DE60227450D1 - System und Verfahren zur Benutzung von gebogenen Röhren in einem hochreinen Flüssigkeitsbehandlungssystem - Google Patents

System und Verfahren zur Benutzung von gebogenen Röhren in einem hochreinen Flüssigkeitsbehandlungssystem

Info

Publication number
DE60227450D1
DE60227450D1 DE60227450T DE60227450T DE60227450D1 DE 60227450 D1 DE60227450 D1 DE 60227450D1 DE 60227450 T DE60227450 T DE 60227450T DE 60227450 T DE60227450 T DE 60227450T DE 60227450 D1 DE60227450 D1 DE 60227450D1
Authority
DE
Germany
Prior art keywords
high purity
tube
liquid handling
purity liquid
bent tubes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60227450T
Other languages
German (de)
English (en)
Inventor
Nicolae M Erdei
Todd A Mays
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Therma Corp Inc
Original Assignee
Therma Corp Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Therma Corp Inc filed Critical Therma Corp Inc
Application granted granted Critical
Publication of DE60227450D1 publication Critical patent/DE60227450D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
    • B01J2219/0277—Metal based
    • B01J2219/0286—Steel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Bending Of Plates, Rods, And Pipes (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipeline Systems (AREA)
DE60227450T 2001-05-11 2002-05-04 System und Verfahren zur Benutzung von gebogenen Röhren in einem hochreinen Flüssigkeitsbehandlungssystem Expired - Fee Related DE60227450D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/854,132 US6513540B2 (en) 2001-05-11 2001-05-11 System and method for using bent pipes in high-purity fluid handling systems

Publications (1)

Publication Number Publication Date
DE60227450D1 true DE60227450D1 (de) 2008-08-21

Family

ID=25317814

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60227450T Expired - Fee Related DE60227450D1 (de) 2001-05-11 2002-05-04 System und Verfahren zur Benutzung von gebogenen Röhren in einem hochreinen Flüssigkeitsbehandlungssystem

Country Status (8)

Country Link
US (2) US6513540B2 (enExample)
EP (1) EP1260745B1 (enExample)
JP (1) JP2003065481A (enExample)
KR (1) KR100883404B1 (enExample)
AT (1) ATE400760T1 (enExample)
CA (2) CA2670718A1 (enExample)
DE (1) DE60227450D1 (enExample)
TW (1) TW530139B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6513540B2 (en) * 2001-05-11 2003-02-04 Therma Corporation, Inc. System and method for using bent pipes in high-purity fluid handling systems
JP4337530B2 (ja) * 2003-12-09 2009-09-30 株式会社デンソー 赤外線吸収膜の製造方法
KR100904452B1 (ko) * 2007-12-06 2009-06-24 세메스 주식회사 오존수혼합액 공급장치 및 방법, 그리고 이를 구비하는기판 처리 설비
JP5239567B2 (ja) * 2008-07-09 2013-07-17 Ｊｓｒ株式会社 半導体製造用組成物溶液の製造装置
JP4656264B2 (ja) * 2009-05-29 2011-03-23 Ｄｉｃ株式会社 表面処理された基材、それを使用した太陽電池用受光面側保護シート、及び太陽電池モジュール
CN102284569B (zh) * 2011-06-15 2014-06-04 中国石油天然气股份有限公司 一种热煨弯管工艺方法
US8986785B2 (en) 2011-06-23 2015-03-24 Surface Activation Technologies Method and apparatus for continuous sulfonization of discrete article
TWI519756B (zh) * 2011-11-17 2016-02-01 緯創資通股份有限公司 熱管及熱管製造方法
US10322368B2 (en) * 2016-02-23 2019-06-18 The Boeing Company Centrifugal air separator coil manufacturing tools and methods
US9698042B1 (en) 2016-07-22 2017-07-04 Lam Research Corporation Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge
CN112024743B (zh) * 2020-09-08 2022-04-12 山东楚雨源环保科技有限公司 一种用于节能环保设备的管道封头装置
US20260136865A1 (en) * 2024-11-14 2026-05-14 Applied Materials, Inc. Multi-compartment gas panel assembly

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2303949A (en) * 1940-01-13 1942-12-01 Carl H Nordell Conduit bend
JPH0698292B2 (ja) * 1986-07-03 1994-12-07 忠弘 大見 超高純度ガスの供給方法及び供給系
US5339868A (en) * 1987-01-07 1994-08-23 Nippon Steel Corporation Bent pipe having sectional form of high strength
LU86802A1 (fr) * 1987-03-09 1987-08-12 Ceodeux Sa Centrale de commande pour gaz sous pression
US5789086A (en) * 1990-03-05 1998-08-04 Ohmi; Tadahiro Stainless steel surface having passivation film
JP3122311B2 (ja) * 1994-06-29 2001-01-09 東京エレクトロン株式会社 成膜処理室への液体材料供給装置及びその使用方法
DE19617006C1 (de) * 1996-04-27 1997-06-19 Masterflex Kunststofftechnik G Rohrbogen
SE508405C2 (sv) * 1996-10-07 1998-10-05 Abb Carbon Ab Transportsystem för partikulärt material samt användning av ett dylikt transportsystem för transport av aska i en kraftanläggning
US5958195A (en) 1997-05-22 1999-09-28 Therma Corporation, Inc. Tube inner surface electropolishing device
JP2000172343A (ja) * 1998-12-02 2000-06-23 Hitachi Ltd ガス供給装置と成膜装置
US6223770B1 (en) * 1999-09-29 2001-05-01 Lsi Logic Corporation Vacuum valve interface
US6513540B2 (en) * 2001-05-11 2003-02-04 Therma Corporation, Inc. System and method for using bent pipes in high-purity fluid handling systems

Also Published As

Publication number Publication date
ATE400760T1 (de) 2008-07-15
EP1260745A2 (en) 2002-11-27
US20030089395A1 (en) 2003-05-15
JP2003065481A (ja) 2003-03-05
CA2670718A1 (en) 2002-11-11
EP1260745B1 (en) 2008-07-09
KR20020086303A (ko) 2002-11-18
TW530139B (en) 2003-05-01
US20020166590A1 (en) 2002-11-14
KR100883404B1 (ko) 2009-02-11
US6513540B2 (en) 2003-02-04
US6691726B2 (en) 2004-02-17
EP1260745A3 (en) 2003-08-13
CA2384397A1 (en) 2002-11-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee