JP4437345B2 - ポジ型感光性樹脂組成物 - Google Patents

ポジ型感光性樹脂組成物 Download PDF

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Publication number
JP4437345B2
JP4437345B2 JP27737799A JP27737799A JP4437345B2 JP 4437345 B2 JP4437345 B2 JP 4437345B2 JP 27737799 A JP27737799 A JP 27737799A JP 27737799 A JP27737799 A JP 27737799A JP 4437345 B2 JP4437345 B2 JP 4437345B2
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group
weight
parts
resin composition
bis
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JP27737799A
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Japanese (ja)
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JP2001092138A (ja
JP2001092138A5 (enExample
Inventor
秀明 高橋
隆行 金田
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Asahi Kasei Corp
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Asahi Kasei E Materials Corp
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Priority to JP27737799A priority Critical patent/JP4437345B2/ja
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Publication of JP2001092138A5 publication Critical patent/JP2001092138A5/ja
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Publication of JP4437345B2 publication Critical patent/JP4437345B2/ja
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP27737799A 1999-07-22 1999-09-29 ポジ型感光性樹脂組成物 Expired - Lifetime JP4437345B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27737799A JP4437345B2 (ja) 1999-07-22 1999-09-29 ポジ型感光性樹脂組成物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-208112 1999-07-22
JP20811299 1999-07-22
JP27737799A JP4437345B2 (ja) 1999-07-22 1999-09-29 ポジ型感光性樹脂組成物

Publications (3)

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JP2001092138A JP2001092138A (ja) 2001-04-06
JP2001092138A5 JP2001092138A5 (enExample) 2005-12-02
JP4437345B2 true JP4437345B2 (ja) 2010-03-24

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JP27737799A Expired - Lifetime JP4437345B2 (ja) 1999-07-22 1999-09-29 ポジ型感光性樹脂組成物

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JP (1) JP4437345B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4558976B2 (ja) * 2001-05-14 2010-10-06 旭化成イーマテリアルズ株式会社 ポジ型感光性樹脂組成物
JP4560247B2 (ja) * 2001-08-01 2010-10-13 旭化成イーマテリアルズ株式会社 ポジ型感光性樹脂組成物
CN100480855C (zh) 2002-05-29 2009-04-22 东丽株式会社 感光性树脂组合物和耐热性树脂膜的制造方法
JP2009108074A (ja) * 2002-07-31 2009-05-21 Sumitomo Bakelite Co Ltd ナフトキノンジアジドスルホン酸エステル、それを用いたポジ型感光性樹脂組成物及び半導体装置
WO2007029614A1 (ja) * 2005-09-05 2007-03-15 Asahi Kasei Emd Corporation ポジ型感光性樹脂組成物

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JP2001092138A (ja) 2001-04-06

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