JP2000307109A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法Info
- Publication number
- JP2000307109A JP2000307109A JP11114590A JP11459099A JP2000307109A JP 2000307109 A JP2000307109 A JP 2000307109A JP 11114590 A JP11114590 A JP 11114590A JP 11459099 A JP11459099 A JP 11459099A JP 2000307109 A JP2000307109 A JP 2000307109A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- semiconductor
- main surface
- semiconductor substrate
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
- H10D30/66—Vertical DMOS [VDMOS] FETs
- H10D30/665—Vertical DMOS [VDMOS] FETs having edge termination structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/101—Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
- H10D84/141—VDMOS having built-in components
- H10D84/148—VDMOS having built-in components the built-in components being breakdown diodes, e.g. Zener diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
- H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11114590A JP2000307109A (ja) | 1999-04-22 | 1999-04-22 | 半導体装置及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11114590A JP2000307109A (ja) | 1999-04-22 | 1999-04-22 | 半導体装置及びその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009021362A Division JP2009124169A (ja) | 2009-02-02 | 2009-02-02 | 半導体装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000307109A true JP2000307109A (ja) | 2000-11-02 |
| JP2000307109A5 JP2000307109A5 (enExample) | 2005-09-02 |
Family
ID=14641677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11114590A Pending JP2000307109A (ja) | 1999-04-22 | 1999-04-22 | 半導体装置及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000307109A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008085188A (ja) * | 2006-09-28 | 2008-04-10 | Sanyo Electric Co Ltd | 絶縁ゲート型半導体装置 |
| US7834407B2 (en) | 2005-05-20 | 2010-11-16 | Renesas Electronics Corporation | Semiconductor device |
-
1999
- 1999-04-22 JP JP11114590A patent/JP2000307109A/ja active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7834407B2 (en) | 2005-05-20 | 2010-11-16 | Renesas Electronics Corporation | Semiconductor device |
| US8232610B2 (en) | 2005-05-20 | 2012-07-31 | Renesas Electronics Corporation | Semiconductor device and manufacturing method of the same |
| US8592920B2 (en) | 2005-05-20 | 2013-11-26 | Renesas Electronics Corporation | Semiconductor device and manufacturing method of the same |
| US8604563B2 (en) | 2005-05-20 | 2013-12-10 | Renesas Electronics Corporation | Semiconductor device and manufacturing method of the same |
| US9013006B2 (en) | 2005-05-20 | 2015-04-21 | Renesas Electronics Corporation | Semiconductor device and manufacturing method of the same |
| US9245973B2 (en) | 2005-05-20 | 2016-01-26 | Renesas Electronics Corporation | Semiconductor device and manufacturing method of the same |
| US9478530B2 (en) | 2005-05-20 | 2016-10-25 | Renesas Electronics Corporation | Semiconductor device and manufacturing method of the same |
| US9837528B2 (en) | 2005-05-20 | 2017-12-05 | Renesas Electronics Corporation | Semiconductor device and manufacturing method of the same |
| US10211332B2 (en) | 2005-05-20 | 2019-02-19 | Renesas Electronics Corporation | Semiconductor device and manufacturing method of the same |
| US11107912B2 (en) | 2005-05-20 | 2021-08-31 | Renesas Electronics Corporation | Trench gate semiconductor device with dummy gate electrode and manufacturing method of the same |
| JP2008085188A (ja) * | 2006-09-28 | 2008-04-10 | Sanyo Electric Co Ltd | 絶縁ゲート型半導体装置 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050308 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050308 |
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| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070806 |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081202 |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090331 |