JP2002339970A - 磁気軸受装置及びターボ分子ポンプ - Google Patents
磁気軸受装置及びターボ分子ポンプInfo
- Publication number
- JP2002339970A JP2002339970A JP2001144958A JP2001144958A JP2002339970A JP 2002339970 A JP2002339970 A JP 2002339970A JP 2001144958 A JP2001144958 A JP 2001144958A JP 2001144958 A JP2001144958 A JP 2001144958A JP 2002339970 A JP2002339970 A JP 2002339970A
- Authority
- JP
- Japan
- Prior art keywords
- rotor shaft
- magnetic bearing
- rotor
- bearing device
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 12
- 239000007787 solid Substances 0.000 claims description 11
- 230000001050 lubricating effect Effects 0.000 claims description 9
- 238000010791 quenching Methods 0.000 description 20
- 230000000171 quenching effect Effects 0.000 description 20
- 238000006073 displacement reaction Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 125000006850 spacer group Chemical group 0.000 description 8
- 239000000314 lubricant Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 229910001105 martensitic stainless steel Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052580 B4C Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001144958A JP2002339970A (ja) | 2001-05-15 | 2001-05-15 | 磁気軸受装置及びターボ分子ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001144958A JP2002339970A (ja) | 2001-05-15 | 2001-05-15 | 磁気軸受装置及びターボ分子ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002339970A true JP2002339970A (ja) | 2002-11-27 |
| JP2002339970A5 JP2002339970A5 (enExample) | 2004-12-09 |
Family
ID=18990835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001144958A Pending JP2002339970A (ja) | 2001-05-15 | 2001-05-15 | 磁気軸受装置及びターボ分子ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002339970A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011012690A (ja) * | 2009-06-30 | 2011-01-20 | Yaskawa Electric Corp | 磁気軸受装置、およびそれを備える真空ポンプ |
| CN102425557A (zh) * | 2011-12-08 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | 一种获取磁悬浮分子泵转子悬浮中心的控制方法 |
| JP2016526131A (ja) * | 2013-05-30 | 2016-09-01 | ヌオーヴォ ピニォーネ ソチエタ レスポンサビリタ リミタータＮｕｏｖｏ Ｐｉｇｎｏｎｅ Ｓ．Ｒ．Ｌ． | 少なくとも１つの能動型磁気軸受および補助転がり軸受を有する回転機械 |
| KR101795857B1 (ko) * | 2015-08-25 | 2017-11-09 | 주식회사 포스코 | 마그네틱 베어링 장치 및 이를 포함하는 용융아연도금장치 |
| CN110886774A (zh) * | 2019-11-13 | 2020-03-17 | 珠海格力电器股份有限公司 | 一种新型磁悬浮径向轴承转子结构、径向轴承、电机 |
-
2001
- 2001-05-15 JP JP2001144958A patent/JP2002339970A/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011012690A (ja) * | 2009-06-30 | 2011-01-20 | Yaskawa Electric Corp | 磁気軸受装置、およびそれを備える真空ポンプ |
| CN102425557A (zh) * | 2011-12-08 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | 一种获取磁悬浮分子泵转子悬浮中心的控制方法 |
| CN102425557B (zh) * | 2011-12-08 | 2014-09-03 | 北京中科科仪股份有限公司 | 一种获取磁悬浮分子泵转子悬浮中心的控制方法 |
| JP2016526131A (ja) * | 2013-05-30 | 2016-09-01 | ヌオーヴォ ピニォーネ ソチエタ レスポンサビリタ リミタータＮｕｏｖｏ Ｐｉｇｎｏｎｅ Ｓ．Ｒ．Ｌ． | 少なくとも１つの能動型磁気軸受および補助転がり軸受を有する回転機械 |
| KR101795857B1 (ko) * | 2015-08-25 | 2017-11-09 | 주식회사 포스코 | 마그네틱 베어링 장치 및 이를 포함하는 용융아연도금장치 |
| CN107923438A (zh) * | 2015-08-25 | 2018-04-17 | Posco公司 | 磁轴承装置及包括该装置的热浸镀锌装置 |
| CN107923438B (zh) * | 2015-08-25 | 2020-03-20 | Posco公司 | 磁轴承装置及包括该装置的热浸镀锌装置 |
| CN110886774A (zh) * | 2019-11-13 | 2020-03-17 | 珠海格力电器股份有限公司 | 一种新型磁悬浮径向轴承转子结构、径向轴承、电机 |
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