JP2001092138A5 - - Google Patents
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- Publication number
- JP2001092138A5 JP2001092138A5 JP1999277377A JP27737799A JP2001092138A5 JP 2001092138 A5 JP2001092138 A5 JP 2001092138A5 JP 1999277377 A JP1999277377 A JP 1999277377A JP 27737799 A JP27737799 A JP 27737799A JP 2001092138 A5 JP2001092138 A5 JP 2001092138A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- chemical
- group
- integer
- resin composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000126 substance Substances 0.000 description 5
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 125000000962 organic group Chemical group 0.000 description 3
- 239000011342 resin composition Substances 0.000 description 3
- 239000004952 Polyamide Substances 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27737799A JP4437345B2 (ja) | 1999-07-22 | 1999-09-29 | ポジ型感光性樹脂組成物 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11-208112 | 1999-07-22 | ||
| JP20811299 | 1999-07-22 | ||
| JP27737799A JP4437345B2 (ja) | 1999-07-22 | 1999-09-29 | ポジ型感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001092138A JP2001092138A (ja) | 2001-04-06 |
| JP2001092138A5 true JP2001092138A5 (enExample) | 2005-12-02 |
| JP4437345B2 JP4437345B2 (ja) | 2010-03-24 |
Family
ID=26516650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27737799A Expired - Lifetime JP4437345B2 (ja) | 1999-07-22 | 1999-09-29 | ポジ型感光性樹脂組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4437345B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4558976B2 (ja) * | 2001-05-14 | 2010-10-06 | 旭化成イーマテリアルズ株式会社 | ポジ型感光性樹脂組成物 |
| JP4560247B2 (ja) * | 2001-08-01 | 2010-10-13 | 旭化成イーマテリアルズ株式会社 | ポジ型感光性樹脂組成物 |
| CN100480855C (zh) | 2002-05-29 | 2009-04-22 | 东丽株式会社 | 感光性树脂组合物和耐热性树脂膜的制造方法 |
| JP2009108074A (ja) * | 2002-07-31 | 2009-05-21 | Sumitomo Bakelite Co Ltd | ナフトキノンジアジドスルホン酸エステル、それを用いたポジ型感光性樹脂組成物及び半導体装置 |
| WO2007029614A1 (ja) * | 2005-09-05 | 2007-03-15 | Asahi Kasei Emd Corporation | ポジ型感光性樹脂組成物 |
-
1999
- 1999-09-29 JP JP27737799A patent/JP4437345B2/ja not_active Expired - Lifetime
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