JP4204112B2 - 光干渉計の干渉位相検出方式 - Google Patents

光干渉計の干渉位相検出方式 Download PDF

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Publication number
JP4204112B2
JP4204112B2 JP28974398A JP28974398A JP4204112B2 JP 4204112 B2 JP4204112 B2 JP 4204112B2 JP 28974398 A JP28974398 A JP 28974398A JP 28974398 A JP28974398 A JP 28974398A JP 4204112 B2 JP4204112 B2 JP 4204112B2
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JP
Japan
Prior art keywords
pixel
measurement
phase
measurement point
signal
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Expired - Fee Related
Application number
JP28974398A
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English (en)
Japanese (ja)
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JP2000121318A (ja
JP2000121318A5 (enExample
Inventor
常雄 山羽
英男 石森
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Priority to JP28974398A priority Critical patent/JP4204112B2/ja
Priority to US09/414,498 priority patent/US6628402B1/en
Publication of JP2000121318A publication Critical patent/JP2000121318A/ja
Publication of JP2000121318A5 publication Critical patent/JP2000121318A5/ja
Application granted granted Critical
Publication of JP4204112B2 publication Critical patent/JP4204112B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP28974398A 1998-10-12 1998-10-12 光干渉計の干渉位相検出方式 Expired - Fee Related JP4204112B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP28974398A JP4204112B2 (ja) 1998-10-12 1998-10-12 光干渉計の干渉位相検出方式
US09/414,498 US6628402B1 (en) 1998-10-12 1999-10-08 Phase interference detecting method and system in interferometer, and light detector therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28974398A JP4204112B2 (ja) 1998-10-12 1998-10-12 光干渉計の干渉位相検出方式

Publications (3)

Publication Number Publication Date
JP2000121318A JP2000121318A (ja) 2000-04-28
JP2000121318A5 JP2000121318A5 (enExample) 2005-10-06
JP4204112B2 true JP4204112B2 (ja) 2009-01-07

Family

ID=17747194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28974398A Expired - Fee Related JP4204112B2 (ja) 1998-10-12 1998-10-12 光干渉計の干渉位相検出方式

Country Status (2)

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US (1) US6628402B1 (enExample)
JP (1) JP4204112B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI118548B (fi) * 2002-09-30 2007-12-14 Noveltech Solutions Ltd Fotoakustinen detektori
JP4673770B2 (ja) * 2006-03-03 2011-04-20 株式会社日立ハイテクノロジーズ 光ヘテロダイン干渉測定方法およびその測定装置
JP2008014935A (ja) * 2006-06-05 2008-01-24 Hitachi High-Technologies Corp 表面検査装置及びその方法
US7970199B2 (en) 2006-06-05 2011-06-28 Hitachi High-Technologies Corporation Method and apparatus for detecting defect on a surface of a specimen
CN102944176B (zh) * 2012-11-09 2015-06-17 清华大学 一种外差光栅干涉仪位移测量系统
CN104581142B (zh) * 2015-01-12 2017-07-14 中国科学院空间科学与应用研究中心 一种ccd像素位置偏差测量装置
JP6775196B2 (ja) * 2016-03-14 2020-10-28 パナソニックＩｐマネジメント株式会社 光検出装置
KR20180124489A (ko) * 2017-05-12 2018-11-21 휴멘 주식회사 광간섭 측정 장치
US10386171B1 (en) * 2018-04-04 2019-08-20 United States Of America, As Represented By The Secretary Of The Army Apparatus for a dynamic multi-axis heterodyne interferometric vibrometer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6008901A (en) * 1997-08-22 1999-12-28 Canon Kabushiki Kaisha Shape measuring heterodyne interferometer with multiplexed photodetector aaray or inclined probe head

Also Published As

Publication number Publication date
US6628402B1 (en) 2003-09-30
JP2000121318A (ja) 2000-04-28

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