JP2000097841A5 - - Google Patents

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Publication number
JP2000097841A5
JP2000097841A5 JP1999234586A JP23458699A JP2000097841A5 JP 2000097841 A5 JP2000097841 A5 JP 2000097841A5 JP 1999234586 A JP1999234586 A JP 1999234586A JP 23458699 A JP23458699 A JP 23458699A JP 2000097841 A5 JP2000097841 A5 JP 2000097841A5
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JP
Japan
Prior art keywords
light
light source
particle size
size distribution
sample
Prior art date
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Application number
JP1999234586A
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English (en)
Japanese (ja)
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JP4605838B2 (ja
JP2000097841A (ja
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Publication date
Priority claimed from GBGB9818351.0A external-priority patent/GB9818351D0/en
Application filed filed Critical
Publication of JP2000097841A publication Critical patent/JP2000097841A/ja
Publication of JP2000097841A5 publication Critical patent/JP2000097841A5/ja
Application granted granted Critical
Publication of JP4605838B2 publication Critical patent/JP4605838B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP23458699A 1998-08-22 1999-08-20 粒子サイズの分布を測定するための装置及び方法 Expired - Lifetime JP4605838B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9818351.0A GB9818351D0 (en) 1998-08-22 1998-08-22 Improvements relating to the measurement of particle size distribution
GB9818351.0 1998-08-22

Publications (3)

Publication Number Publication Date
JP2000097841A JP2000097841A (ja) 2000-04-07
JP2000097841A5 true JP2000097841A5 (enExample) 2006-10-05
JP4605838B2 JP4605838B2 (ja) 2011-01-05

Family

ID=10837686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23458699A Expired - Lifetime JP4605838B2 (ja) 1998-08-22 1999-08-20 粒子サイズの分布を測定するための装置及び方法

Country Status (6)

Country Link
US (1) US6177994B1 (enExample)
EP (1) EP0992785B1 (enExample)
JP (1) JP4605838B2 (enExample)
AT (1) ATE252229T1 (enExample)
DE (1) DE69912061T2 (enExample)
GB (1) GB9818351D0 (enExample)

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EP1102059B1 (en) * 1999-11-18 2005-10-05 Matsushita Electric Industrial Co., Ltd. Method and apparatus for measuring a scattered light
DE10036860A1 (de) * 2000-07-28 2002-02-07 Basf Ag Verfahren und Vorrichtung zur Bestimmung von physikalischen Kollektivparametern von Partikeln in Gasen
JP3822785B2 (ja) * 2000-10-11 2006-09-20 株式会社堀場製作所 散乱式粒子径分布測定装置
JP4266075B2 (ja) * 2001-02-19 2009-05-20 株式会社堀場製作所 粒径分布測定装置
JP4535697B2 (ja) * 2003-07-23 2010-09-01 オリンパス株式会社 生体組織の光散乱観測内視鏡装置
GB0323055D0 (en) * 2003-10-02 2003-11-05 Unidata Europ Ltd Particulate detector
US10620105B2 (en) * 2004-03-06 2020-04-14 Michael Trainer Methods and apparatus for determining characteristics of particles from scattered light
US8634072B2 (en) * 2004-03-06 2014-01-21 Michael Trainer Methods and apparatus for determining characteristics of particles
US9297737B2 (en) * 2004-03-06 2016-03-29 Michael Trainer Methods and apparatus for determining characteristics of particles
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
US20080144036A1 (en) * 2006-12-19 2008-06-19 Asml Netherlands B.V. Method of measurement, an inspection apparatus and a lithographic apparatus
JP2006275998A (ja) * 2005-03-02 2006-10-12 Kyoto Univ 光散乱測定装置
US20080204716A1 (en) * 2005-03-07 2008-08-28 Michael Trainer Methods and apparatus for determining characteristics of particles
US7616311B2 (en) 2005-05-02 2009-11-10 Jmar Llc Systems and methods for a multiple angle light scattering (MALS) instrument having two-dimensional detector array
WO2006135902A2 (en) * 2005-06-13 2006-12-21 Jmar Research, Inc. Systems and methods for a multiple angle light scattering (mals) instrument having two-dimensional dectector array
WO2007014213A2 (en) * 2005-07-25 2007-02-01 Massachusetts Institute Of Technology Tri modal spectroscopic imaging
US8557588B2 (en) * 2007-03-27 2013-10-15 Schlumberger Technology Corporation Methods and apparatus for sampling and diluting concentrated emulsions
WO2009063322A2 (en) * 2007-08-15 2009-05-22 Malvern Instruments Ltd Broad-range spectrometer
US8028918B2 (en) * 2007-10-31 2011-10-04 Symbol Technologies, Inc. Enhanced monitoring of laser output power in electro-optical readers
US8094299B2 (en) * 2008-07-24 2012-01-10 Beckman Coulter, Inc. Transducer module
US8313477B2 (en) 2010-03-05 2012-11-20 See Jackie R Device and methods for monitoring the administration of a stem cell transplant
KR20110111948A (ko) * 2010-04-06 2011-10-12 삼성전기주식회사 입자 측정장치
DE102012102363A1 (de) * 2011-08-17 2013-02-21 Technische Universität Darmstadt Verfahren und Vorrichtung zur Bestimmung der Größe eines transparenten Teilchens
CN102323193A (zh) * 2011-08-17 2012-01-18 佛山科学技术学院 一种激光散射法空气颗粒分布测量方法及装置
GB2494733A (en) * 2011-09-14 2013-03-20 Malvern Instr Ltd Measuring particle size distribution by light scattering
CN105092429A (zh) * 2014-05-13 2015-11-25 河北联合大学 双色激光磨矿粒度在线分析仪
FR3023957B1 (fr) * 2014-07-18 2016-08-12 Sagem Defense Securite Dispositif de detection de mouvement
EP3088863A1 (en) * 2015-05-01 2016-11-02 Malvern Instruments Limited Improvements relating to particle characterisation
CN108291863B (zh) 2015-10-02 2020-07-03 国家光学研究所 用于使用光散射技术进行个体颗粒尺寸测量的系统和方法
SG11201808342QA (en) * 2016-03-30 2018-10-30 Agency Science Tech & Res A system and method for fluid analysis
EP4050322B1 (en) 2016-08-04 2024-05-29 Malvern Panalytical Limited Method of characterising particles suspended in a fluid dispersant by light diffraction, processor and machine-readable, non-transient storage medium
US10918252B2 (en) 2017-07-27 2021-02-16 Neato Robotics, Inc. Dirt detection layer and laser backscatter dirt detection
DE102017220461A1 (de) * 2017-11-16 2019-05-16 Robert Bosch Gmbh Partikelsensor
KR102749855B1 (ko) * 2019-07-24 2025-01-02 삼성전자주식회사 미세먼지 측정 장치 및 방법
JP2021063779A (ja) * 2019-10-17 2021-04-22 富士電機株式会社 粒子分析装置
JP7525954B2 (ja) * 2020-11-02 2024-07-31 ティントメーター・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 比濁測定装置
DE102021108441A1 (de) 2021-04-01 2022-10-06 Schott Ag Befestigungsvorrichtung für ein temperaturstabiles, transparentes Element, sowie Partikelsensor, umfassend die Befestigungsvorrichtung
US11938586B2 (en) * 2021-08-27 2024-03-26 Taiwan Semiconductor Manufacturing Company Ltd. Slurry monitoring device, CMP system and method of in-line monitoring a slurry

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US4361403A (en) * 1978-06-26 1982-11-30 Loos Hendricus G Multiple wavelength instrument for measurement of particle size distributions
JPS58153107A (ja) * 1982-03-06 1983-09-12 Hajime Kano 粒子径・速度同時測定装置
JPS59160741A (ja) * 1983-03-03 1984-09-11 Toshiba Corp 粒径測定装置
JPS62293143A (ja) * 1986-06-12 1987-12-19 Rion Co Ltd 微粒子測定装置
JP2674128B2 (ja) * 1988-08-31 1997-11-12 株式会社島津製作所 粒度分布測定装置
JP2681829B2 (ja) * 1989-06-02 1997-11-26 住友重機械工業株式会社 雨滴粒径分布測定装置
JP3049254B2 (ja) * 1990-02-08 2000-06-05 シスメックス株式会社 ２種類の光源を備えた光学式粒子分析装置
JPH0498145A (ja) * 1990-08-16 1992-03-30 Sigma Tec:Kk 流体中の微粒子計数装置
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JPH06221989A (ja) * 1993-01-27 1994-08-12 Rion Co Ltd 光散乱式微粒子検出装置
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US5416580A (en) 1993-07-07 1995-05-16 General Signal Corporation Methods and apparatus for determining small particle size distribution utilizing multiple light beams
FR2773880B1 (fr) * 1998-01-19 2000-03-17 Cilas Dispositif pour determiner la repartition granulometrique d'un melange de particules

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