JP2001053100A5 - - Google Patents
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- Publication number
- JP2001053100A5 JP2001053100A5 JP1999222847A JP22284799A JP2001053100A5 JP 2001053100 A5 JP2001053100 A5 JP 2001053100A5 JP 1999222847 A JP1999222847 A JP 1999222847A JP 22284799 A JP22284799 A JP 22284799A JP 2001053100 A5 JP2001053100 A5 JP 2001053100A5
- Authority
- JP
- Japan
- Prior art keywords
- bump electrode
- semiconductor device
- electrode
- bump
- contact area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22284799A JP4021104B2 (ja) | 1999-08-05 | 1999-08-05 | バンプ電極を有する半導体装置 |
| US09/632,324 US6563216B1 (en) | 1999-08-05 | 2000-08-04 | Semiconductor device having a bump electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22284799A JP4021104B2 (ja) | 1999-08-05 | 1999-08-05 | バンプ電極を有する半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001053100A JP2001053100A (ja) | 2001-02-23 |
| JP2001053100A5 true JP2001053100A5 (enExample) | 2005-11-24 |
| JP4021104B2 JP4021104B2 (ja) | 2007-12-12 |
Family
ID=16788845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22284799A Expired - Fee Related JP4021104B2 (ja) | 1999-08-05 | 1999-08-05 | バンプ電極を有する半導体装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6563216B1 (enExample) |
| JP (1) | JP4021104B2 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7034402B1 (en) * | 2000-06-28 | 2006-04-25 | Intel Corporation | Device with segmented ball limiting metallurgy |
| KR100448344B1 (ko) * | 2002-10-22 | 2004-09-13 | 삼성전자주식회사 | 웨이퍼 레벨 칩 스케일 패키지 제조 방법 |
| US6864578B2 (en) * | 2003-04-03 | 2005-03-08 | International Business Machines Corporation | Internally reinforced bond pads |
| US7180195B2 (en) * | 2003-12-17 | 2007-02-20 | Intel Corporation | Method and apparatus for improved power routing |
| JP4010311B2 (ja) * | 2004-09-06 | 2007-11-21 | セイコーエプソン株式会社 | 半導体装置および半導体装置の製造方法 |
| JP4606145B2 (ja) * | 2004-12-09 | 2011-01-05 | セイコーエプソン株式会社 | 半導体装置及びその製造方法 |
| DE102005009358B4 (de) * | 2005-03-01 | 2021-02-04 | Snaptrack, Inc. | Lötfähiger Kontakt und ein Verfahren zur Herstellung |
| US20060211167A1 (en) * | 2005-03-18 | 2006-09-21 | International Business Machines Corporation | Methods and systems for improving microelectronic i/o current capabilities |
| US8319343B2 (en) * | 2005-09-21 | 2012-11-27 | Agere Systems Llc | Routing under bond pad for the replacement of an interconnect layer |
| US7952206B2 (en) * | 2005-09-27 | 2011-05-31 | Agere Systems Inc. | Solder bump structure for flip chip semiconductor devices and method of manufacture therefore |
| JP4708148B2 (ja) * | 2005-10-07 | 2011-06-22 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP4738971B2 (ja) * | 2005-10-14 | 2011-08-03 | Okiセミコンダクタ株式会社 | 半導体装置及びその製造方法 |
| US8552560B2 (en) * | 2005-11-18 | 2013-10-08 | Lsi Corporation | Alternate pad structures/passivation inegration schemes to reduce or eliminate IMC cracking in post wire bonded dies during Cu/Low-K BEOL processing |
| US7888257B2 (en) * | 2007-10-10 | 2011-02-15 | Agere Systems Inc. | Integrated circuit package including wire bonds |
| EP2195837A1 (en) * | 2007-10-31 | 2010-06-16 | Agere Systems Inc. | Bond pad support structure for semiconductor device |
| JP2008047943A (ja) * | 2007-11-01 | 2008-02-28 | Renesas Technology Corp | 半導体装置 |
| JP4585564B2 (ja) * | 2007-12-13 | 2010-11-24 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP2008160168A (ja) * | 2008-03-26 | 2008-07-10 | Seiko Epson Corp | 半導体装置及びその製造方法 |
| JP2010267641A (ja) * | 2009-05-12 | 2010-11-25 | Panasonic Corp | 半導体装置 |
| JP5259674B2 (ja) * | 2010-10-18 | 2013-08-07 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| KR102410018B1 (ko) | 2015-09-18 | 2022-06-16 | 삼성전자주식회사 | 반도체 패키지 |
| KR102658923B1 (ko) | 2016-09-12 | 2024-04-18 | 삼성전자주식회사 | 반도체 장치 및 반도체 패키지 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5220199A (en) * | 1988-09-13 | 1993-06-15 | Hitachi, Ltd. | Semiconductor integrated circuit device in which a semiconductor chip is mounted with solder bumps for mounting to a wiring substrate |
| JPH04212426A (ja) * | 1990-06-21 | 1992-08-04 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
| JP3238011B2 (ja) * | 1994-07-27 | 2001-12-10 | 株式会社東芝 | 半導体装置 |
| US5686762A (en) * | 1995-12-21 | 1997-11-11 | Micron Technology, Inc. | Semiconductor device with improved bond pads |
| US6022792A (en) * | 1996-03-13 | 2000-02-08 | Seiko Instruments, Inc. | Semiconductor dicing and assembling method |
| KR100307385B1 (ko) * | 1997-03-05 | 2001-12-15 | 구본준, 론 위라하디락사 | 액정표시장치의구조및그제조방법 |
| KR100255591B1 (ko) * | 1997-03-06 | 2000-05-01 | 구본준 | 박막 트랜지스터 어레이의 배선 연결 구조 및 그 제조 방법 |
-
1999
- 1999-08-05 JP JP22284799A patent/JP4021104B2/ja not_active Expired - Fee Related
-
2000
- 2000-08-04 US US09/632,324 patent/US6563216B1/en not_active Expired - Lifetime
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