JP2000121318A5 - - Google Patents

Download PDF

Info

Publication number
JP2000121318A5
JP2000121318A5 JP1998289743A JP28974398A JP2000121318A5 JP 2000121318 A5 JP2000121318 A5 JP 2000121318A5 JP 1998289743 A JP1998289743 A JP 1998289743A JP 28974398 A JP28974398 A JP 28974398A JP 2000121318 A5 JP2000121318 A5 JP 2000121318A5
Authority
JP
Japan
Prior art keywords
pixel
measurement point
measurement
interference
reference plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998289743A
Other languages
English (en)
Japanese (ja)
Other versions
JP4204112B2 (ja
JP2000121318A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP28974398A priority Critical patent/JP4204112B2/ja
Priority claimed from JP28974398A external-priority patent/JP4204112B2/ja
Priority to US09/414,498 priority patent/US6628402B1/en
Publication of JP2000121318A publication Critical patent/JP2000121318A/ja
Publication of JP2000121318A5 publication Critical patent/JP2000121318A5/ja
Application granted granted Critical
Publication of JP4204112B2 publication Critical patent/JP4204112B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

JP28974398A 1998-10-12 1998-10-12 光干渉計の干渉位相検出方式 Expired - Fee Related JP4204112B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP28974398A JP4204112B2 (ja) 1998-10-12 1998-10-12 光干渉計の干渉位相検出方式
US09/414,498 US6628402B1 (en) 1998-10-12 1999-10-08 Phase interference detecting method and system in interferometer, and light detector therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28974398A JP4204112B2 (ja) 1998-10-12 1998-10-12 光干渉計の干渉位相検出方式

Publications (3)

Publication Number Publication Date
JP2000121318A JP2000121318A (ja) 2000-04-28
JP2000121318A5 true JP2000121318A5 (enExample) 2005-10-06
JP4204112B2 JP4204112B2 (ja) 2009-01-07

Family

ID=17747194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28974398A Expired - Fee Related JP4204112B2 (ja) 1998-10-12 1998-10-12 光干渉計の干渉位相検出方式

Country Status (2)

Country Link
US (1) US6628402B1 (enExample)
JP (1) JP4204112B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI118548B (fi) * 2002-09-30 2007-12-14 Noveltech Solutions Ltd Fotoakustinen detektori
JP4673770B2 (ja) * 2006-03-03 2011-04-20 株式会社日立ハイテクノロジーズ 光ヘテロダイン干渉測定方法およびその測定装置
JP2008014935A (ja) * 2006-06-05 2008-01-24 Hitachi High-Technologies Corp 表面検査装置及びその方法
US7970199B2 (en) 2006-06-05 2011-06-28 Hitachi High-Technologies Corporation Method and apparatus for detecting defect on a surface of a specimen
CN102944176B (zh) * 2012-11-09 2015-06-17 清华大学 一种外差光栅干涉仪位移测量系统
CN104581142B (zh) * 2015-01-12 2017-07-14 中国科学院空间科学与应用研究中心 一种ccd像素位置偏差测量装置
JP6775196B2 (ja) * 2016-03-14 2020-10-28 パナソニックＩｐマネジメント株式会社 光検出装置
KR20180124489A (ko) * 2017-05-12 2018-11-21 휴멘 주식회사 광간섭 측정 장치
US10386171B1 (en) * 2018-04-04 2019-08-20 United States Of America, As Represented By The Secretary Of The Army Apparatus for a dynamic multi-axis heterodyne interferometric vibrometer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6008901A (en) * 1997-08-22 1999-12-28 Canon Kabushiki Kaisha Shape measuring heterodyne interferometer with multiplexed photodetector aaray or inclined probe head

Similar Documents

Publication Publication Date Title
US8068235B1 (en) Systems and methods for multi-function coherent imaging
EP0885374B1 (en) Three-dimensional color imaging
CA1203398A (en) Dual differential interferometer
CN113465722B (zh) 一种低成本测振系统及振动测量方法
JP2003279309A (ja) レーザ測長器及びレーザ測長方法
WO2018045735A1 (zh) 一种用于激光测量信号修正的装置
JP2000121318A5 (enExample)
US20220397653A1 (en) Techniques for band specific peak detection in a lidar system
JPH0339605A (ja) 光学式表面形状測定装置
JP4204112B2 (ja) 光干渉計の干渉位相検出方式
JP2512059B2 (ja) 異物検出方法及びその装置
JP3235368B2 (ja) レーザドップラー速度測定装置
JPS58225301A (ja) 光学式変位測定装置
JP3361896B2 (ja) レーザドプラ方式振動計
JP2779497B2 (ja) 干渉計
JPS6355035B2 (enExample)
JP3096795B2 (ja) 追尾測距システム
JP2638724B2 (ja) 車両寸法計測装置
JPH09196619A (ja) 微小変位量の測定方法及び装置
JP2866784B2 (ja) 振動検出方法
JPH06221853A (ja) 位置検出装置
JP2000121322A (ja) レーザ測長器
JP3122697B2 (ja) 偏光面検出器
JPH0454405A (ja) 光学式変位計
JP3704373B2 (ja) 焦点検出装置