JP2001259359A - 排ガス処理装置 - Google Patents
排ガス処理装置Info
- Publication number
- JP2001259359A JP2001259359A JP2000073387A JP2000073387A JP2001259359A JP 2001259359 A JP2001259359 A JP 2001259359A JP 2000073387 A JP2000073387 A JP 2000073387A JP 2000073387 A JP2000073387 A JP 2000073387A JP 2001259359 A JP2001259359 A JP 2001259359A
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- intake pipe
- solid
- pipe
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 claims abstract description 56
- 239000007788 liquid Substances 0.000 claims abstract description 37
- 239000000126 substance Substances 0.000 claims abstract description 11
- 238000007790 scraping Methods 0.000 claims description 13
- 230000002745 absorbent Effects 0.000 claims description 8
- 239000002250 absorbent Substances 0.000 claims description 8
- 229910004298 SiO 2 Inorganic materials 0.000 abstract description 6
- 230000002093 peripheral effect Effects 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 61
- 238000004519 manufacturing process Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- -1 polyethylene Polymers 0.000 description 7
- 239000000243 solution Substances 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 239000011343 solid material Substances 0.000 description 4
- 229910000990 Ni alloy Inorganic materials 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 229920001155 polypropylene Polymers 0.000 description 3
- 229920000915 polyvinyl chloride Polymers 0.000 description 3
- 239000004800 polyvinyl chloride Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Accessories For Mixers (AREA)
- Drying Of Semiconductors (AREA)
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000073387A JP2001259359A (ja) | 2000-03-16 | 2000-03-16 | 排ガス処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000073387A JP2001259359A (ja) | 2000-03-16 | 2000-03-16 | 排ガス処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001259359A true JP2001259359A (ja) | 2001-09-25 |
| JP2001259359A5 JP2001259359A5 (enExample) | 2007-03-15 |
Family
ID=18591639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000073387A Pending JP2001259359A (ja) | 2000-03-16 | 2000-03-16 | 排ガス処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001259359A (enExample) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100429133B1 (ko) * | 2001-11-28 | 2004-04-29 | 동부전자 주식회사 | 슬러리저장탱크의 임펠러 |
| JP2004330123A (ja) * | 2003-05-09 | 2004-11-25 | Sumitomo Seika Chem Co Ltd | 排ガス処理装置およびこれを用いた排ガス処理方法 |
| JP2012166185A (ja) * | 2011-02-09 | 2012-09-06 | China Steel Corp | 気液混合ノズル装置 |
| CN110871028A (zh) * | 2018-10-15 | 2020-03-10 | 齐秀琴 | 气体净化器 |
| CN113102431A (zh) * | 2021-04-29 | 2021-07-13 | 洛阳市中心医院（郑州大学附属洛阳中心医院） | 麻醉科室用麻醉废气抽除装置 |
| CN114307557A (zh) * | 2022-02-14 | 2022-04-12 | 青岛海湾化学有限公司 | 一种底座及盐酸尾气吸收装置 |
| CN116850706A (zh) * | 2023-08-01 | 2023-10-10 | 洛阳薪旺炭素材料有限公司 | 用于碳素脱模成型的废气处理装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5443173A (en) * | 1977-09-13 | 1979-04-05 | Chiyoda Chem Eng & Constr Co Ltd | Removing method for slid adhered to inner supface of gas-introducting pipe |
| JPH07148414A (ja) * | 1993-11-29 | 1995-06-13 | Toshiaki Maruyama | 有害ガスの無害化方法および装置 |
-
2000
- 2000-03-16 JP JP2000073387A patent/JP2001259359A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5443173A (en) * | 1977-09-13 | 1979-04-05 | Chiyoda Chem Eng & Constr Co Ltd | Removing method for slid adhered to inner supface of gas-introducting pipe |
| JPH07148414A (ja) * | 1993-11-29 | 1995-06-13 | Toshiaki Maruyama | 有害ガスの無害化方法および装置 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100429133B1 (ko) * | 2001-11-28 | 2004-04-29 | 동부전자 주식회사 | 슬러리저장탱크의 임펠러 |
| JP2004330123A (ja) * | 2003-05-09 | 2004-11-25 | Sumitomo Seika Chem Co Ltd | 排ガス処理装置およびこれを用いた排ガス処理方法 |
| JP2012166185A (ja) * | 2011-02-09 | 2012-09-06 | China Steel Corp | 気液混合ノズル装置 |
| CN110871028A (zh) * | 2018-10-15 | 2020-03-10 | 齐秀琴 | 气体净化器 |
| CN113102431A (zh) * | 2021-04-29 | 2021-07-13 | 洛阳市中心医院（郑州大学附属洛阳中心医院） | 麻醉科室用麻醉废气抽除装置 |
| CN114307557A (zh) * | 2022-02-14 | 2022-04-12 | 青岛海湾化学有限公司 | 一种底座及盐酸尾气吸收装置 |
| CN116850706A (zh) * | 2023-08-01 | 2023-10-10 | 洛阳薪旺炭素材料有限公司 | 用于碳素脱模成型的废气处理装置 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070122 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070122 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20091207 |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20091215 |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20100413 |