JP2001092138A5 - - Google Patents

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Publication number
JP2001092138A5
JP2001092138A5 JP1999277377A JP27737799A JP2001092138A5 JP 2001092138 A5 JP2001092138 A5 JP 2001092138A5 JP 1999277377 A JP1999277377 A JP 1999277377A JP 27737799 A JP27737799 A JP 27737799A JP 2001092138 A5 JP2001092138 A5 JP 2001092138A5
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JP
Japan
Prior art keywords
formula
chemical
group
integer
resin composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP1999277377A
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English (en)
Japanese (ja)
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JP2001092138A (ja
JP4437345B2 (ja
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Priority to JP27737799A priority Critical patent/JP4437345B2/ja
Priority claimed from JP27737799A external-priority patent/JP4437345B2/ja
Publication of JP2001092138A publication Critical patent/JP2001092138A/ja
Publication of JP2001092138A5 publication Critical patent/JP2001092138A5/ja
Application granted granted Critical
Publication of JP4437345B2 publication Critical patent/JP4437345B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP27737799A 1999-07-22 1999-09-29 ポジ型感光性樹脂組成物 Expired - Lifetime JP4437345B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27737799A JP4437345B2 (ja) 1999-07-22 1999-09-29 ポジ型感光性樹脂組成物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-208112 1999-07-22
JP20811299 1999-07-22
JP27737799A JP4437345B2 (ja) 1999-07-22 1999-09-29 ポジ型感光性樹脂組成物

Publications (3)

Publication Number Publication Date
JP2001092138A JP2001092138A (ja) 2001-04-06
JP2001092138A5 true JP2001092138A5 (enExample) 2005-12-02
JP4437345B2 JP4437345B2 (ja) 2010-03-24

Family

ID=26516650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27737799A Expired - Lifetime JP4437345B2 (ja) 1999-07-22 1999-09-29 ポジ型感光性樹脂組成物

Country Status (1)

Country Link
JP (1) JP4437345B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4558976B2 (ja) * 2001-05-14 2010-10-06 旭化成イーマテリアルズ株式会社 ポジ型感光性樹脂組成物
JP4560247B2 (ja) * 2001-08-01 2010-10-13 旭化成イーマテリアルズ株式会社 ポジ型感光性樹脂組成物
CN100480855C (zh) 2002-05-29 2009-04-22 东丽株式会社 感光性树脂组合物和耐热性树脂膜的制造方法
JP2009108074A (ja) * 2002-07-31 2009-05-21 Sumitomo Bakelite Co Ltd ナフトキノンジアジドスルホン酸エステル、それを用いたポジ型感光性樹脂組成物及び半導体装置
WO2007029614A1 (ja) * 2005-09-05 2007-03-15 Asahi Kasei Emd Corporation ポジ型感光性樹脂組成物

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