JPH04212426A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPH04212426A
JPH04212426A JP3057545A JP5754591A JPH04212426A JP H04212426 A JPH04212426 A JP H04212426A JP 3057545 A JP3057545 A JP 3057545A JP 5754591 A JP5754591 A JP 5754591A JP H04212426 A JPH04212426 A JP H04212426A
Authority
JP
Japan
Prior art keywords
film
insulating film
conductor
contact hole
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3057545A
Other languages
English (en)
Inventor
Moriyoshi Nakajima
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP16365590 priority Critical
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3057545A priority patent/JPH04212426A/ja
Publication of JPH04212426A publication Critical patent/JPH04212426A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76819Smoothing of the dielectric
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5226Via connections in a multilevel interconnection structure
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01005Boron [B]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01006Carbon [C]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01013Aluminum [Al]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01014Silicon [Si]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01015Phosphorus [P]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01022Titanium [Ti]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/0105Tin [Sn]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901Structure
    • H01L2924/1904Component type
    • H01L2924/19043Component type being a resistor
JP3057545A 1990-06-21 1991-03-22 Semiconductor device and its manufacture Pending JPH04212426A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16365590 1990-06-21
JP3057545A JPH04212426A (en) 1990-06-21 1991-03-22 Semiconductor device and its manufacture

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP3057545A JPH04212426A (en) 1990-06-21 1991-03-22 Semiconductor device and its manufacture
US07/709,607 US5229645A (en) 1990-06-21 1991-06-05 Semiconductor device and manufacturing method thereof
DE4120592A DE4120592C2 (de) 1990-06-21 1991-06-21 Halbleitereinrichtung und Verfahren zu deren Herstellung
KR1019920004356A KR960016824B1 (ko) 1990-06-21 1992-03-17 반도체장치 및 그의 제조방법

Publications (1)

Publication Number Publication Date
JPH04212426A true JPH04212426A (en) 1992-08-04

Family

ID=26398607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3057545A Pending JPH04212426A (en) 1990-06-21 1991-03-22 Semiconductor device and its manufacture

Country Status (4)

Country Link
US (1) US5229645A (ja)
JP (1) JPH04212426A (ja)
KR (1) KR960016824B1 (ja)
DE (1) DE4120592C2 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3903189B2 (ja) * 1995-03-07 2007-04-11 マイクロン・テクノロジー・インコーポレーテッドMicron Technology,Inc. Dram半導体装置
US5903058A (en) * 1996-07-17 1999-05-11 Micron Technology, Inc. Conductive bumps on die for flip chip application
KR100255591B1 (ko) * 1997-03-06 2000-05-01 구본준 박막 트랜지스터 어레이의 배선 연결 구조 및 그 제조 방법
JP3397663B2 (ja) * 1997-03-19 2003-04-21 株式会社東芝 回路素子の製造方法
US6143649A (en) * 1998-02-05 2000-11-07 Micron Technology, Inc. Method for making semiconductor devices having gradual slope contacts
KR100443840B1 (ko) * 1998-09-01 2005-01-13 엘지.필립스 엘시디 주식회사 액정표시장치의제조방법
JP4021104B2 (ja) * 1999-08-05 2007-12-12 セイコーインスツル株式会社 バンプ電極を有する半導体装置
US6838769B1 (en) 1999-12-16 2005-01-04 Agere Systems Inc. Dual damascene bond pad structure for lowering stress and allowing circuitry under pads
GB2364170B (en) * 1999-12-16 2002-06-12 Lucent Technologies Inc Dual damascene bond pad structure for lowering stress and allowing circuitry under pads and a process to form the same

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3228399A1 (de) * 1982-07-29 1984-02-02 Siemens Ag Verfahren zum herstellen einer monolithisch integrierten schaltung
JPS59188143A (en) * 1983-04-08 1984-10-25 Hitachi Ltd Multilayer interconnection member and method of manufacturing the same
US4876582A (en) * 1983-05-02 1989-10-24 Ncr Corporation Crystallized silicon-on-insulator nonvolatile memory device
JPS59214239A (en) * 1983-05-16 1984-12-04 Fujitsu Ltd Manufacture of semiconductor device
KR940002772B1 (ko) * 1984-08-31 1994-04-02 가부시기가이샤 히다찌세이사꾸쇼 반도체 집적회로 장치 및 그 제조방법
JPH0574940B2 (ja) * 1985-01-30 1993-10-19 Nippon Electric Co
US4811076A (en) * 1985-05-01 1989-03-07 Texas Instruments Incorporated Device and process with doubled capacitors
JPH0719842B2 (ja) * 1985-05-23 1995-03-06 三菱電機株式会社 半導体装置の冗長回路
JPS6276653A (en) * 1985-09-30 1987-04-08 Toshiba Corp Semiconductor integrated circuit
US4638400A (en) * 1985-10-24 1987-01-20 General Electric Company Refractory metal capacitor structures, particularly for analog integrated circuit devices
JPS62199037A (en) * 1986-02-27 1987-09-02 Rohm Co Ltd Wiring structure of semiconductor device
JPS62298135A (en) * 1986-06-18 1987-12-25 Hitachi Ltd Semiconductor device
JPS6342144A (en) * 1986-08-08 1988-02-23 Hitachi Ltd Structure of multilayer interconnection
JPS63268258A (en) * 1987-04-24 1988-11-04 Nec Corp Semiconductor device
US5086370A (en) * 1990-08-24 1992-02-04 Analog Devices, Incorporated Integrated circuit chip formed with a capacitor having a low voltage coefficient, and method of making such capacitor

Also Published As

Publication number Publication date
US5229645A (en) 1993-07-20
KR960016824B1 (ko) 1996-12-21
DE4120592C2 (de) 1996-03-28
KR920018849A (ko) 1992-10-22
DE4120592A1 (de) 1992-01-09

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Effective date: 20000516