JP2000252244A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2000252244A5 JP2000252244A5 JP1999368848A JP36884899A JP2000252244A5 JP 2000252244 A5 JP2000252244 A5 JP 2000252244A5 JP 1999368848 A JP1999368848 A JP 1999368848A JP 36884899 A JP36884899 A JP 36884899A JP 2000252244 A5 JP2000252244 A5 JP 2000252244A5
- Authority
- JP
- Japan
- Prior art keywords
- water
- metal
- solubility
- weight
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 description 39
- 239000003795 chemical substances by application Substances 0.000 description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 35
- 238000005498 polishing Methods 0.000 description 31
- 230000001681 protective effect Effects 0.000 description 26
- 238000000034 method Methods 0.000 description 11
- 229910044991 metal oxide Inorganic materials 0.000 description 10
- 150000004706 metal oxides Chemical class 0.000 description 10
- 239000007800 oxidant agent Substances 0.000 description 10
- 239000007864 aqueous solution Substances 0.000 description 9
- 239000012141 concentrate Substances 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 150000001412 amines Chemical class 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- 150000003851 azoles Chemical class 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP36884899A JP2000252244A (ja) | 1998-12-28 | 1999-12-27 | 金属用研磨液及びそれを用いた研磨方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP37260698 | 1998-12-28 | ||
| JP10-372606 | 1998-12-28 | ||
| JP36884899A JP2000252244A (ja) | 1998-12-28 | 1999-12-27 | 金属用研磨液及びそれを用いた研磨方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000252244A JP2000252244A (ja) | 2000-09-14 |
| JP2000252244A5 true JP2000252244A5 (enExample) | 2007-02-15 |
Family
ID=26582043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP36884899A Pending JP2000252244A (ja) | 1998-12-28 | 1999-12-27 | 金属用研磨液及びそれを用いた研磨方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000252244A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1833085A1 (en) * | 1998-12-28 | 2007-09-12 | Hitachi Chemical Company, Ltd. | Materials for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using the same |
| JP2004127327A (ja) * | 1999-12-27 | 2004-04-22 | Showa Denko Kk | 磁気ディスク基板研磨用組成物 |
| JP2006203188A (ja) * | 2004-12-22 | 2006-08-03 | Showa Denko Kk | 研磨組成物及び研磨方法 |
-
1999
- 1999-12-27 JP JP36884899A patent/JP2000252244A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2000252242A5 (enExample) | ||
| JP2007088424A5 (enExample) | ||
| EP1211024A3 (en) | Polishing method | |
| JP2003536258A5 (enExample) | ||
| JP2011516655A5 (enExample) | ||
| JP2006245598A5 (enExample) | ||
| BR0113494A (pt) | Processo para a preparação de uma formulação sólida herbicida, e, uso de uma formulação sólida herbicida | |
| EP1050532A3 (en) | Preparation of s,s and r,s amino acid isosteres | |
| JP2001079382A5 (enExample) | ||
| IL138706A0 (en) | Acidic composition containing fluoride for removal of photoresists and etch residues | |
| JP2004529488A5 (enExample) | ||
| JP2005513096A5 (enExample) | ||
| JP2017517900A5 (enExample) | ||
| NZ335301A (en) | Aqueous mycobacterial composition and hard surface disinfecting composition | |
| GB956927A (en) | Anti-tarnish composition for copper-containing surfaces | |
| NO931661L (no) | Tepperensemiddel | |
| WO2005032498A3 (fr) | Composition aqueuse comprenant un polymere dentrique polyonique et un agent tensioactif ionique | |
| JPS6343999A (ja) | 酸性液体洗剤組成物 | |
| JP2000252244A5 (enExample) | ||
| CA2475436A1 (en) | Carboxylic acid containing protective coating compositions and methods of use thereof | |
| JP2000252243A5 (enExample) | ||
| WO2002097164A3 (fr) | Composition et procede pour le traitement d'alliages de magnesium | |
| DE60103284D1 (de) | Antifungizide zusammensetzung von ketoconazole zum auftragen | |
| JP6030791B1 (ja) | 除錆剤および除錆剤の製造方法 | |
| JP2006287207A5 (enExample) |