JP1639760S - 基板保持リング用部品 - Google Patents
基板保持リング用部品Info
- Publication number
- JP1639760S JP1639760S JP2018025736F JP2018025736F JP1639760S JP 1639760 S JP1639760 S JP 1639760S JP 2018025736 F JP2018025736 F JP 2018025736F JP 2018025736 F JP2018025736 F JP 2018025736F JP 1639760 S JP1639760 S JP 1639760S
- Authority
- JP
- Japan
- Prior art keywords
- retaining ring
- ring parts
- substrate retaining
- substrate
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000005498 polishing Methods 0.000 abstract 1
Abstract
本物品は、ウエハ等の基板の面を研磨するために用いる基板研磨装置に用いられる基板保持リング用部品であり、使用状態を示す参考図に示すとおり、基板保持リングの外周に取り付けて用いられる。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018025736F JP1639760S (ja) | 2018-11-27 | 2018-11-27 | 基板保持リング用部品 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018025736F JP1639760S (ja) | 2018-11-27 | 2018-11-27 | 基板保持リング用部品 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1639760S true JP1639760S (ja) | 2019-08-26 |
Family
ID=82750116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018025736F Active JP1639760S (ja) | 2018-11-27 | 2018-11-27 | 基板保持リング用部品 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1639760S (ja) |
-
2018
- 2018-11-27 JP JP2018025736F patent/JP1639760S/ja active Active
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