JP2001176028A - 薄膜磁気ヘッド及びその製造方法 - Google Patents

薄膜磁気ヘッド及びその製造方法

Info

Publication number
JP2001176028A
JP2001176028A JP35429999A JP35429999A JP2001176028A JP 2001176028 A JP2001176028 A JP 2001176028A JP 35429999 A JP35429999 A JP 35429999A JP 35429999 A JP35429999 A JP 35429999A JP 2001176028 A JP2001176028 A JP 2001176028A
Authority
JP
Japan
Prior art keywords
film
magnetic
layer
magnetic layer
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP35429999A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001176028A5 (enExample
Inventor
Masaya Sakaguchi
昌也 坂口
Toshio Fukazawa
利雄 深澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP35429999A priority Critical patent/JP2001176028A/ja
Priority to US09/737,091 priority patent/US6633466B2/en
Publication of JP2001176028A publication Critical patent/JP2001176028A/ja
Priority to US10/640,068 priority patent/US7137192B2/en
Publication of JP2001176028A5 publication Critical patent/JP2001176028A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3912—Arrangements in which the active read-out elements are transducing in association with active magnetic shields, e.g. magnetically coupled shields
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
    • G11B5/3932—Magnetic biasing films
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/40—Protective measures on heads, e.g. against excessive temperature 
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49044—Plural magnetic deposition layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49067—Specified diverse magnetic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/11—Magnetic recording head
    • Y10T428/1107—Magnetoresistive
    • Y10T428/1143—Magnetoresistive with defined structural feature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/11—Magnetic recording head
    • Y10T428/1164—Magnetic recording head with protective film

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Magnetic Heads (AREA)
  • Hall/Mr Elements (AREA)
JP35429999A 1999-12-14 1999-12-14 薄膜磁気ヘッド及びその製造方法 Pending JP2001176028A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP35429999A JP2001176028A (ja) 1999-12-14 1999-12-14 薄膜磁気ヘッド及びその製造方法
US09/737,091 US6633466B2 (en) 1999-12-14 2000-12-14 MR thin film head with longitudinal-biasing multi-layers of antiferromagnetically-coupled high and low coercivity layers
US10/640,068 US7137192B2 (en) 1999-12-14 2003-08-13 Method for manufacturing thin film head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35429999A JP2001176028A (ja) 1999-12-14 1999-12-14 薄膜磁気ヘッド及びその製造方法

Publications (2)

Publication Number Publication Date
JP2001176028A true JP2001176028A (ja) 2001-06-29
JP2001176028A5 JP2001176028A5 (enExample) 2004-07-29

Family

ID=18436610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35429999A Pending JP2001176028A (ja) 1999-12-14 1999-12-14 薄膜磁気ヘッド及びその製造方法

Country Status (2)

Country Link
US (2) US6633466B2 (enExample)
JP (1) JP2001176028A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6822836B2 (en) * 2002-01-15 2004-11-23 International Business Machines Corporation Anti-parallel coupled free layer for a GMR sensor for a magnetic head
US7301734B2 (en) * 2003-03-21 2007-11-27 Headway Technologies, Inc. Longitudinal bias structure with improved magnetic stability
US20120161263A1 (en) * 2010-12-28 2012-06-28 Stefan Maat Current perpendicular to plane (CPP) magnetoresistive sensor having dual composition hard bias layer

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19925588A1 (de) * 1999-06-04 2000-12-07 Deutsch Zentr Luft & Raumfahrt Faden zur Verbindung von Fasern eines Faserhalbzeuges sowie Faserhalbzeug, und Verfahren zur Herstellung von Faserverbundwerkstoffen
JP3807592B2 (ja) * 1999-06-24 2006-08-09 松下電器産業株式会社 記録再生ヘッドおよびそれを備えた記録再生装置
JP3550533B2 (ja) * 2000-07-06 2004-08-04 株式会社日立製作所 磁界センサー、磁気ヘッド、磁気記録再生装置及び磁気記憶素子
DE10128135A1 (de) * 2001-06-09 2002-12-19 Bosch Gmbh Robert Magnetoresistive Schichtanordnung und Gradiometer mit einer derartigen Schichtanordnung
JP2002367124A (ja) * 2001-06-13 2002-12-20 Hitachi Ltd スピンバルブ型磁気ヘッド
US6914760B2 (en) * 2001-09-07 2005-07-05 International Business Machines Corporation Hard bias layer for read heads
US7035060B2 (en) * 2002-03-06 2006-04-25 Headway Technologies, Inc. Easily manufactured exchange bias stabilization scheme
US6760966B2 (en) * 2002-04-30 2004-07-13 Headway Technologies, Inc. Process of manufacturing a side reading reduced GMR for high track density
JP2004031882A (ja) * 2002-05-07 2004-01-29 Alps Electric Co Ltd 磁気検出素子及びその製造方法
WO2004017085A1 (de) * 2002-07-26 2004-02-26 Robert Bosch Gmbh Magnetoresistives schichtsystem und sensorelement mit diesem schichtsystem
JP2004079798A (ja) * 2002-08-19 2004-03-11 Alps Electric Co Ltd 巨大磁気抵抗効果素子及びその製造方法
US6778364B2 (en) * 2002-08-28 2004-08-17 International Business Machines Corporation Current-in-plane magnetoresistive sensor with longitudinal biasing layer having a nonmagnetic oxide central region and method for fabrication of the sensor
US6870716B2 (en) * 2002-09-24 2005-03-22 Hitachi Global Storage Technologies Netherland B.V. Free layer and design for higher areal density
JP2004119755A (ja) * 2002-09-27 2004-04-15 Alps Electric Co Ltd 磁気検出素子及びその製造方法
US6876527B2 (en) * 2002-11-08 2005-04-05 Hitachi Global Storage Technologies Netherlands B.V. Magnetoresistive sensor with antiparallel coupled lead/sensor overlap region
US6842316B2 (en) 2002-11-26 2005-01-11 Hitachi Global Storage Technologies Netherlands B.V. Magnetic spin valve sensor having an exchange stabilization layer recessed from the active track edge
US7333307B2 (en) * 2003-07-03 2008-02-19 Headway Technologies, Inc. Double layer longitudinal bias structure
US7268985B2 (en) * 2004-05-28 2007-09-11 Hitachi Global Storage Technologies Netherlands, B.V. Magnetic head having a layered hard bias layer exhibiting reduced noise
US7382586B2 (en) * 2005-03-31 2008-06-03 Hitachi Global Storage Technologies Netherlands B.V. Magnetic read sensor employing oblique etched underlayers for inducing uniaxial magnetic anisotropy in a self biased free layer
US7768748B2 (en) 2006-12-14 2010-08-03 Hitachi Global Storage Technologies Netherlands B.V. Magnetoresistive sensor with overlaid combined leads and shields
US8045366B2 (en) 2008-11-05 2011-10-25 Seagate Technology Llc STRAM with composite free magnetic element
CN104011811B (zh) * 2012-01-04 2016-11-02 丰田自动车株式会社 稀土类纳米复合磁铁
US20140264346A1 (en) * 2013-03-15 2014-09-18 Seagate Technology Llc Integrated photodiode

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5465185A (en) * 1993-10-15 1995-11-07 International Business Machines Corporation Magnetoresistive spin valve sensor with improved pinned ferromagnetic layer and magnetic recording system using the sensor
US5508866A (en) * 1994-08-15 1996-04-16 International Business Machines Corporation Magnetoresistive sensor having exchange-coupled stabilization for transverse bias layer
US5896252A (en) * 1995-08-11 1999-04-20 Fujitsu Limited Multilayer spin valve magneto-resistive effect magnetic head with free magnetic layer including two sublayers and magnetic disk drive including same
US6266218B1 (en) * 1999-10-28 2001-07-24 International Business Machines Corporation Magnetic sensors having antiferromagnetically exchange-coupled layers for longitudinal biasing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6822836B2 (en) * 2002-01-15 2004-11-23 International Business Machines Corporation Anti-parallel coupled free layer for a GMR sensor for a magnetic head
US7301734B2 (en) * 2003-03-21 2007-11-27 Headway Technologies, Inc. Longitudinal bias structure with improved magnetic stability
US20120161263A1 (en) * 2010-12-28 2012-06-28 Stefan Maat Current perpendicular to plane (CPP) magnetoresistive sensor having dual composition hard bias layer

Also Published As

Publication number Publication date
US20010028540A1 (en) 2001-10-11
US6633466B2 (en) 2003-10-14
US7137192B2 (en) 2006-11-21
US20040048105A1 (en) 2004-03-11

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