JP2001051193A5 - - Google Patents

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Publication number
JP2001051193A5
JP2001051193A5 JP2000155213A JP2000155213A JP2001051193A5 JP 2001051193 A5 JP2001051193 A5 JP 2001051193A5 JP 2000155213 A JP2000155213 A JP 2000155213A JP 2000155213 A JP2000155213 A JP 2000155213A JP 2001051193 A5 JP2001051193 A5 JP 2001051193A5
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JP
Japan
Prior art keywords
optical system
projection
mask
projection optical
lens group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000155213A
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English (en)
Japanese (ja)
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JP2001051193A (en
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Publication date
Application filed filed Critical
Priority to JP2000155213A priority Critical patent/JP2001051193A/ja
Priority claimed from JP2000155213A external-priority patent/JP2001051193A/ja
Publication of JP2001051193A publication Critical patent/JP2001051193A/ja
Publication of JP2001051193A5 publication Critical patent/JP2001051193A5/ja
Pending legal-status Critical Current

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JP2000155213A 1999-06-03 2000-05-25 Projection optical system projection exposing device provided with the system and manufacture of device Pending JP2001051193A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000155213A JP2001051193A (en) 1999-06-03 2000-05-25 Projection optical system projection exposing device provided with the system and manufacture of device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP15699599 1999-06-03
JP2000155213A JP2001051193A (en) 1999-06-03 2000-05-25 Projection optical system projection exposing device provided with the system and manufacture of device

Publications (2)

Publication Number Publication Date
JP2001051193A JP2001051193A (en) 2001-02-23
JP2001051193A5 true JP2001051193A5 (enExample) 2008-03-06

Family

ID=26484588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000155213A Pending JP2001051193A (en) 1999-06-03 2000-05-25 Projection optical system projection exposing device provided with the system and manufacture of device

Country Status (1)

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JP (1) JP2001051193A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002244034A (ja) 2001-02-21 2002-08-28 Nikon Corp 投影光学系および該投影光学系を備えた露光装置
JP2002323652A (ja) 2001-02-23 2002-11-08 Nikon Corp 投影光学系，該投影光学系を備えた投影露光装置および投影露光方法
JP4228130B2 (ja) * 2001-11-05 2009-02-25 株式会社ニコン 投影光学系、露光装置及びデバイスの製造方法
EP1690139B1 (en) * 2003-12-02 2009-01-14 Carl Zeiss SMT AG Projection optical system
CN106871041B (zh) * 2017-03-22 2023-07-18 广州维思车用部件有限公司 汽车后视镜内的投影灯装置
CN112415865B (zh) * 2020-12-01 2023-11-17 中国科学院光电技术研究所 一种应用于投影光刻机的单倍率大视场投影曝光物镜
CN118068543B (zh) * 2024-04-19 2024-06-25 南京信息工程大学 一种长工作距高分辨率物方远心镜头

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3750123B2 (ja) * 1996-04-25 2006-03-01 株式会社ニコン 投影光学系
JPH10133105A (ja) * 1996-10-25 1998-05-22 Nikon Corp 投影露光装置

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