DE69912061T2 - Verbesserungen bezüglich der Messung einer Teilchengrössenverteilung - Google Patents
Verbesserungen bezüglich der Messung einer Teilchengrössenverteilung Download PDFInfo
- Publication number
- DE69912061T2 DE69912061T2 DE69912061T DE69912061T DE69912061T2 DE 69912061 T2 DE69912061 T2 DE 69912061T2 DE 69912061 T DE69912061 T DE 69912061T DE 69912061 T DE69912061 T DE 69912061T DE 69912061 T2 DE69912061 T2 DE 69912061T2
- Authority
- DE
- Germany
- Prior art keywords
- light
- detector
- light source
- sample
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 title claims abstract description 81
- 238000009826 distribution Methods 0.000 title claims description 15
- 230000006872 improvement Effects 0.000 title description 5
- 238000005259 measurement Methods 0.000 claims abstract description 42
- 238000001514 detection method Methods 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- 238000004364 calculation method Methods 0.000 claims description 9
- 230000000087 stabilizing effect Effects 0.000 claims description 5
- 238000007415 particle size distribution analysis Methods 0.000 abstract 1
- 210000004027 cell Anatomy 0.000 description 58
- 230000005540 biological transmission Effects 0.000 description 31
- 238000012545 processing Methods 0.000 description 13
- 230000008033 biological extinction Effects 0.000 description 12
- 230000000694 effects Effects 0.000 description 10
- 230000008901 benefit Effects 0.000 description 9
- 238000013459 approach Methods 0.000 description 8
- 238000012544 monitoring process Methods 0.000 description 8
- 238000012937 correction Methods 0.000 description 7
- 238000002474 experimental method Methods 0.000 description 7
- 239000003381 stabilizer Substances 0.000 description 7
- 230000010354 integration Effects 0.000 description 6
- 238000002310 reflectometry Methods 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 5
- 210000002421 cell wall Anatomy 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000000149 argon plasma sintering Methods 0.000 description 3
- 230000006399 behavior Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 241001025261 Neoraja caerulea Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- -1 tungsten halogen Chemical class 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
- G01N15/0211—Investigating a scatter or diffraction pattern
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N2021/0389—Windows
Landscapes
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Dispersion Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB9818351.0A GB9818351D0 (en) | 1998-08-22 | 1998-08-22 | Improvements relating to the measurement of particle size distribution |
| GB9818351 | 1998-08-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69912061D1 DE69912061D1 (de) | 2003-11-20 |
| DE69912061T2 true DE69912061T2 (de) | 2004-07-08 |
Family
ID=10837686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69912061T Expired - Lifetime DE69912061T2 (de) | 1998-08-22 | 1999-08-23 | Verbesserungen bezüglich der Messung einer Teilchengrössenverteilung |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6177994B1 (enExample) |
| EP (1) | EP0992785B1 (enExample) |
| JP (1) | JP4605838B2 (enExample) |
| AT (1) | ATE252229T1 (enExample) |
| DE (1) | DE69912061T2 (enExample) |
| GB (1) | GB9818351D0 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102021108441A1 (de) | 2021-04-01 | 2022-10-06 | Schott Ag | Befestigungsvorrichtung für ein temperaturstabiles, transparentes Element, sowie Partikelsensor, umfassend die Befestigungsvorrichtung |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6795183B2 (en) * | 1999-02-19 | 2004-09-21 | Metron Instruments, Inc. | Measurement systems and methods for determining component particle concentrations in a liquid |
| EP1102059B1 (en) * | 1999-11-18 | 2005-10-05 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for measuring a scattered light |
| DE10036860A1 (de) * | 2000-07-28 | 2002-02-07 | Basf Ag | Verfahren und Vorrichtung zur Bestimmung von physikalischen Kollektivparametern von Partikeln in Gasen |
| JP3822785B2 (ja) * | 2000-10-11 | 2006-09-20 | 株式会社堀場製作所 | 散乱式粒子径分布測定装置 |
| JP4266075B2 (ja) * | 2001-02-19 | 2009-05-20 | 株式会社堀場製作所 | 粒径分布測定装置 |
| JP4535697B2 (ja) * | 2003-07-23 | 2010-09-01 | オリンパス株式会社 | 生体組織の光散乱観測内視鏡装置 |
| GB0323055D0 (en) * | 2003-10-02 | 2003-11-05 | Unidata Europ Ltd | Particulate detector |
| US8634072B2 (en) * | 2004-03-06 | 2014-01-21 | Michael Trainer | Methods and apparatus for determining characteristics of particles |
| US20080208511A1 (en) * | 2005-03-07 | 2008-08-28 | Michael Trainer | Methods and apparatus for determining characteristics of particles |
| US10620105B2 (en) * | 2004-03-06 | 2020-04-14 | Michael Trainer | Methods and apparatus for determining characteristics of particles from scattered light |
| US9297737B2 (en) * | 2004-03-06 | 2016-03-29 | Michael Trainer | Methods and apparatus for determining characteristics of particles |
| US20080144036A1 (en) | 2006-12-19 | 2008-06-19 | Asml Netherlands B.V. | Method of measurement, an inspection apparatus and a lithographic apparatus |
| US7791727B2 (en) * | 2004-08-16 | 2010-09-07 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
| JP2006275998A (ja) * | 2005-03-02 | 2006-10-12 | Kyoto Univ | 光散乱測定装置 |
| US7616311B2 (en) | 2005-05-02 | 2009-11-10 | Jmar Llc | Systems and methods for a multiple angle light scattering (MALS) instrument having two-dimensional detector array |
| EP1904807A4 (en) * | 2005-06-13 | 2011-04-20 | Jmar Res Inc | SYSTEMS AND METHODS FOR MULTIPLE-ANGLE LIGHT DISTRIBUTED INSTRUMENT (MALS) HAVING TWO-DIMENSIONAL DETECTOR NETWORK |
| US20070167835A1 (en) * | 2005-07-25 | 2007-07-19 | Massachusetts Institute Of Technology | Tri modal spectroscopic imaging |
| US8557588B2 (en) * | 2007-03-27 | 2013-10-15 | Schlumberger Technology Corporation | Methods and apparatus for sampling and diluting concentrated emulsions |
| WO2009063322A2 (en) * | 2007-08-15 | 2009-05-22 | Malvern Instruments Ltd | Broad-range spectrometer |
| US8028918B2 (en) * | 2007-10-31 | 2011-10-04 | Symbol Technologies, Inc. | Enhanced monitoring of laser output power in electro-optical readers |
| US8094299B2 (en) * | 2008-07-24 | 2012-01-10 | Beckman Coulter, Inc. | Transducer module |
| US8313477B2 (en) | 2010-03-05 | 2012-11-20 | See Jackie R | Device and methods for monitoring the administration of a stem cell transplant |
| KR20110111948A (ko) * | 2010-04-06 | 2011-10-12 | 삼성전기주식회사 | 입자 측정장치 |
| DE102012102363A1 (de) * | 2011-08-17 | 2013-02-21 | Technische Universität Darmstadt | Verfahren und Vorrichtung zur Bestimmung der Größe eines transparenten Teilchens |
| CN102323193A (zh) * | 2011-08-17 | 2012-01-18 | 佛山科学技术学院 | 一种激光散射法空气颗粒分布测量方法及装置 |
| GB2494733A (en) | 2011-09-14 | 2013-03-20 | Malvern Instr Ltd | Measuring particle size distribution by light scattering |
| CN105092429A (zh) * | 2014-05-13 | 2015-11-25 | 河北联合大学 | 双色激光磨矿粒度在线分析仪 |
| FR3023957B1 (fr) * | 2014-07-18 | 2016-08-12 | Sagem Defense Securite | Dispositif de detection de mouvement |
| EP3088863A1 (en) * | 2015-05-01 | 2016-11-02 | Malvern Instruments Limited | Improvements relating to particle characterisation |
| CN108291863B (zh) | 2015-10-02 | 2020-07-03 | 国家光学研究所 | 用于使用光散射技术进行个体颗粒尺寸测量的系统和方法 |
| US20190120760A1 (en) * | 2016-03-30 | 2019-04-25 | Agency For Science, Technology And Research | A system and method for fluid analysis |
| EP3279635B1 (en) * | 2016-08-04 | 2022-06-01 | Malvern Panalytical Limited | Method, processor and machine-readable, non-transient storage medium for characterising particles suspended in a fluid dispersant |
| US10918252B2 (en) | 2017-07-27 | 2021-02-16 | Neato Robotics, Inc. | Dirt detection layer and laser backscatter dirt detection |
| DE102017220461A1 (de) * | 2017-11-16 | 2019-05-16 | Robert Bosch Gmbh | Partikelsensor |
| KR102749855B1 (ko) * | 2019-07-24 | 2025-01-02 | 삼성전자주식회사 | 미세먼지 측정 장치 및 방법 |
| JP2021063779A (ja) * | 2019-10-17 | 2021-04-22 | 富士電機株式会社 | 粒子分析装置 |
| EP4237819A4 (en) * | 2020-11-02 | 2024-07-24 | Tintometer GmbH | Nephelometric measuring device(s) |
| US11938586B2 (en) * | 2021-08-27 | 2024-03-26 | Taiwan Semiconductor Manufacturing Company Ltd. | Slurry monitoring device, CMP system and method of in-line monitoring a slurry |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3553462A (en) | 1969-12-31 | 1971-01-05 | Exotech | Apparatus for determining the radiation scattering properties of a fluid(and by ex.) |
| US4361403A (en) * | 1978-06-26 | 1982-11-30 | Loos Hendricus G | Multiple wavelength instrument for measurement of particle size distributions |
| JPS58153107A (ja) * | 1982-03-06 | 1983-09-12 | Hajime Kano | 粒子径・速度同時測定装置 |
| JPS59160741A (ja) * | 1983-03-03 | 1984-09-11 | Toshiba Corp | 粒径測定装置 |
| JPS62293143A (ja) * | 1986-06-12 | 1987-12-19 | Rion Co Ltd | 微粒子測定装置 |
| JP2674128B2 (ja) * | 1988-08-31 | 1997-11-12 | 株式会社島津製作所 | 粒度分布測定装置 |
| JP2681829B2 (ja) * | 1989-06-02 | 1997-11-26 | 住友重機械工業株式会社 | 雨滴粒径分布測定装置 |
| JP3049254B2 (ja) * | 1990-02-08 | 2000-06-05 | シスメックス株式会社 | ２種類の光源を備えた光学式粒子分析装置 |
| JPH0498145A (ja) * | 1990-08-16 | 1992-03-30 | Sigma Tec:Kk | 流体中の微粒子計数装置 |
| DE69129260T2 (de) | 1990-11-03 | 1998-11-19 | Horiba Ltd | Gerät zur Messung der Teilchengrössenverteilung |
| JP2876253B2 (ja) * | 1990-11-03 | 1999-03-31 | 株式会社堀場製作所 | 粒度分布測定装置 |
| FR2688308B1 (fr) | 1992-03-04 | 1994-05-27 | Cilas | Granulometre a laser. |
| JPH06221989A (ja) * | 1993-01-27 | 1994-08-12 | Rion Co Ltd | 光散乱式微粒子検出装置 |
| US5576697A (en) * | 1993-04-30 | 1996-11-19 | Hochiki Kabushiki Kaisha | Fire alarm system |
| US5416580A (en) | 1993-07-07 | 1995-05-16 | General Signal Corporation | Methods and apparatus for determining small particle size distribution utilizing multiple light beams |
| FR2773880B1 (fr) * | 1998-01-19 | 2000-03-17 | Cilas | Dispositif pour determiner la repartition granulometrique d'un melange de particules |
-
1998
- 1998-08-22 GB GBGB9818351.0A patent/GB9818351D0/en not_active Ceased
-
1999
- 1999-08-20 US US09/378,338 patent/US6177994B1/en not_active Expired - Lifetime
- 1999-08-20 JP JP23458699A patent/JP4605838B2/ja not_active Expired - Lifetime
- 1999-08-23 AT AT99306656T patent/ATE252229T1/de not_active IP Right Cessation
- 1999-08-23 DE DE69912061T patent/DE69912061T2/de not_active Expired - Lifetime
- 1999-08-23 EP EP99306656A patent/EP0992785B1/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102021108441A1 (de) | 2021-04-01 | 2022-10-06 | Schott Ag | Befestigungsvorrichtung für ein temperaturstabiles, transparentes Element, sowie Partikelsensor, umfassend die Befestigungsvorrichtung |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0992785A3 (en) | 2001-11-21 |
| JP4605838B2 (ja) | 2011-01-05 |
| EP0992785A2 (en) | 2000-04-12 |
| US6177994B1 (en) | 2001-01-23 |
| JP2000097841A (ja) | 2000-04-07 |
| DE69912061D1 (de) | 2003-11-20 |
| GB9818351D0 (en) | 1998-10-14 |
| ATE252229T1 (de) | 2003-11-15 |
| EP0992785B1 (en) | 2003-10-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |