JP2000173955A5 - - Google Patents
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- Publication number
- JP2000173955A5 JP2000173955A5 JP1998345139A JP34513998A JP2000173955A5 JP 2000173955 A5 JP2000173955 A5 JP 2000173955A5 JP 1998345139 A JP1998345139 A JP 1998345139A JP 34513998 A JP34513998 A JP 34513998A JP 2000173955 A5 JP2000173955 A5 JP 2000173955A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- semiconductor substrate
- grindstone
- oxide
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 9
- 239000002245 particle Substances 0.000 claims 6
- 239000006061 abrasive grain Substances 0.000 claims 5
- 238000000034 method Methods 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims 4
- 229920000058 polyacrylate Polymers 0.000 claims 4
- 229920005646 polycarboxylate Polymers 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000005498 polishing Methods 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- 229910000420 cerium oxide Inorganic materials 0.000 claims 1
- 239000002270 dispersing agent Substances 0.000 claims 1
- 239000000395 magnesium oxide Substances 0.000 claims 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
- 229910001928 zirconium oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34513998A JP3728950B2 (ja) | 1998-12-04 | 1998-12-04 | 半導体装置の製造方法及び平坦化加工装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34513998A JP3728950B2 (ja) | 1998-12-04 | 1998-12-04 | 半導体装置の製造方法及び平坦化加工装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000173955A JP2000173955A (ja) | 2000-06-23 |
| JP2000173955A5 true JP2000173955A5 (https=) | 2004-12-16 |
| JP3728950B2 JP3728950B2 (ja) | 2005-12-21 |
Family
ID=18374553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34513998A Expired - Fee Related JP3728950B2 (ja) | 1998-12-04 | 1998-12-04 | 半導体装置の製造方法及び平坦化加工装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3728950B2 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002043256A (ja) | 2000-07-27 | 2002-02-08 | Hitachi Ltd | 半導体ウエハ平坦化加工方法及び平坦化加工装置 |
| KR100480760B1 (ko) | 2000-10-02 | 2005-04-07 | 미쓰이 긴조꾸 고교 가부시키가이샤 | 세륨계 연마재 및 세륨계 연마재의 제조방법 |
| TWI281493B (en) * | 2000-10-06 | 2007-05-21 | Mitsui Mining & Smelting Co | Polishing material |
| WO2003071592A1 (en) * | 2002-02-20 | 2003-08-28 | Ebara Corporation | Method and device for polishing |
| JP2010034581A (ja) * | 2009-11-04 | 2010-02-12 | Jsr Corp | 化学機械研磨用水系分散体 |
| JP5649417B2 (ja) | 2010-11-26 | 2015-01-07 | 株式会社荏原製作所 | 固定砥粒を有する研磨テープを用いた基板の研磨方法 |
-
1998
- 1998-12-04 JP JP34513998A patent/JP3728950B2/ja not_active Expired - Fee Related
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