JP2002110610A - 基板の処理装置 - Google Patents

基板の処理装置

Info

Publication number
JP2002110610A
JP2002110610A JP2000292857A JP2000292857A JP2002110610A JP 2002110610 A JP2002110610 A JP 2002110610A JP 2000292857 A JP2000292857 A JP 2000292857A JP 2000292857 A JP2000292857 A JP 2000292857A JP 2002110610 A JP2002110610 A JP 2002110610A
Authority
JP
Japan
Prior art keywords
substrate
semiconductor wafer
tool
cleaning
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000292857A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002110610A5 (https=
Inventor
Tadao Hirakawa
忠夫 平川
Masaaki Furuya
正明 古矢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Shibaura Mechatronics Corp
Original Assignee
Toshiba Corp
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Shibaura Mechatronics Corp filed Critical Toshiba Corp
Priority to JP2000292857A priority Critical patent/JP2002110610A/ja
Publication of JP2002110610A publication Critical patent/JP2002110610A/ja
Publication of JP2002110610A5 publication Critical patent/JP2002110610A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2000292857A 2000-09-26 2000-09-26 基板の処理装置 Pending JP2002110610A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000292857A JP2002110610A (ja) 2000-09-26 2000-09-26 基板の処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000292857A JP2002110610A (ja) 2000-09-26 2000-09-26 基板の処理装置

Publications (2)

Publication Number Publication Date
JP2002110610A true JP2002110610A (ja) 2002-04-12
JP2002110610A5 JP2002110610A5 (https=) 2007-11-08

Family

ID=18775736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000292857A Pending JP2002110610A (ja) 2000-09-26 2000-09-26 基板の処理装置

Country Status (1)

Country Link
JP (1) JP2002110610A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101473898B1 (ko) 2013-07-23 2014-12-17 한국기계연구원 초음파 세정장치용 발진기

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101473898B1 (ko) 2013-07-23 2014-12-17 한국기계연구원 초음파 세정장치용 발진기

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