JP2000117636A - 研磨方法及び研磨システム - Google Patents

研磨方法及び研磨システム

Info

Publication number
JP2000117636A
JP2000117636A JP29342798A JP29342798A JP2000117636A JP 2000117636 A JP2000117636 A JP 2000117636A JP 29342798 A JP29342798 A JP 29342798A JP 29342798 A JP29342798 A JP 29342798A JP 2000117636 A JP2000117636 A JP 2000117636A
Authority
JP
Japan
Prior art keywords
polishing
slurry
polishing slurry
concentration
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29342798A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000117636A5 (enExample
Inventor
Yoshiaki Yamade
善章 山出
Yoshitaka Morioka
善隆 森岡
Motoyuki Obara
基之 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP29342798A priority Critical patent/JP2000117636A/ja
Publication of JP2000117636A publication Critical patent/JP2000117636A/ja
Publication of JP2000117636A5 publication Critical patent/JP2000117636A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP29342798A 1998-10-15 1998-10-15 研磨方法及び研磨システム Pending JP2000117636A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29342798A JP2000117636A (ja) 1998-10-15 1998-10-15 研磨方法及び研磨システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29342798A JP2000117636A (ja) 1998-10-15 1998-10-15 研磨方法及び研磨システム

Publications (2)

Publication Number Publication Date
JP2000117636A true JP2000117636A (ja) 2000-04-25
JP2000117636A5 JP2000117636A5 (enExample) 2005-09-15

Family

ID=17794628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29342798A Pending JP2000117636A (ja) 1998-10-15 1998-10-15 研磨方法及び研磨システム

Country Status (1)

Country Link
JP (1) JP2000117636A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003170034A (ja) * 2001-12-05 2003-06-17 Fujitsu Ltd 薬液供給装置及びスラリーの調合方法
US7258598B2 (en) 2000-11-29 2007-08-21 Renesas Technology Corp. Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device
JP2009528162A (ja) * 2006-03-03 2009-08-06 エアー・リキッド・エレクトロニクス・ユー．エス．・エルピー 液体ディスペンスシステム
JP2011502054A (ja) * 2007-10-30 2011-01-20 ポール・コーポレーション 使用済み研磨スラリーを処理するための方法
US8297830B2 (en) 2009-03-04 2012-10-30 Taiwan Semiconductor Manufacturing Co., Ltd. Slurry system for semiconductor fabrication

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7258598B2 (en) 2000-11-29 2007-08-21 Renesas Technology Corp. Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device
US7465216B2 (en) 2000-11-29 2008-12-16 Renesas Technology Corp. Polishing apparatus
US7465221B2 (en) 2000-11-29 2008-12-16 Renesas Technology Corp. Polishing apparatus
JP2003170034A (ja) * 2001-12-05 2003-06-17 Fujitsu Ltd 薬液供給装置及びスラリーの調合方法
JP2009528162A (ja) * 2006-03-03 2009-08-06 エアー・リキッド・エレクトロニクス・ユー．エス．・エルピー 液体ディスペンスシステム
JP2011502054A (ja) * 2007-10-30 2011-01-20 ポール・コーポレーション 使用済み研磨スラリーを処理するための方法
US8940174B2 (en) 2007-10-30 2015-01-27 Pall Corporation Method for treating spent abrasive slurry
US8297830B2 (en) 2009-03-04 2012-10-30 Taiwan Semiconductor Manufacturing Co., Ltd. Slurry system for semiconductor fabrication
TWI382465B (zh) * 2009-03-04 2013-01-11 台灣積體電路製造股份有限公司 研磨液供給系統、使用者可調量測槽及將研磨液混合物供給至化學機械研磨站之方法
US8517802B2 (en) 2009-03-04 2013-08-27 Taiwan Semiconductor Manufacturing Co., Ltd. Slurry system for semiconductor fabrication

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