JP2000284176A5 - - Google Patents

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Publication number
JP2000284176A5
JP2000284176A5 JP1999090735A JP9073599A JP2000284176A5 JP 2000284176 A5 JP2000284176 A5 JP 2000284176A5 JP 1999090735 A JP1999090735 A JP 1999090735A JP 9073599 A JP9073599 A JP 9073599A JP 2000284176 A5 JP2000284176 A5 JP 2000284176A5
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JP
Japan
Prior art keywords
lens group
focal length
optical system
length state
refractive power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999090735A
Other languages
English (en)
Japanese (ja)
Other versions
JP4337067B2 (ja
JP2000284176A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP09073599A external-priority patent/JP4337067B2/ja
Priority to JP09073599A priority Critical patent/JP4337067B2/ja
Priority to US09/540,874 priority patent/US6563567B1/en
Publication of JP2000284176A publication Critical patent/JP2000284176A/ja
Priority to US10/377,700 priority patent/US20030160949A1/en
Priority to US10/378,867 priority patent/US20030156266A1/en
Priority to US10/378,816 priority patent/US20030156269A1/en
Publication of JP2000284176A5 publication Critical patent/JP2000284176A5/ja
Publication of JP4337067B2 publication Critical patent/JP4337067B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP09073599A 1998-12-17 1999-03-31 ズーム光学系および該ズーム光学系を備えた露光装置および露光方法 Expired - Fee Related JP4337067B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP09073599A JP4337067B2 (ja) 1999-03-31 1999-03-31 ズーム光学系および該ズーム光学系を備えた露光装置および露光方法
US09/540,874 US6563567B1 (en) 1998-12-17 2000-03-31 Method and apparatus for illuminating a surface using a projection imaging apparatus
US10/377,700 US20030160949A1 (en) 1998-12-17 2003-03-04 Method and apparatus for illuminating a surface using a projection imaging apparatus
US10/378,816 US20030156269A1 (en) 1998-12-17 2003-03-05 Method and apparatus for illuminating a surface using a projection imaging apparatus
US10/378,867 US20030156266A1 (en) 1998-12-17 2003-03-05 Method and apparatus for illuminating a surface using a projection imaging apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09073599A JP4337067B2 (ja) 1999-03-31 1999-03-31 ズーム光学系および該ズーム光学系を備えた露光装置および露光方法

Publications (3)

Publication Number Publication Date
JP2000284176A JP2000284176A (ja) 2000-10-13
JP2000284176A5 true JP2000284176A5 (enExample) 2008-02-28
JP4337067B2 JP4337067B2 (ja) 2009-09-30

Family

ID=14006843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP09073599A Expired - Fee Related JP4337067B2 (ja) 1998-12-17 1999-03-31 ズーム光学系および該ズーム光学系を備えた露光装置および露光方法

Country Status (1)

Country Link
JP (1) JP4337067B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002207167A (ja) * 2001-01-10 2002-07-26 Nikon Corp ズーム光学系および該ズーム光学系を備えた露光装置および露光方法
DE10144246A1 (de) * 2001-09-05 2003-03-20 Zeiss Carl Zoom-System für eine Beleuchtungseinrichtung
JP2005055496A (ja) * 2003-08-05 2005-03-03 Olympus Corp 変倍光学系
JP4615852B2 (ja) * 2003-12-12 2011-01-19 オリンパス株式会社 変倍光学系及びそれを用いた電子機器
CN100520482C (zh) * 2005-03-11 2009-07-29 索尼株式会社 变焦镜头及摄像装置
CN102736221B (zh) * 2011-03-31 2015-02-11 上海微电子装备有限公司 一种投影光刻物镜
DE102018205315B4 (de) * 2018-04-09 2024-06-20 Clay Paky S.R.L. Optisches System mit Diffusoren und Wabenkondensoren
CN112882208B (zh) * 2019-11-29 2022-08-02 上海微电子装备（集团）股份有限公司 大视场成像物镜
CN110989138B (zh) * 2019-12-23 2021-03-19 中国科学院长春光学精密机械与物理研究所 一种大视场宽光谱无焦光学系统
CN111443471B (zh) * 2020-05-09 2024-10-22 深圳市雷影光电科技有限公司 内合焦式成像镜头
CN115903357A (zh) * 2021-08-20 2023-04-04 巴可伟视(北京)电子有限公司 一种变焦偏振转换系统
CN119343619A (zh) * 2022-06-09 2025-01-21 Lg伊诺特有限公司 光学系统和摄像装置模块
CN117250736B (zh) * 2023-11-17 2024-01-26 南京信息工程大学 一种大像面高分辨率宽光谱星敏感器光学系统
CN118363152B (zh) * 2024-06-19 2024-09-17 长春智灵光电科技有限公司 一种紫外飞秒激光器的镜头

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