JP2000048954A - 有機電界発光素子の製造方法 - Google Patents

有機電界発光素子の製造方法

Info

Publication number
JP2000048954A
JP2000048954A JP10215901A JP21590198A JP2000048954A JP 2000048954 A JP2000048954 A JP 2000048954A JP 10215901 A JP10215901 A JP 10215901A JP 21590198 A JP21590198 A JP 21590198A JP 2000048954 A JP2000048954 A JP 2000048954A
Authority
JP
Japan
Prior art keywords
electrode
light emitting
shadow mask
patterning
emitting layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10215901A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000048954A5 (https=
Inventor
Shigeo Fujimori
茂雄 藤森
Yoshio Himeshima
義夫 姫島
Toru Kohama
亨 小濱
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP10215901A priority Critical patent/JP2000048954A/ja
Publication of JP2000048954A publication Critical patent/JP2000048954A/ja
Publication of JP2000048954A5 publication Critical patent/JP2000048954A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP10215901A 1998-07-30 1998-07-30 有機電界発光素子の製造方法 Pending JP2000048954A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10215901A JP2000048954A (ja) 1998-07-30 1998-07-30 有機電界発光素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10215901A JP2000048954A (ja) 1998-07-30 1998-07-30 有機電界発光素子の製造方法

Publications (2)

Publication Number Publication Date
JP2000048954A true JP2000048954A (ja) 2000-02-18
JP2000048954A5 JP2000048954A5 (https=) 2005-10-27

Family

ID=16680138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10215901A Pending JP2000048954A (ja) 1998-07-30 1998-07-30 有機電界発光素子の製造方法

Country Status (1)

Country Link
JP (1) JP2000048954A (https=)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100350538B1 (ko) * 2000-06-23 2002-08-28 삼성에스디아이 주식회사 유기 전계 발광소자 제작용 증착 장치 및 이를 이용한유기 전계 발광소자의 증착 방법
EP1426461A1 (en) 2002-11-29 2004-06-09 Samsung NEC Mobile Display Co. Ltd. Mask for coating by vacuum evaporation
JP2004349049A (ja) * 2003-05-21 2004-12-09 Tohoku Pioneer Corp 有機ｅｌパネル及びその製造方法
US7285906B2 (en) 2003-03-19 2007-10-23 Tohoku Pioneer Corporation Film formation mask, organic EL panel, and method of manufacturing the organic EL panel
KR100863901B1 (ko) * 2002-11-22 2008-10-16 삼성에스디아이 주식회사 증착용 마스크 프레임 조립체와 그 제조방법 및 이를이용한 유기 ｅｌ 소자의 제조방법
JP2010040529A (ja) * 2008-08-04 2010-02-18 Samsung Mobile Display Co Ltd 有機ｅｌ素子の発光層を蒸着する方法、該蒸着方法を含む有機ｅｌ素子の製造方法、及びその製造方法により製造された有機ｅｌ素子
JP2011034984A (ja) * 2010-11-16 2011-02-17 Tohoku Pioneer Corp 有機ｅｌパネル
WO2011096030A1 (ja) * 2010-02-03 2011-08-11 シャープ株式会社 蒸着マスク、蒸着装置及び蒸着方法
US9502276B2 (en) 2012-04-26 2016-11-22 Intevac, Inc. System architecture for vacuum processing
US9525099B2 (en) 2012-04-19 2016-12-20 Intevac, Inc. Dual-mask arrangement for solar cell fabrication
US9543114B2 (en) 2014-08-05 2017-01-10 Intevac, Inc. Implant masking and alignment system with rollers
US10062600B2 (en) 2012-04-26 2018-08-28 Intevac, Inc. System and method for bi-facial processing of substrates

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100350538B1 (ko) * 2000-06-23 2002-08-28 삼성에스디아이 주식회사 유기 전계 발광소자 제작용 증착 장치 및 이를 이용한유기 전계 발광소자의 증착 방법
US7537798B2 (en) 2002-11-22 2009-05-26 Samsung Mobile Display Co., Ltd. Deposition mask frame assembly, method of fabricating the same, and method of fabricating organic electroluminescent device using the deposition mask frame assembly
KR100863901B1 (ko) * 2002-11-22 2008-10-16 삼성에스디아이 주식회사 증착용 마스크 프레임 조립체와 그 제조방법 및 이를이용한 유기 ｅｌ 소자의 제조방법
EP1426461A1 (en) 2002-11-29 2004-06-09 Samsung NEC Mobile Display Co. Ltd. Mask for coating by vacuum evaporation
US8334649B2 (en) 2002-11-29 2012-12-18 Samsung Display Co., Ltd. Evaporation mask, method of fabricating organic electroluminescent device using the same, and organic electroluminescent device
US7837528B2 (en) 2002-11-29 2010-11-23 Samsung Mobile Display Co., Ltd. Evaporation mask, method of fabricating organic electroluminescent device using the same, and organic electroluminescent device
US7285906B2 (en) 2003-03-19 2007-10-23 Tohoku Pioneer Corporation Film formation mask, organic EL panel, and method of manufacturing the organic EL panel
KR101110910B1 (ko) * 2003-05-21 2012-02-20 도호꾸 파이오니어 가부시끼가이샤 유기 ｅｌ 패널 및 그 제조 방법
US7439671B2 (en) 2003-05-21 2008-10-21 Tohoku Pioneer Corporation Organic electroluminescent panel
US7264843B2 (en) 2003-05-21 2007-09-04 Tohoku Pioneer Corporation Organic electroluminescent panel and producing method of the same
JP2004349049A (ja) * 2003-05-21 2004-12-09 Tohoku Pioneer Corp 有機ｅｌパネル及びその製造方法
JP2010040529A (ja) * 2008-08-04 2010-02-18 Samsung Mobile Display Co Ltd 有機ｅｌ素子の発光層を蒸着する方法、該蒸着方法を含む有機ｅｌ素子の製造方法、及びその製造方法により製造された有機ｅｌ素子
WO2011096030A1 (ja) * 2010-02-03 2011-08-11 シャープ株式会社 蒸着マスク、蒸着装置及び蒸着方法
US8691016B2 (en) 2010-02-03 2014-04-08 Sharp Kabushiki Kaisha Deposition apparatus, and deposition method
JP2011034984A (ja) * 2010-11-16 2011-02-17 Tohoku Pioneer Corp 有機ｅｌパネル
US9525099B2 (en) 2012-04-19 2016-12-20 Intevac, Inc. Dual-mask arrangement for solar cell fabrication
US9502276B2 (en) 2012-04-26 2016-11-22 Intevac, Inc. System architecture for vacuum processing
US10062600B2 (en) 2012-04-26 2018-08-28 Intevac, Inc. System and method for bi-facial processing of substrates
US9543114B2 (en) 2014-08-05 2017-01-10 Intevac, Inc. Implant masking and alignment system with rollers

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