JP2001349817A - 表面測定器一体型走査型プローブ顕微鏡 - Google Patents

表面測定器一体型走査型プローブ顕微鏡

Info

Publication number
JP2001349817A
JP2001349817A JP2000175629A JP2000175629A JP2001349817A JP 2001349817 A JP2001349817 A JP 2001349817A JP 2000175629 A JP2000175629 A JP 2000175629A JP 2000175629 A JP2000175629 A JP 2000175629A JP 2001349817 A JP2001349817 A JP 2001349817A
Authority
JP
Japan
Prior art keywords
probe microscope
microscope
scanning probe
optical microscope
measuring instrument
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000175629A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001349817A5 (https=
Inventor
Shuichi Ito
修一 伊東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP2000175629A priority Critical patent/JP2001349817A/ja
Publication of JP2001349817A publication Critical patent/JP2001349817A/ja
Publication of JP2001349817A5 publication Critical patent/JP2001349817A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/18—Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Microscoopes, Condenser (AREA)
JP2000175629A 2000-06-12 2000-06-12 表面測定器一体型走査型プローブ顕微鏡 Pending JP2001349817A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000175629A JP2001349817A (ja) 2000-06-12 2000-06-12 表面測定器一体型走査型プローブ顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000175629A JP2001349817A (ja) 2000-06-12 2000-06-12 表面測定器一体型走査型プローブ顕微鏡

Publications (2)

Publication Number Publication Date
JP2001349817A true JP2001349817A (ja) 2001-12-21
JP2001349817A5 JP2001349817A5 (https=) 2007-06-14

Family

ID=18677481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000175629A Pending JP2001349817A (ja) 2000-06-12 2000-06-12 表面測定器一体型走査型プローブ顕微鏡

Country Status (1)

Country Link
JP (1) JP2001349817A (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006023443A (ja) * 2004-07-07 2006-01-26 Keyence Corp 顕微鏡装置
JP2006349617A (ja) * 2005-06-20 2006-12-28 Sii Nanotechnology Inc 光学顕微鏡を備えた走査型プローブ顕微鏡
CN102621064A (zh) * 2012-03-16 2012-08-01 无锡正慈机电科技有限公司 一种减振平台及基于该减振平台的光学检测系统
CN102854617A (zh) * 2012-09-17 2013-01-02 攀钢集团攀枝花钢铁研究院有限公司 用于调整显微镜水平度的防震工作台及其安装方法
WO2024254756A1 (zh) * 2023-06-13 2024-12-19 深圳华大生命科学研究院 生物芯片的扫描成像系统

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006023443A (ja) * 2004-07-07 2006-01-26 Keyence Corp 顕微鏡装置
JP2006349617A (ja) * 2005-06-20 2006-12-28 Sii Nanotechnology Inc 光学顕微鏡を備えた走査型プローブ顕微鏡
CN102621064A (zh) * 2012-03-16 2012-08-01 无锡正慈机电科技有限公司 一种减振平台及基于该减振平台的光学检测系统
CN102854617A (zh) * 2012-09-17 2013-01-02 攀钢集团攀枝花钢铁研究院有限公司 用于调整显微镜水平度的防震工作台及其安装方法
WO2024254756A1 (zh) * 2023-06-13 2024-12-19 深圳华大生命科学研究院 生物芯片的扫描成像系统

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