JP2002542056A5 - - Google Patents
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- Publication number
- JP2002542056A5 JP2002542056A5 JP2000613611A JP2000613611A JP2002542056A5 JP 2002542056 A5 JP2002542056 A5 JP 2002542056A5 JP 2000613611 A JP2000613611 A JP 2000613611A JP 2000613611 A JP2000613611 A JP 2000613611A JP 2002542056 A5 JP2002542056 A5 JP 2002542056A5
- Authority
- JP
- Japan
- Prior art keywords
- grinding layer
- oxide
- grinding
- polishing
- glass workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 description 10
- 239000011521 glass Substances 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 229910003460 diamond Inorganic materials 0.000 description 5
- 239000010432 diamond Substances 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- 239000011324 bead Substances 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13081399P | 1999-04-23 | 1999-04-23 | |
| US09/553,295 US6634929B1 (en) | 1999-04-23 | 2000-04-20 | Method for grinding glass |
| US60/130,813 | 2000-04-20 | ||
| US09/553,295 | 2000-04-20 | ||
| PCT/US2000/010915 WO2000064631A1 (en) | 1999-04-23 | 2000-04-21 | Method for grinding glass |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002542056A JP2002542056A (ja) | 2002-12-10 |
| JP2002542056A5 true JP2002542056A5 (enExample) | 2007-06-21 |
Family
ID=26828845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000613611A Pending JP2002542056A (ja) | 1999-04-23 | 2000-04-21 | ガラス研削方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6634929B1 (enExample) |
| EP (1) | EP1173306B1 (enExample) |
| JP (1) | JP2002542056A (enExample) |
| KR (1) | KR100810205B1 (enExample) |
| AU (1) | AU4484200A (enExample) |
| DE (1) | DE60005168T2 (enExample) |
| WO (1) | WO2000064631A1 (enExample) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001074535A1 (en) * | 2000-03-31 | 2001-10-11 | Lam Research Corporation | Fixed abrasive linear polishing belt and system using the same |
| CN101092024A (zh) * | 2000-04-28 | 2007-12-26 | 3M创新有限公司 | 研磨制品以及研磨玻璃的方法 |
| US20040180618A1 (en) * | 2001-09-03 | 2004-09-16 | Kazuo Suzuki | Sheet-form abrasive with dimples or perforations |
| JP2003071731A (ja) * | 2001-09-03 | 2003-03-12 | Three M Innovative Properties Co | ディンプル構造の研磨材料 |
| US6860795B2 (en) | 2001-09-17 | 2005-03-01 | Hitachi Global Storage Technologies Netherlands B.V. | Edge finishing process for glass or ceramic disks used in disk drive data storage devices |
| US20040102140A1 (en) * | 2002-11-21 | 2004-05-27 | Wood Jeffrey H. | Contour following end effectors for lapping/polishing |
| US6866560B1 (en) * | 2003-01-09 | 2005-03-15 | Sandia Corporation | Method for thinning specimen |
| US7118452B2 (en) * | 2004-02-12 | 2006-10-10 | The Boeing Company | Pneumatically actuated flexible coupling end effectors for lapping/polishing |
| US7404756B2 (en) * | 2004-10-29 | 2008-07-29 | 3M Innovative Properties Company | Process for manufacturing optical and semiconductor elements |
| US20060094322A1 (en) * | 2004-10-29 | 2006-05-04 | Ouderkirk Andrew J | Process for manufacturing a light emitting array |
| US7618306B2 (en) | 2005-09-22 | 2009-11-17 | 3M Innovative Properties Company | Conformable abrasive articles and methods of making and using the same |
| US20070066186A1 (en) * | 2005-09-22 | 2007-03-22 | 3M Innovative Properties Company | Flexible abrasive article and methods of making and using the same |
| US7594845B2 (en) * | 2005-10-20 | 2009-09-29 | 3M Innovative Properties Company | Abrasive article and method of modifying the surface of a workpiece |
| DE102005057384A1 (de) * | 2005-11-30 | 2007-05-31 | Nanogate Ag | Silikatumhüllte Teilchen in einer Metallschicht |
| US8323072B1 (en) * | 2007-03-21 | 2012-12-04 | 3M Innovative Properties Company | Method of polishing transparent armor |
| US7935402B2 (en) | 2007-05-03 | 2011-05-03 | Saint-Gobain Performance Plastics Corporation | Ophthalmic blocking pad |
| CN100467223C (zh) * | 2007-09-21 | 2009-03-11 | 浙江工业大学 | 一种球形零件的固着磨料研磨方法 |
| DE102007060973B4 (de) | 2007-12-14 | 2009-11-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur duktilen Schleifbearbeitung sprödharter Werkstoffe |
| JP5267164B2 (ja) * | 2009-01-30 | 2013-08-21 | コニカミノルタビジネステクノロジーズ株式会社 | 電子写真感光体の表面研磨方法 |
| US8801497B2 (en) | 2009-04-30 | 2014-08-12 | Rdc Holdings, Llc | Array of abrasive members with resilient support |
| US9221148B2 (en) | 2009-04-30 | 2015-12-29 | Rdc Holdings, Llc | Method and apparatus for processing sliders for disk drives, and to various processing media for the same |
| JP5792932B2 (ja) * | 2010-04-27 | 2015-10-14 | 旭硝子株式会社 | ガラス基板の研磨方法、及び該ガラス基板の研磨方法を用いたガラス基板の製造方法 |
| JP5840847B2 (ja) * | 2011-03-01 | 2016-01-06 | スリーエム イノベイティブ プロパティズ カンパニー | ガラス基板表面清掃方法及び清掃ベルト |
| US20130082843A1 (en) * | 2011-09-30 | 2013-04-04 | Apple Inc. | Detection of fracture of display panel or other patterned device |
| JP6188286B2 (ja) | 2012-07-13 | 2017-08-30 | スリーエム イノベイティブ プロパティズ カンパニー | 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法 |
| PL2895298T3 (pl) * | 2012-09-05 | 2022-03-07 | Mirka Oy | Elastyczny produkt szlifujący z płaską powierzchnią i sposób jego wytwarzania |
| CA2902273C (en) | 2013-02-26 | 2020-04-14 | Mirka Ltd. | A method to provide an abrasive product surface and abrasive products thereof |
| WO2014131937A1 (en) * | 2013-02-26 | 2014-09-04 | Kwh Mirka Ltd | A method to provide an abrasive product and abrasive products thereof |
| US9649741B2 (en) * | 2014-07-07 | 2017-05-16 | Jh Rhodes Company, Inc. | Polishing material for polishing hard surfaces, media including the material, and methods of forming and using same |
| CN104128896B (zh) * | 2014-07-23 | 2017-02-01 | 上虞市自远磨具有限公司 | 纳米二氧化硅薄膜基抛光片及其制备方法 |
| TWI609742B (zh) * | 2015-04-20 | 2018-01-01 | 中國砂輪企業股份有限公司 | 研磨工具 |
| TWI603813B (zh) * | 2015-04-20 | 2017-11-01 | 中國砂輪企業股份有限公司 | 研磨工具及其製造方法 |
| EP3405543B1 (en) | 2016-01-22 | 2021-12-08 | Lindland, Larry | High molecular weight polyoxyalkylene glycol coolant for grinding glass |
| US10293461B2 (en) | 2016-04-29 | 2019-05-21 | Cnh Industrial America Llc | System and method for manufacturing a face seal with controlled load tolerance |
| CN107571166B (zh) * | 2017-10-20 | 2019-03-08 | 东莞市中微纳米科技有限公司 | 一种砂纸及其制备方法 |
| WO2019164722A1 (en) | 2018-02-20 | 2019-08-29 | Engis Corporation | Fixed abrasive three-dimensional lapping and polishing plate and methods of making and using the same |
| DE102018121625A1 (de) * | 2018-09-05 | 2020-03-05 | Rud. Starcke Gmbh & Co. Kg | Schleifeinrichtung |
| CN110076681B (zh) * | 2018-09-12 | 2021-03-19 | 滁州盛诺电子科技有限公司 | 一种液晶显示屏研磨处理工艺 |
| KR20220027186A (ko) * | 2019-08-01 | 2022-03-07 | 베른도르프 이노베이션즈 운트 테크놀로지 게엠베하 | 엔드리스 벨트 제조 방법 |
| DE102022109242A1 (de) | 2022-04-14 | 2023-10-19 | Cariad Se | Verfahren zur abrasiven Bearbeitung einer Glasscheibe, Steuereinheit, Computerprogramm, computerlesbares Medium und Glasscheibe |
| EP4417367A1 (de) * | 2023-02-15 | 2024-08-21 | VSM Vereinigte Schmirgel- und Maschinen-Fabriken AG | Verfahren zum herstellen eines strukturierten schleifmittels und strukturiertes schleifmittel |
Family Cites Families (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3916584A (en) | 1973-03-22 | 1975-11-04 | Minnesota Mining & Mfg | Spheroidal composite particle and method of making |
| US4311489A (en) | 1978-08-04 | 1982-01-19 | Norton Company | Coated abrasive having brittle agglomerates of abrasive grain |
| JPH0622790B2 (ja) * | 1984-01-26 | 1994-03-30 | 三井金属鉱業株式会社 | 研削機 |
| US4609581A (en) | 1985-04-15 | 1986-09-02 | Minnesota Mining And Manufacturing Company | Coated abrasive sheet material with loop attachment means |
| US4652275A (en) | 1985-08-07 | 1987-03-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
| US4773920B1 (en) | 1985-12-16 | 1995-05-02 | Minnesota Mining & Mfg | Coated abrasive suitable for use as a lapping material. |
| US4751138A (en) | 1986-08-11 | 1988-06-14 | Minnesota Mining And Manufacturing Company | Coated abrasive having radiation curable binder |
| US4799939A (en) | 1987-02-26 | 1989-01-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
| US4735632A (en) | 1987-04-02 | 1988-04-05 | Minnesota Mining And Manufacturing Company | Coated abrasive binder containing ternary photoinitiator system |
| US5254194A (en) | 1988-05-13 | 1993-10-19 | Minnesota Mining And Manufacturing Company | Coated abrasive sheet material with loop material for attachment incorporated therein |
| FR2639278B1 (fr) * | 1988-11-22 | 1991-01-11 | Lam Plan Sa | Plateau de polissage |
| US4903440A (en) | 1988-11-23 | 1990-02-27 | Minnesota Mining And Manufacturing Company | Abrasive product having binder comprising an aminoplast resin |
| JP2846358B2 (ja) | 1989-09-05 | 1999-01-13 | 日本ミクロコーティング株式会社 | 研磨シートおよびその製造方法 |
| US5341609A (en) | 1992-01-28 | 1994-08-30 | Minnesota Mining And Manufacturing Company | Abrasive belts and their manufacture |
| US5152917B1 (en) | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
| US5236472A (en) | 1991-02-22 | 1993-08-17 | Minnesota Mining And Manufacturing Company | Abrasive product having a binder comprising an aminoplast binder |
| GB2256606A (en) | 1991-05-09 | 1992-12-16 | Cranfield Precision Engineerin | High-precision positional control. |
| US5219462A (en) | 1992-01-13 | 1993-06-15 | Minnesota Mining And Manufacturing Company | Abrasive article having abrasive composite members positioned in recesses |
| US5256170A (en) | 1992-01-22 | 1993-10-26 | Minnesota Mining And Manufacturing Company | Coated abrasive article and method of making same |
| WO1994013434A1 (en) | 1992-12-17 | 1994-06-23 | Minnesota Mining And Manufacturing Company | Reduced viscosity slurries, abrasive articles made therefrom, and methods of making said articles |
| US5435816A (en) | 1993-01-14 | 1995-07-25 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
| US5549962A (en) | 1993-06-30 | 1996-08-27 | Minnesota Mining And Manufacturing Company | Precisely shaped particles and method of making the same |
| JP3363587B2 (ja) | 1993-07-13 | 2003-01-08 | キヤノン株式会社 | 脆性材料の加工方法及びその装置 |
| DE69419764T2 (de) | 1993-09-13 | 1999-12-23 | Minnesota Mining And Mfg. Co., St. Paul | Schleifartikel, verfahren zur herstellung desselben, verfahren zur verwendung desselben zum endbearbeiten, und herstellungswerkzeug |
| JPH0727754U (ja) * | 1993-10-22 | 1995-05-23 | 鐘紡株式会社 | 研磨加工用装置 |
| US5453312A (en) | 1993-10-29 | 1995-09-26 | Minnesota Mining And Manufacturing Company | Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface |
| US5580647A (en) | 1993-12-20 | 1996-12-03 | Minnesota Mining And Manufacturing Company | Abrasive articles incorporating addition polymerizable resins and reactive diluents |
| ES2130590T3 (es) | 1994-01-13 | 1999-07-01 | Minnesota Mining & Mfg | Articulo abrasivo, metodo para su fabricacion y aparato de abrasion. |
| US5505747A (en) | 1994-01-13 | 1996-04-09 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
| KR970701118A (ko) | 1994-02-22 | 1997-03-17 | 로저 로이 템트 | 연마 물품, 이의 제조 방법 및 이를 표면 마무리용으로서 사용하는 방법(abrasive article, a method of making same, and a method of using same for finishing) |
| JP2971764B2 (ja) * | 1994-12-26 | 1999-11-08 | 株式会社ノリタケカンパニーリミテド | 砥粒固定型研磨定盤 |
| DE69606168T2 (de) * | 1995-03-02 | 2000-09-28 | Minnesota Mining And Mfg. Co., Saint Paul | Verfahren zur strukturierung eines substates unter verwendung eines strukturierten schleifartikels |
| WO1997006926A1 (en) * | 1995-08-11 | 1997-02-27 | Minnesota Mining And Manufacturing Company | Method of making a coated abrasive article having multiple abrasive natures |
| US5958794A (en) | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
| US5692950A (en) * | 1996-08-08 | 1997-12-02 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
| WO1998010896A1 (en) | 1996-09-11 | 1998-03-19 | Minnesota Mining And Manufacturing Company | Abrasive article and method of making |
| US5876268A (en) * | 1997-01-03 | 1999-03-02 | Minnesota Mining And Manufacturing Company | Method and article for the production of optical quality surfaces on glass |
| KR100494605B1 (ko) | 1997-03-07 | 2005-06-10 | 미네소타 마이닝 앤드 매뉴팩춰링 캄파니 | 유리상에 투명한 표면 마무리 상태를 제공하기 위한 연마용품 |
| US5888119A (en) * | 1997-03-07 | 1999-03-30 | Minnesota Mining And Manufacturing Company | Method for providing a clear surface finish on glass |
-
2000
- 2000-04-20 US US09/553,295 patent/US6634929B1/en not_active Expired - Fee Related
- 2000-04-21 KR KR1020017013463A patent/KR100810205B1/ko not_active Expired - Fee Related
- 2000-04-21 EP EP00926285A patent/EP1173306B1/en not_active Expired - Lifetime
- 2000-04-21 DE DE60005168T patent/DE60005168T2/de not_active Expired - Fee Related
- 2000-04-21 JP JP2000613611A patent/JP2002542056A/ja active Pending
- 2000-04-21 AU AU44842/00A patent/AU4484200A/en not_active Abandoned
- 2000-04-21 WO PCT/US2000/010915 patent/WO2000064631A1/en not_active Ceased
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