JP2000150147A - 有機電界発光素子の製造方法 - Google Patents
有機電界発光素子の製造方法Info
- Publication number
- JP2000150147A JP2000150147A JP10314746A JP31474698A JP2000150147A JP 2000150147 A JP2000150147 A JP 2000150147A JP 10314746 A JP10314746 A JP 10314746A JP 31474698 A JP31474698 A JP 31474698A JP 2000150147 A JP2000150147 A JP 2000150147A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- substrate
- electroluminescent device
- organic electroluminescent
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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| JP10314746A JP2000150147A (ja) | 1998-11-05 | 1998-11-05 | 有機電界発光素子の製造方法 |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001058221A1 (en) * | 2000-01-31 | 2001-08-09 | Idemitsu Kosan Co., Ltd. | Organic electroluminescence display unit and production method therefor |
| WO2001072091A1 (en) * | 2000-03-22 | 2001-09-27 | Idemitsu Kosan Co., Ltd. | Method and apparatus for manufacturing organic el display |
| NL1020635C2 (nl) * | 2002-05-21 | 2003-11-24 | Otb Group Bv | Werkwijze voor het vervaardigen van een polymere OLED. |
| JP3475957B2 (ja) | 2001-12-03 | 2003-12-10 | 株式会社デンソー | 有機ｅｌ素子およびその製造方法 |
| JP2004087496A (ja) * | 2002-08-23 | 2004-03-18 | Samsung Nec Mobile Display Co Ltd | 有機電界発光表示装置 |
| JP2004146244A (ja) * | 2002-10-25 | 2004-05-20 | Seiko Epson Corp | 電気光学装置及び電子機器 |
| WO2005094132A1 (ja) * | 2004-03-26 | 2005-10-06 | Pioneer Corporation | 有機ｅｌパネルの製造方法 |
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| WO2008078648A1 (ja) * | 2006-12-26 | 2008-07-03 | Sharp Kabushiki Kaisha | 有機エレクトロルミネセンスパネル、有機エレクトロルミネセンスディスプレイ、有機エレクトロルミネセンス照明、及び、それらの製造方法 |
| CN1748445B (zh) * | 2003-02-04 | 2011-04-13 | 三洋电机株式会社 | 有机场致发光装置及其制造方法 |
| WO2011058888A1 (ja) * | 2009-11-11 | 2011-05-19 | コニカミノルタホールディングス株式会社 | 有機エレクトロルミネッセンスパネルの製造方法とこれを用いて製造された有機エレクトロルミネッセンスパネル |
| WO2011132631A1 (ja) | 2010-04-21 | 2011-10-27 | コニカミノルタホールディングス株式会社 | 有機エレクトロルミネッセンスパネルの製造方法及びその製造方法で製造された有機エレクトロルミネッセンスパネル |
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| US8648528B2 (en) | 2002-08-29 | 2014-02-11 | Seiko Epson Corporation | Electroluminescent device, method for manufacturing the same, and electronic apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61131394A (ja) * | 1984-11-29 | 1986-06-19 | 株式会社東芝 | 分散形ｅｌの製造方法 |
| JPH10172765A (ja) * | 1996-12-06 | 1998-06-26 | Tdk Corp | 有機エレクトロ・ルミネッセンス表示装置及びその製造方法 |
| JPH10233283A (ja) * | 1997-02-17 | 1998-09-02 | Tdk Corp | 有機エレクトロルミネッセンス表示装置およびその製造方法 |
-
1998
- 1998-11-05 JP JP10314746A patent/JP2000150147A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61131394A (ja) * | 1984-11-29 | 1986-06-19 | 株式会社東芝 | 分散形ｅｌの製造方法 |
| JPH10172765A (ja) * | 1996-12-06 | 1998-06-26 | Tdk Corp | 有機エレクトロ・ルミネッセンス表示装置及びその製造方法 |
| JPH10233283A (ja) * | 1997-02-17 | 1998-09-02 | Tdk Corp | 有機エレクトロルミネッセンス表示装置およびその製造方法 |
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| WO2003098716A1 (en) * | 2002-05-21 | 2003-11-27 | Otb Group B.V. | Method for manufacturing a polymer oled |
| JP2004087496A (ja) * | 2002-08-23 | 2004-03-18 | Samsung Nec Mobile Display Co Ltd | 有機電界発光表示装置 |
| US8648528B2 (en) | 2002-08-29 | 2014-02-11 | Seiko Epson Corporation | Electroluminescent device, method for manufacturing the same, and electronic apparatus |
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| CN1748445B (zh) * | 2003-02-04 | 2011-04-13 | 三洋电机株式会社 | 有机场致发光装置及其制造方法 |
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| WO2008078648A1 (ja) * | 2006-12-26 | 2008-07-03 | Sharp Kabushiki Kaisha | 有機エレクトロルミネセンスパネル、有機エレクトロルミネセンスディスプレイ、有機エレクトロルミネセンス照明、及び、それらの製造方法 |
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