JP2002525829A - 薄膜加熱素子 - Google Patents
薄膜加熱素子Info
- Publication number
- JP2002525829A JP2002525829A JP2000571716A JP2000571716A JP2002525829A JP 2002525829 A JP2002525829 A JP 2002525829A JP 2000571716 A JP2000571716 A JP 2000571716A JP 2000571716 A JP2000571716 A JP 2000571716A JP 2002525829 A JP2002525829 A JP 2002525829A
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- solution
- rare earth
- thin
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 57
- 239000010409 thin film Substances 0.000 title claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 33
- 229910052684 Cerium Inorganic materials 0.000 claims abstract description 19
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 19
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims abstract description 19
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052787 antimony Inorganic materials 0.000 claims abstract description 11
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 11
- 239000011701 zinc Substances 0.000 claims abstract description 11
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910001887 tin oxide Inorganic materials 0.000 claims abstract description 10
- YMLFYGFCXGNERH-UHFFFAOYSA-K butyltin trichloride Chemical compound CCCC[Sn](Cl)(Cl)Cl YMLFYGFCXGNERH-UHFFFAOYSA-K 0.000 claims abstract description 7
- 238000005979 thermal decomposition reaction Methods 0.000 claims abstract description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims description 29
- 150000004706 metal oxides Chemical class 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 17
- 125000002524 organometallic group Chemical group 0.000 claims description 14
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 10
- 229910052731 fluorine Inorganic materials 0.000 claims description 10
- 239000011737 fluorine Substances 0.000 claims description 10
- 150000002910 rare earth metals Chemical group 0.000 claims description 8
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical group [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 claims description 6
- 238000000197 pyrolysis Methods 0.000 claims description 5
- 238000005485 electric heating Methods 0.000 claims description 4
- 238000000137 annealing Methods 0.000 claims description 3
- FAPDDOBMIUGHIN-UHFFFAOYSA-K antimony trichloride Chemical group Cl[Sb](Cl)Cl FAPDDOBMIUGHIN-UHFFFAOYSA-K 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 235000005074 zinc chloride Nutrition 0.000 claims description 3
- 239000011592 zinc chloride Substances 0.000 claims description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims 5
- 239000010408 film Substances 0.000 description 44
- 239000002019 doping agent Substances 0.000 description 16
- 230000000694 effects Effects 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000002241 glass-ceramic Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000005118 spray pyrolysis Methods 0.000 description 6
- 239000012528 membrane Substances 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010411 cooking Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 125000005842 heteroatom Chemical group 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000003303 reheating Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 238000010257 thawing Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Resistance Heating (AREA)
- Surface Heating Bodies (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AUPP5995A AUPP599598A0 (en) | 1998-09-18 | 1998-09-18 | Self-regulating nanoscale heating element |
| AU5995 | 1998-09-18 | ||
| PCT/AU1999/000791 WO2000018189A1 (fr) | 1998-09-18 | 1999-09-17 | Element chauffant a film mince |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002525829A true JP2002525829A (ja) | 2002-08-13 |
Family
ID=3810212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000571716A Pending JP2002525829A (ja) | 1998-09-18 | 1999-09-17 | 薄膜加熱素子 |
Country Status (10)
| Country | Link |
|---|---|
| EP (1) | EP1120014A4 (fr) |
| JP (1) | JP2002525829A (fr) |
| KR (1) | KR20010079859A (fr) |
| CN (1) | CN1146301C (fr) |
| AU (1) | AUPP599598A0 (fr) |
| BR (1) | BR9913812A (fr) |
| CA (1) | CA2344486A1 (fr) |
| ID (1) | ID29148A (fr) |
| NZ (1) | NZ510655A (fr) |
| WO (1) | WO2000018189A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9493906B2 (en) | 2003-11-20 | 2016-11-15 | Koninklijke Philips N.V. | Thin-film heating element |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10110792B4 (de) * | 2001-03-06 | 2004-09-23 | Schott Glas | Keramisches Kochsystem mit Glaskeramikplatte,Isolationsschicht und Heizelementen |
| DE10110789C1 (de) * | 2001-03-06 | 2002-07-04 | Schott Glas | Kochgerät mit einer nicht planaren, mehrdimensional geformten Kochfläche aus Glas- oder Glaskeramik |
| CN100466865C (zh) * | 2005-03-21 | 2009-03-04 | 冷同桂 | 一种复合金属电热膜溶胶及其制备方法 |
| US7926209B2 (en) | 2007-02-13 | 2011-04-19 | Advanced Materials Enterprises Company Limited | Electric iron |
| US8193475B2 (en) | 2007-02-13 | 2012-06-05 | Advanced Materials Enterprises Company Limited | Heating apparatus and method for making the same |
| WO2009105945A1 (fr) * | 2008-02-28 | 2009-09-03 | Advanced Materials Enterprises Co., Ltd. | Fer à repasser électrique |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU886328A1 (ru) * | 1980-03-28 | 1981-11-30 | Институт Электроники Ан Белсср | Токопровод щий материал дл пленочных электронагревателей |
| DE3324647A1 (de) * | 1983-07-08 | 1985-01-17 | Schott Glaswerke, 6500 Mainz | Tauchverfahren zur herstellung transparenter, elektrisch leitfaehiger, dotierter indiumoxidschichten |
| DE3705639A1 (de) * | 1987-02-21 | 1988-09-01 | Philips Patentverwaltung | Duennschicht-heizelement |
| JPH07105282B2 (ja) * | 1988-05-13 | 1995-11-13 | 富士ゼロックス株式会社 | 抵抗体及び抵抗体の製造方法 |
| CN1036432C (zh) * | 1992-07-09 | 1997-11-12 | 连铁军 | 一种耐高温透明电热膜及其生产方法 |
| US5616266A (en) * | 1994-07-29 | 1997-04-01 | Thermal Dynamics U.S.A. Ltd. Co. | Resistance heating element with large area, thin film and method |
-
1998
- 1998-09-18 AU AUPP5995A patent/AUPP599598A0/en not_active Abandoned
-
1999
- 1999-09-17 WO PCT/AU1999/000791 patent/WO2000018189A1/fr not_active Application Discontinuation
- 1999-09-17 KR KR1020017003505A patent/KR20010079859A/ko not_active Application Discontinuation
- 1999-09-17 CN CNB998107727A patent/CN1146301C/zh not_active Expired - Fee Related
- 1999-09-17 CA CA002344486A patent/CA2344486A1/fr not_active Abandoned
- 1999-09-17 BR BR9913812-3A patent/BR9913812A/pt not_active IP Right Cessation
- 1999-09-17 NZ NZ510655A patent/NZ510655A/en unknown
- 1999-09-17 ID IDW20010871A patent/ID29148A/id unknown
- 1999-09-17 JP JP2000571716A patent/JP2002525829A/ja active Pending
- 1999-09-17 EP EP99947118A patent/EP1120014A4/fr not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9493906B2 (en) | 2003-11-20 | 2016-11-15 | Koninklijke Philips N.V. | Thin-film heating element |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1146301C (zh) | 2004-04-14 |
| WO2000018189A1 (fr) | 2000-03-30 |
| EP1120014A1 (fr) | 2001-08-01 |
| KR20010079859A (ko) | 2001-08-22 |
| BR9913812A (pt) | 2001-08-14 |
| EP1120014A4 (fr) | 2004-06-16 |
| CA2344486A1 (fr) | 2000-03-30 |
| CN1317223A (zh) | 2001-10-10 |
| ID29148A (id) | 2001-08-02 |
| AUPP599598A0 (en) | 1998-10-08 |
| NZ510655A (en) | 2003-05-30 |
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