment system
fluid treatment
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Expired - Fee Related
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KR1020020026034A
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English (en)
Korean (ko)
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KR20020086303A (ko
Inventor
에르데이니콜라이엠.
메이즈토드에이.
Original Assignee
써마 코포레이션, 인코퍼레이티드
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Publication of KR20020086303A publication Critical patent/KR20020086303A/ko
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
    • B01J2219/0277—Metal based
    • B01J2219/0286—Steel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Bending Of Plates, Rods, And Pipes (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipeline Systems (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020020026034A 2001-05-11 2002-05-11 고순도 유체 처리 시스템에서 구부러진 파이프를 사용하기 위한 시스템 및 방법 Expired - Fee Related KR100883404B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/854,132 2001-05-11
US09/854,132 US6513540B2 (en) 2001-05-11 2001-05-11 System and method for using bent pipes in high-purity fluid handling systems

Publications (2)

Publication Number Publication Date
KR20020086303A KR20020086303A (ko) 2002-11-18
KR100883404B1 true KR100883404B1 (ko) 2009-02-11

Family

ID=25317814

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020020026034A Expired - Fee Related KR100883404B1 (ko) 2001-05-11 2002-05-11 고순도 유체 처리 시스템에서 구부러진 파이프를 사용하기 위한 시스템 및 방법

Country Status (8)

Country Link
US (2) US6513540B2 (enExample)
EP (1) EP1260745B1 (enExample)
JP (1) JP2003065481A (enExample)
KR (1) KR100883404B1 (enExample)
AT (1) ATE400760T1 (enExample)
CA (2) CA2384397A1 (enExample)
DE (1) DE60227450D1 (enExample)
TW (1) TW530139B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6513540B2 (en) * 2001-05-11 2003-02-04 Therma Corporation, Inc. System and method for using bent pipes in high-purity fluid handling systems
JP4337530B2 (ja) * 2003-12-09 2009-09-30 株式会社デンソー 赤外線吸収膜の製造方法
KR100904452B1 (ko) * 2007-12-06 2009-06-24 세메스 주식회사 오존수혼합액 공급장치 및 방법, 그리고 이를 구비하는기판 처리 설비
JP5239567B2 (ja) * 2008-07-09 2013-07-17 Ｊｓｒ株式会社 半導体製造用組成物溶液の製造装置
KR101205850B1 (ko) * 2009-05-29 2012-11-28 디아이씨 가부시끼가이샤 표면 처리된 기재, 그것을 사용한 태양 전지용 수광면측 보호 시트, 및 태양 전지 모듈
CN102284569B (zh) * 2011-06-15 2014-06-04 中国石油天然气股份有限公司 一种热煨弯管工艺方法
US8986785B2 (en) 2011-06-23 2015-03-24 Surface Activation Technologies Method and apparatus for continuous sulfonization of discrete article
TWI519756B (zh) * 2011-11-17 2016-02-01 緯創資通股份有限公司 熱管及熱管製造方法
US10322368B2 (en) 2016-02-23 2019-06-18 The Boeing Company Centrifugal air separator coil manufacturing tools and methods
US9698042B1 (en) 2016-07-22 2017-07-04 Lam Research Corporation Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge
CN112024743B (zh) * 2020-09-08 2022-04-12 山东楚雨源环保科技有限公司 一种用于节能环保设备的管道封头装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4971100A (en) * 1986-07-03 1990-11-20 Tadahiro Ohmi System for supplying ultrahigh purity gas

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2303949A (en) * 1940-01-13 1942-12-01 Carl H Nordell Conduit bend
US5339868A (en) * 1987-01-07 1994-08-23 Nippon Steel Corporation Bent pipe having sectional form of high strength
LU86802A1 (fr) * 1987-03-09 1987-08-12 Ceodeux Sa Centrale de commande pour gaz sous pression
US5789086A (en) * 1990-03-05 1998-08-04 Ohmi; Tadahiro Stainless steel surface having passivation film
JP3122311B2 (ja) * 1994-06-29 2001-01-09 東京エレクトロン株式会社 成膜処理室への液体材料供給装置及びその使用方法
DE19617006C1 (de) * 1996-04-27 1997-06-19 Masterflex Kunststofftechnik G Rohrbogen
SE508405C2 (sv) * 1996-10-07 1998-10-05 Abb Carbon Ab Transportsystem för partikulärt material samt användning av ett dylikt transportsystem för transport av aska i en kraftanläggning
US5958195A (en) 1997-05-22 1999-09-28 Therma Corporation, Inc. Tube inner surface electropolishing device
JP2000172343A (ja) * 1998-12-02 2000-06-23 Hitachi Ltd ガス供給装置と成膜装置
US6223770B1 (en) * 1999-09-29 2001-05-01 Lsi Logic Corporation Vacuum valve interface
US6513540B2 (en) * 2001-05-11 2003-02-04 Therma Corporation, Inc. System and method for using bent pipes in high-purity fluid handling systems

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4971100A (en) * 1986-07-03 1990-11-20 Tadahiro Ohmi System for supplying ultrahigh purity gas

Also Published As

Publication number Publication date
US20020166590A1 (en) 2002-11-14
CA2384397A1 (en) 2002-11-11
KR20020086303A (ko) 2002-11-18
CA2670718A1 (en) 2002-11-11
JP2003065481A (ja) 2003-03-05
ATE400760T1 (de) 2008-07-15
US20030089395A1 (en) 2003-05-15
US6691726B2 (en) 2004-02-17
EP1260745B1 (en) 2008-07-09
TW530139B (en) 2003-05-01
EP1260745A2 (en) 2002-11-27
EP1260745A3 (en) 2003-08-13
US6513540B2 (en) 2003-02-04
DE60227450D1 (de) 2008-08-21

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