JP2000207028A5 - - Google Patents

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Publication number
JP2000207028A5
JP2000207028A5 JP1999187361A JP18736199A JP2000207028A5 JP 2000207028 A5 JP2000207028 A5 JP 2000207028A5 JP 1999187361 A JP1999187361 A JP 1999187361A JP 18736199 A JP18736199 A JP 18736199A JP 2000207028 A5 JP2000207028 A5 JP 2000207028A5
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JP
Japan
Prior art keywords
image
sample
processing system
rotary platform
image processing
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JP1999187361A
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English (en)
Japanese (ja)
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JP4422238B2 (ja
JP2000207028A (ja
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Priority claimed from US09/113,484 external-priority patent/US6320609B1/en
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Publication of JP2000207028A publication Critical patent/JP2000207028A/ja
Publication of JP2000207028A5 publication Critical patent/JP2000207028A5/ja
Application granted granted Critical
Publication of JP4422238B2 publication Critical patent/JP4422238B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP18736199A 1998-07-10 1999-07-01 ステージ回転を補償するために極座標ステージ及び連続画像回転を用いる装置及びその装置による測定方法 Expired - Fee Related JP4422238B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/113,484 US6320609B1 (en) 1998-07-10 1998-07-10 System using a polar coordinate stage and continuous image rotation to compensate for stage rotation
US09/113484 1998-07-10

Publications (3)

Publication Number Publication Date
JP2000207028A JP2000207028A (ja) 2000-07-28
JP2000207028A5 true JP2000207028A5 (enExample) 2006-02-09
JP4422238B2 JP4422238B2 (ja) 2010-02-24

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JP18736199A Expired - Fee Related JP4422238B2 (ja) 1998-07-10 1999-07-01 ステージ回転を補償するために極座標ステージ及び連続画像回転を用いる装置及びその装置による測定方法

Country Status (3)

Country Link
US (2) US6320609B1 (enExample)
EP (1) EP0971254A3 (enExample)
JP (1) JP4422238B2 (enExample)

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CN110690135B (zh) * 2019-09-30 2022-02-01 武汉东飞凌科技有限公司 一种二次元坐标系旋转补偿测量方法及装置
CN111562198B (zh) * 2020-05-11 2023-01-20 国网新疆电力有限公司超高压分公司 一种便携式变电站憎水性试验装置
DE102020120398B4 (de) 2020-08-03 2022-09-01 Technische Universität Dresden Vorrichtung und Verfahren zur Durchführung von Messungen an rotierenden Objekten
CN113189602A (zh) * 2021-03-25 2021-07-30 成都中信华瑞科技有限公司 一种运动成像补偿装置及运动补偿方法
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