JP4605838B2 - 粒子サイズの分布を測定するための装置及び方法 - Google Patents

粒子サイズの分布を測定するための装置及び方法 Download PDF

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Publication number
JP4605838B2
JP4605838B2 JP23458699A JP23458699A JP4605838B2 JP 4605838 B2 JP4605838 B2 JP 4605838B2 JP 23458699 A JP23458699 A JP 23458699A JP 23458699 A JP23458699 A JP 23458699A JP 4605838 B2 JP4605838 B2 JP 4605838B2
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Prior art keywords
light
light source
particle size
detector
sample
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Japanese (ja)
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JP2000097841A5 (enExample
JP2000097841A (ja
Inventor
ジョン ワトソン デイヴィッド
パトリック アシュレイ カタラル クリーヴ
エドワード ステファンソン ダンカン
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Malvern Panalytical Ltd
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Malvern Instruments Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N2021/0389—Windows

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  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP23458699A 1998-08-22 1999-08-20 粒子サイズの分布を測定するための装置及び方法 Expired - Lifetime JP4605838B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9818351.0A GB9818351D0 (en) 1998-08-22 1998-08-22 Improvements relating to the measurement of particle size distribution
GB9818351.0 1998-08-22

Publications (3)

Publication Number Publication Date
JP2000097841A JP2000097841A (ja) 2000-04-07
JP2000097841A5 JP2000097841A5 (enExample) 2006-10-05
JP4605838B2 true JP4605838B2 (ja) 2011-01-05

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ID=10837686

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Application Number Title Priority Date Filing Date
JP23458699A Expired - Lifetime JP4605838B2 (ja) 1998-08-22 1999-08-20 粒子サイズの分布を測定するための装置及び方法

Country Status (6)

Country Link
US (1) US6177994B1 (enExample)
EP (1) EP0992785B1 (enExample)
JP (1) JP4605838B2 (enExample)
AT (1) ATE252229T1 (enExample)
DE (1) DE69912061T2 (enExample)
GB (1) GB9818351D0 (enExample)

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JP3822785B2 (ja) * 2000-10-11 2006-09-20 株式会社堀場製作所 散乱式粒子径分布測定装置
JP4266075B2 (ja) * 2001-02-19 2009-05-20 株式会社堀場製作所 粒径分布測定装置
JP4535697B2 (ja) * 2003-07-23 2010-09-01 オリンパス株式会社 生体組織の光散乱観測内視鏡装置
GB0323055D0 (en) * 2003-10-02 2003-11-05 Unidata Europ Ltd Particulate detector
US10620105B2 (en) * 2004-03-06 2020-04-14 Michael Trainer Methods and apparatus for determining characteristics of particles from scattered light
US8634072B2 (en) * 2004-03-06 2014-01-21 Michael Trainer Methods and apparatus for determining characteristics of particles
US9297737B2 (en) * 2004-03-06 2016-03-29 Michael Trainer Methods and apparatus for determining characteristics of particles
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
US20080144036A1 (en) * 2006-12-19 2008-06-19 Asml Netherlands B.V. Method of measurement, an inspection apparatus and a lithographic apparatus
JP2006275998A (ja) * 2005-03-02 2006-10-12 Kyoto Univ 光散乱測定装置
US20080204716A1 (en) * 2005-03-07 2008-08-28 Michael Trainer Methods and apparatus for determining characteristics of particles
US7616311B2 (en) 2005-05-02 2009-11-10 Jmar Llc Systems and methods for a multiple angle light scattering (MALS) instrument having two-dimensional detector array
WO2006135902A2 (en) * 2005-06-13 2006-12-21 Jmar Research, Inc. Systems and methods for a multiple angle light scattering (mals) instrument having two-dimensional dectector array
WO2007014213A2 (en) * 2005-07-25 2007-02-01 Massachusetts Institute Of Technology Tri modal spectroscopic imaging
US8557588B2 (en) * 2007-03-27 2013-10-15 Schlumberger Technology Corporation Methods and apparatus for sampling and diluting concentrated emulsions
WO2009063322A2 (en) * 2007-08-15 2009-05-22 Malvern Instruments Ltd Broad-range spectrometer
US8028918B2 (en) * 2007-10-31 2011-10-04 Symbol Technologies, Inc. Enhanced monitoring of laser output power in electro-optical readers
US8094299B2 (en) * 2008-07-24 2012-01-10 Beckman Coulter, Inc. Transducer module
US8313477B2 (en) 2010-03-05 2012-11-20 See Jackie R Device and methods for monitoring the administration of a stem cell transplant
KR20110111948A (ko) * 2010-04-06 2011-10-12 삼성전기주식회사 입자 측정장치
DE102012102363A1 (de) * 2011-08-17 2013-02-21 Technische Universität Darmstadt Verfahren und Vorrichtung zur Bestimmung der Größe eines transparenten Teilchens
CN102323193A (zh) * 2011-08-17 2012-01-18 佛山科学技术学院 一种激光散射法空气颗粒分布测量方法及装置
GB2494733A (en) * 2011-09-14 2013-03-20 Malvern Instr Ltd Measuring particle size distribution by light scattering
CN105092429A (zh) * 2014-05-13 2015-11-25 河北联合大学 双色激光磨矿粒度在线分析仪
FR3023957B1 (fr) * 2014-07-18 2016-08-12 Sagem Defense Securite Dispositif de detection de mouvement
EP3088863A1 (en) * 2015-05-01 2016-11-02 Malvern Instruments Limited Improvements relating to particle characterisation
CN108291863B (zh) 2015-10-02 2020-07-03 国家光学研究所 用于使用光散射技术进行个体颗粒尺寸测量的系统和方法
SG11201808342QA (en) * 2016-03-30 2018-10-30 Agency Science Tech & Res A system and method for fluid analysis
EP4050322B1 (en) 2016-08-04 2024-05-29 Malvern Panalytical Limited Method of characterising particles suspended in a fluid dispersant by light diffraction, processor and machine-readable, non-transient storage medium
US10918252B2 (en) 2017-07-27 2021-02-16 Neato Robotics, Inc. Dirt detection layer and laser backscatter dirt detection
DE102017220461A1 (de) * 2017-11-16 2019-05-16 Robert Bosch Gmbh Partikelsensor
KR102749855B1 (ko) * 2019-07-24 2025-01-02 삼성전자주식회사 미세먼지 측정 장치 및 방법
JP2021063779A (ja) * 2019-10-17 2021-04-22 富士電機株式会社 粒子分析装置
JP7525954B2 (ja) * 2020-11-02 2024-07-31 ティントメーター・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 比濁測定装置
DE102021108441A1 (de) 2021-04-01 2022-10-06 Schott Ag Befestigungsvorrichtung für ein temperaturstabiles, transparentes Element, sowie Partikelsensor, umfassend die Befestigungsvorrichtung
US11938586B2 (en) * 2021-08-27 2024-03-26 Taiwan Semiconductor Manufacturing Company Ltd. Slurry monitoring device, CMP system and method of in-line monitoring a slurry

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US4361403A (en) * 1978-06-26 1982-11-30 Loos Hendricus G Multiple wavelength instrument for measurement of particle size distributions
JPS58153107A (ja) * 1982-03-06 1983-09-12 Hajime Kano 粒子径・速度同時測定装置
JPS59160741A (ja) * 1983-03-03 1984-09-11 Toshiba Corp 粒径測定装置
JPS62293143A (ja) * 1986-06-12 1987-12-19 Rion Co Ltd 微粒子測定装置
JP2674128B2 (ja) * 1988-08-31 1997-11-12 株式会社島津製作所 粒度分布測定装置
JP2681829B2 (ja) * 1989-06-02 1997-11-26 住友重機械工業株式会社 雨滴粒径分布測定装置
JP3049254B2 (ja) * 1990-02-08 2000-06-05 シスメックス株式会社 ２種類の光源を備えた光学式粒子分析装置
JPH0498145A (ja) * 1990-08-16 1992-03-30 Sigma Tec:Kk 流体中の微粒子計数装置
DE69129260T2 (de) 1990-11-03 1998-11-19 Horiba Ltd Gerät zur Messung der Teilchengrössenverteilung
JP2876253B2 (ja) * 1990-11-03 1999-03-31 株式会社堀場製作所 粒度分布測定装置
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JPH06221989A (ja) * 1993-01-27 1994-08-12 Rion Co Ltd 光散乱式微粒子検出装置
US5576697A (en) * 1993-04-30 1996-11-19 Hochiki Kabushiki Kaisha Fire alarm system
US5416580A (en) 1993-07-07 1995-05-16 General Signal Corporation Methods and apparatus for determining small particle size distribution utilizing multiple light beams
FR2773880B1 (fr) * 1998-01-19 2000-03-17 Cilas Dispositif pour determiner la repartition granulometrique d'un melange de particules

Also Published As

Publication number Publication date
EP0992785A3 (en) 2001-11-21
GB9818351D0 (en) 1998-10-14
DE69912061T2 (de) 2004-07-08
US6177994B1 (en) 2001-01-23
EP0992785B1 (en) 2003-10-15
DE69912061D1 (de) 2003-11-20
ATE252229T1 (de) 2003-11-15
EP0992785A2 (en) 2000-04-12
JP2000097841A (ja) 2000-04-07

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