JP2001047549A - 透明導電性フィルム - Google Patents
透明導電性フィルムInfo
- Publication number
- JP2001047549A JP2001047549A JP11223190A JP22319099A JP2001047549A JP 2001047549 A JP2001047549 A JP 2001047549A JP 11223190 A JP11223190 A JP 11223190A JP 22319099 A JP22319099 A JP 22319099A JP 2001047549 A JP2001047549 A JP 2001047549A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- transparent conductive
- transparent
- metal
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010409 thin film Substances 0.000 claims abstract description 94
- 239000010408 film Substances 0.000 claims abstract description 54
- 229910052751 metal Inorganic materials 0.000 claims abstract description 52
- 239000002184 metal Substances 0.000 claims abstract description 52
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 25
- 229910052709 silver Inorganic materials 0.000 claims abstract description 23
- 239000004332 silver Substances 0.000 claims abstract description 23
- 125000004429 atom Chemical group 0.000 claims abstract description 16
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 13
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 13
- 229910052976 metal sulfide Inorganic materials 0.000 claims abstract description 5
- 238000002834 transmittance Methods 0.000 claims description 20
- 229910003437 indium oxide Inorganic materials 0.000 claims description 19
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 19
- 239000002985 plastic film Substances 0.000 claims description 13
- 229920003023 plastic Polymers 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 8
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 3
- 229910001887 tin oxide Inorganic materials 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 23
- 239000010410 layer Substances 0.000 description 110
- 238000000034 method Methods 0.000 description 19
- 239000007789 gas Substances 0.000 description 18
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 16
- 238000004544 sputter deposition Methods 0.000 description 16
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 239000000523 sample Substances 0.000 description 11
- 230000006866 deterioration Effects 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 9
- 230000007613 environmental effect Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 6
- 229910001882 dioxygen Inorganic materials 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 150000002500 ions Chemical group 0.000 description 5
- -1 polyethylene terephthalate Polymers 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 230000005672 electromagnetic field Effects 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 1
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- ODJQKYXPKWQWNK-UHFFFAOYSA-L 3-(2-carboxylatoethylsulfanyl)propanoate Chemical compound [O-]C(=O)CCSCCC([O-])=O ODJQKYXPKWQWNK-UHFFFAOYSA-L 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 101100321669 Fagopyrum esculentum FA02 gene Proteins 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 238000003490 calendering Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 150000004763 sulfides Chemical class 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Non-Insulated Conductors (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Aerials With Secondary Devices (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Laminated Bodies (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11223190A JP2001047549A (ja) | 1999-08-06 | 1999-08-06 | 透明導電性フィルム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11223190A JP2001047549A (ja) | 1999-08-06 | 1999-08-06 | 透明導電性フィルム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001047549A true JP2001047549A (ja) | 2001-02-20 |
| JP2001047549A5 JP2001047549A5 (https=) | 2006-04-06 |
Family
ID=16794221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11223190A Withdrawn JP2001047549A (ja) | 1999-08-06 | 1999-08-06 | 透明導電性フィルム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001047549A (https=) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003037056A1 (en) * | 2001-10-26 | 2003-05-01 | Central Glass Company, Limited | Substrate with electromagnetic shield film |
| WO2008146693A1 (ja) * | 2007-05-23 | 2008-12-04 | National Institute Of Advanced Industrial Science And Technology | 酸化物透明導電膜、およびそれを用いた光電変換素子、光検出素子 |
| DE112007001519T5 (de) | 2006-06-22 | 2009-06-18 | Mitsubishi Paper Mills Limited | Verfahren zum Herstellen eines leitfähigen Materials |
| US7749620B2 (en) | 2002-07-12 | 2010-07-06 | Fujimori Kogyo Co., Ltd. | Electromagnetic wave shield material and process for producing the same |
| US7972713B2 (en) | 2003-11-28 | 2011-07-05 | Saint-Gobain Glass France | Transparent substrate which can be used alternatively or cumulatively for thermal control, electromagnetic armour and heated glazing |
| EP2479796A4 (en) * | 2009-09-18 | 2013-08-07 | Sanyo Electric Co | SOLAR BATTERY, SOLAR BATTERY MODULE AND SOLAR BATTERY SYSTEM |
| EP2479763A4 (en) * | 2009-09-17 | 2013-11-13 | Sanyo Electric Co | TRANSPARENT CONDUCTIVE FILM AND DEVICE THEREFOR |
| CN105261944A (zh) * | 2015-11-10 | 2016-01-20 | 李聪 | 一种电力柜 |
| JP2016196186A (ja) * | 2016-04-25 | 2016-11-24 | 日東電工株式会社 | 導電性フィルムおよび導電性フィルムロール |
| JP2016210192A (ja) * | 2015-02-24 | 2016-12-15 | 日東電工株式会社 | 光透過性フィルム |
| JP2019178403A (ja) * | 2018-03-30 | 2019-10-17 | 東ソー株式会社 | 複合酸化物透明導電膜、その製造方法及び透明導電膜付基材 |
-
1999
- 1999-08-06 JP JP11223190A patent/JP2001047549A/ja not_active Withdrawn
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003037056A1 (en) * | 2001-10-26 | 2003-05-01 | Central Glass Company, Limited | Substrate with electromagnetic shield film |
| US7749620B2 (en) | 2002-07-12 | 2010-07-06 | Fujimori Kogyo Co., Ltd. | Electromagnetic wave shield material and process for producing the same |
| US7972713B2 (en) | 2003-11-28 | 2011-07-05 | Saint-Gobain Glass France | Transparent substrate which can be used alternatively or cumulatively for thermal control, electromagnetic armour and heated glazing |
| US8440329B2 (en) | 2003-11-28 | 2013-05-14 | Saint-Gobain Glass France | Transparent substrate which can be used alternatively or cumulatively, for thermal control, for electromagnetic armour and for heated glazing |
| DE112007001519T5 (de) | 2006-06-22 | 2009-06-18 | Mitsubishi Paper Mills Limited | Verfahren zum Herstellen eines leitfähigen Materials |
| DE112007001519B4 (de) | 2006-06-22 | 2022-03-10 | Mitsubishi Paper Mills Limited | Verfahren zum Herstellen eines leitfähigen Materials |
| WO2008146693A1 (ja) * | 2007-05-23 | 2008-12-04 | National Institute Of Advanced Industrial Science And Technology | 酸化物透明導電膜、およびそれを用いた光電変換素子、光検出素子 |
| JP5229919B2 (ja) * | 2007-05-23 | 2013-07-03 | 独立行政法人産業技術総合研究所 | 酸化物透明導電膜を用いた光電変換素子及び光検出素子 |
| EP2479763A4 (en) * | 2009-09-17 | 2013-11-13 | Sanyo Electric Co | TRANSPARENT CONDUCTIVE FILM AND DEVICE THEREFOR |
| EP2479796A4 (en) * | 2009-09-18 | 2013-08-07 | Sanyo Electric Co | SOLAR BATTERY, SOLAR BATTERY MODULE AND SOLAR BATTERY SYSTEM |
| EP3263327A4 (en) * | 2015-02-24 | 2018-10-31 | Nitto Denko Corporation | Light-transmitting film |
| JP2016210192A (ja) * | 2015-02-24 | 2016-12-15 | 日東電工株式会社 | 光透過性フィルム |
| CN106794670A (zh) * | 2015-02-24 | 2017-05-31 | 日东电工株式会社 | 透光性薄膜 |
| KR20170120556A (ko) * | 2015-02-24 | 2017-10-31 | 닛토덴코 가부시키가이샤 | 광 투과성 필름 |
| US20180040393A1 (en) * | 2015-02-24 | 2018-02-08 | Nitto Denko Corporation | Light transmitting film |
| CN106794670B (zh) * | 2015-02-24 | 2019-09-20 | 日东电工株式会社 | 透光性薄膜 |
| CN110641108A (zh) * | 2015-02-24 | 2020-01-03 | 日东电工株式会社 | 薄膜 |
| TWI716379B (zh) * | 2015-02-24 | 2021-01-21 | 日商日東電工股份有限公司 | 透光性膜 |
| KR102388000B1 (ko) * | 2015-02-24 | 2022-04-18 | 닛토덴코 가부시키가이샤 | 광 투과성 필름 |
| CN105261944A (zh) * | 2015-11-10 | 2016-01-20 | 李聪 | 一种电力柜 |
| JP2016196186A (ja) * | 2016-04-25 | 2016-11-24 | 日東電工株式会社 | 導電性フィルムおよび導電性フィルムロール |
| JP2019178403A (ja) * | 2018-03-30 | 2019-10-17 | 東ソー株式会社 | 複合酸化物透明導電膜、その製造方法及び透明導電膜付基材 |
| JP7119507B2 (ja) | 2018-03-30 | 2022-08-17 | 東ソー株式会社 | 複合酸化物透明導電膜、その製造方法及び透明導電膜付基材 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060210 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060210 |
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| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20080714 |