JP2001289808A - 薄膜ガスセンサ - Google Patents

薄膜ガスセンサ

Info

Publication number
JP2001289808A
JP2001289808A JP2000109027A JP2000109027A JP2001289808A JP 2001289808 A JP2001289808 A JP 2001289808A JP 2000109027 A JP2000109027 A JP 2000109027A JP 2000109027 A JP2000109027 A JP 2000109027A JP 2001289808 A JP2001289808 A JP 2001289808A
Authority
JP
Japan
Prior art keywords
filter layer
gas sensor
gas
film
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000109027A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001289808A5 (https=
Inventor
Takuya Suzuki
卓弥 鈴木
Katsumi Onodera
克己 小野寺
Kenji Kunihara
健二 国原
Kenji Kondo
健治 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP2000109027A priority Critical patent/JP2001289808A/ja
Publication of JP2001289808A publication Critical patent/JP2001289808A/ja
Publication of JP2001289808A5 publication Critical patent/JP2001289808A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP2000109027A 2000-04-11 2000-04-11 薄膜ガスセンサ Pending JP2001289808A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000109027A JP2001289808A (ja) 2000-04-11 2000-04-11 薄膜ガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000109027A JP2001289808A (ja) 2000-04-11 2000-04-11 薄膜ガスセンサ

Publications (2)

Publication Number Publication Date
JP2001289808A true JP2001289808A (ja) 2001-10-19
JP2001289808A5 JP2001289808A5 (https=) 2006-02-02

Family

ID=18621779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000109027A Pending JP2001289808A (ja) 2000-04-11 2000-04-11 薄膜ガスセンサ

Country Status (1)

Country Link
JP (1) JP2001289808A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006012459A (ja) * 2004-06-22 2006-01-12 Matsushita Electric Works Ltd 赤外線放射素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006012459A (ja) * 2004-06-22 2006-01-12 Matsushita Electric Works Ltd 赤外線放射素子

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