JP2001196477A5 - - Google Patents

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Publication number
JP2001196477A5
JP2001196477A5 JP2000006706A JP2000006706A JP2001196477A5 JP 2001196477 A5 JP2001196477 A5 JP 2001196477A5 JP 2000006706 A JP2000006706 A JP 2000006706A JP 2000006706 A JP2000006706 A JP 2000006706A JP 2001196477 A5 JP2001196477 A5 JP 2001196477A5
Authority
JP
Japan
Prior art keywords
contact plug
bit line
wiring
memory device
semiconductor memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000006706A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001196477A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000006706A priority Critical patent/JP2001196477A/ja
Priority claimed from JP2000006706A external-priority patent/JP2001196477A/ja
Priority to US09/726,582 priority patent/US6611010B2/en
Publication of JP2001196477A publication Critical patent/JP2001196477A/ja
Publication of JP2001196477A5 publication Critical patent/JP2001196477A5/ja
Pending legal-status Critical Current

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JP2000006706A 1999-12-03 2000-01-14 半導体装置 Pending JP2001196477A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000006706A JP2001196477A (ja) 2000-01-14 2000-01-14 半導体装置
US09/726,582 US6611010B2 (en) 1999-12-03 2000-12-01 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000006706A JP2001196477A (ja) 2000-01-14 2000-01-14 半導体装置

Publications (2)

Publication Number Publication Date
JP2001196477A JP2001196477A (ja) 2001-07-19
JP2001196477A5 true JP2001196477A5 (enrdf_load_stackoverflow) 2005-07-07

Family

ID=18535194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000006706A Pending JP2001196477A (ja) 1999-12-03 2000-01-14 半導体装置

Country Status (1)

Country Link
JP (1) JP2001196477A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005038884A (ja) 2003-07-15 2005-02-10 Toshiba Corp 不揮発性半導体記憶装置及びその製造方法
US7507661B2 (en) * 2004-08-11 2009-03-24 Spansion Llc Method of forming narrowly spaced flash memory contact openings and lithography masks
KR100546936B1 (ko) * 2004-10-21 2006-01-26 주식회사 하이닉스반도체 반도체 메모리 소자의 금속배선 형성방법
JP2009010011A (ja) 2007-06-26 2009-01-15 Toshiba Corp 半導体装置およびその製造方法
US9123784B2 (en) * 2012-08-21 2015-09-01 Nanya Technology Corporation Memory process and memory structure made thereby

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