JP2003065481A - 折り曲げたパイプを高純度流体処理システム中で用いるためのシステム及び方法 - Google Patents

折り曲げたパイプを高純度流体処理システム中で用いるためのシステム及び方法

Info

Publication number
JP2003065481A
JP2003065481A JP2002134767A JP2002134767A JP2003065481A JP 2003065481 A JP2003065481 A JP 2003065481A JP 2002134767 A JP2002134767 A JP 2002134767A JP 2002134767 A JP2002134767 A JP 2002134767A JP 2003065481 A JP2003065481 A JP 2003065481A
Authority
JP
Japan
Prior art keywords
high purity
tube
treatment system
fluid treatment
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2002134767A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003065481A5 (enExample
Inventor
Nicolae M Erdei
エム． エルデイ ニコラエ
Todd A Mays
エー． メイズ トッド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Therma Corp Inc
Original Assignee
Therma Corp Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Therma Corp Inc filed Critical Therma Corp Inc
Publication of JP2003065481A publication Critical patent/JP2003065481A/ja
Publication of JP2003065481A5 publication Critical patent/JP2003065481A5/ja
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
    • B01J2219/0277—Metal based
    • B01J2219/0286—Steel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Bending Of Plates, Rods, And Pipes (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipeline Systems (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2002134767A 2001-05-11 2002-05-10 折り曲げたパイプを高純度流体処理システム中で用いるためのシステム及び方法 Ceased JP2003065481A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/854132 2001-05-11
US09/854,132 US6513540B2 (en) 2001-05-11 2001-05-11 System and method for using bent pipes in high-purity fluid handling systems

Publications (2)

Publication Number Publication Date
JP2003065481A true JP2003065481A (ja) 2003-03-05
JP2003065481A5 JP2003065481A5 (enExample) 2005-09-15

Family

ID=25317814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002134767A Ceased JP2003065481A (ja) 2001-05-11 2002-05-10 折り曲げたパイプを高純度流体処理システム中で用いるためのシステム及び方法

Country Status (8)

Country Link
US (2) US6513540B2 (enExample)
EP (1) EP1260745B1 (enExample)
JP (1) JP2003065481A (enExample)
KR (1) KR100883404B1 (enExample)
AT (1) ATE400760T1 (enExample)
CA (2) CA2384397A1 (enExample)
DE (1) DE60227450D1 (enExample)
TW (1) TW530139B (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7183551B2 (en) 2003-12-09 2007-02-27 Denso Corporation Infrared-ray absorption film
JP2009141332A (ja) * 2007-12-06 2009-06-25 Semes Co Ltd オゾン水混合液供給装置及び方法、並びにこれを具備する基板処理装置
JP2010020014A (ja) * 2008-07-09 2010-01-28 Jsr Corp 半導体製造用組成物溶液の送液方法、製造方法、配管、及び製造装置
CN102171279A (zh) * 2009-05-29 2011-08-31 Dic株式会社 经表面处理的基材、使用其的太阳能电池用受光面侧保护片、和太阳能电池组件

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6513540B2 (en) * 2001-05-11 2003-02-04 Therma Corporation, Inc. System and method for using bent pipes in high-purity fluid handling systems
CN102284569B (zh) * 2011-06-15 2014-06-04 中国石油天然气股份有限公司 一种热煨弯管工艺方法
US8986785B2 (en) 2011-06-23 2015-03-24 Surface Activation Technologies Method and apparatus for continuous sulfonization of discrete article
TWI519756B (zh) * 2011-11-17 2016-02-01 緯創資通股份有限公司 熱管及熱管製造方法
US10322368B2 (en) 2016-02-23 2019-06-18 The Boeing Company Centrifugal air separator coil manufacturing tools and methods
US9698042B1 (en) 2016-07-22 2017-07-04 Lam Research Corporation Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge
CN112024743B (zh) * 2020-09-08 2022-04-12 山东楚雨源环保科技有限公司 一种用于节能环保设备的管道封头装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2303949A (en) * 1940-01-13 1942-12-01 Carl H Nordell Conduit bend
JPH0698292B2 (ja) * 1986-07-03 1994-12-07 忠弘 大見 超高純度ガスの供給方法及び供給系
US5339868A (en) * 1987-01-07 1994-08-23 Nippon Steel Corporation Bent pipe having sectional form of high strength
LU86802A1 (fr) * 1987-03-09 1987-08-12 Ceodeux Sa Centrale de commande pour gaz sous pression
US5789086A (en) * 1990-03-05 1998-08-04 Ohmi; Tadahiro Stainless steel surface having passivation film
JP3122311B2 (ja) * 1994-06-29 2001-01-09 東京エレクトロン株式会社 成膜処理室への液体材料供給装置及びその使用方法
DE19617006C1 (de) * 1996-04-27 1997-06-19 Masterflex Kunststofftechnik G Rohrbogen
SE508405C2 (sv) * 1996-10-07 1998-10-05 Abb Carbon Ab Transportsystem för partikulärt material samt användning av ett dylikt transportsystem för transport av aska i en kraftanläggning
US5958195A (en) 1997-05-22 1999-09-28 Therma Corporation, Inc. Tube inner surface electropolishing device
JP2000172343A (ja) * 1998-12-02 2000-06-23 Hitachi Ltd ガス供給装置と成膜装置
US6223770B1 (en) * 1999-09-29 2001-05-01 Lsi Logic Corporation Vacuum valve interface
US6513540B2 (en) * 2001-05-11 2003-02-04 Therma Corporation, Inc. System and method for using bent pipes in high-purity fluid handling systems

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7183551B2 (en) 2003-12-09 2007-02-27 Denso Corporation Infrared-ray absorption film
JP2009141332A (ja) * 2007-12-06 2009-06-25 Semes Co Ltd オゾン水混合液供給装置及び方法、並びにこれを具備する基板処理装置
JP2010020014A (ja) * 2008-07-09 2010-01-28 Jsr Corp 半導体製造用組成物溶液の送液方法、製造方法、配管、及び製造装置
CN102171279A (zh) * 2009-05-29 2011-08-31 Dic株式会社 经表面处理的基材、使用其的太阳能电池用受光面侧保护片、和太阳能电池组件

Also Published As

Publication number Publication date
US20020166590A1 (en) 2002-11-14
CA2384397A1 (en) 2002-11-11
KR20020086303A (ko) 2002-11-18
CA2670718A1 (en) 2002-11-11
ATE400760T1 (de) 2008-07-15
US20030089395A1 (en) 2003-05-15
US6691726B2 (en) 2004-02-17
EP1260745B1 (en) 2008-07-09
TW530139B (en) 2003-05-01
EP1260745A2 (en) 2002-11-27
EP1260745A3 (en) 2003-08-13
US6513540B2 (en) 2003-02-04
KR100883404B1 (ko) 2009-02-11
DE60227450D1 (de) 2008-08-21

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