IT8823017A0 - Procedimento e dispositivo per il tiraggio di monocristalli - Google Patents

Procedimento e dispositivo per il tiraggio di monocristalli

Info

Publication number
IT8823017A0
IT8823017A0 IT8823017A IT2301788A IT8823017A0 IT 8823017 A0 IT8823017 A0 IT 8823017A0 IT 8823017 A IT8823017 A IT 8823017A IT 2301788 A IT2301788 A IT 2301788A IT 8823017 A0 IT8823017 A0 IT 8823017A0
Authority
IT
Italy
Prior art keywords
procedure
single crystals
crystals
Prior art date
Application number
IT8823017A
Other languages
English (en)
Inventor
Dieter Drechsel
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Ag filed Critical Leybold Ag
Publication of IT8823017A0 publication Critical patent/IT8823017A0/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D9/00—Level control, e.g. controlling quantity of material stored in vessel
    • G05D9/12—Level control, e.g. controlling quantity of material stored in vessel characterised by the use of electric means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
IT8823017A 1988-03-03 1988-12-20 Procedimento e dispositivo per il tiraggio di monocristalli IT8823017A0 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3806917 1988-03-03

Publications (1)

Publication Number Publication Date
IT8823017A0 true IT8823017A0 (it) 1988-12-20

Family

ID=6348748

Family Applications (2)

Application Number Title Priority Date Filing Date
IT8823017A IT8823017A0 (it) 1988-03-03 1988-12-20 Procedimento e dispositivo per il tiraggio di monocristalli
IT8919640A IT1229561B (it) 1988-03-03 1989-03-03 Procedimento e dispositivo per il tiraggio di monocristalli.

Family Applications After (1)

Application Number Title Priority Date Filing Date
IT8919640A IT1229561B (it) 1988-03-03 1989-03-03 Procedimento e dispositivo per il tiraggio di monocristalli.

Country Status (4)

Country Link
JP (1) JP2740239B2 (it)
DE (1) DE3904858C2 (it)
FI (1) FI87660C (it)
IT (2) IT8823017A0 (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2662803B1 (fr) * 1990-05-31 1992-09-04 Aerospatiale Dispositif et installation de cristallogenese pourvus de moyens d'observation.
KR100237848B1 (ko) * 1991-04-26 2000-01-15 후루노 토모스케 단결정의 인상방법
DE4123336A1 (de) * 1991-07-15 1993-01-21 Leybold Ag Kristallziehverfahren und vorrichtung zu seiner durchfuehrung
DE4301072B4 (de) * 1993-01-16 2006-08-24 Crystal Growing Systems Gmbh Verfahren zum Ziehen von Einkristallen aus einer Schmelze
DE10120730B4 (de) * 2001-04-27 2006-08-24 Schott Ag Verfahren und Vorrichtung zur Messung der Phasengrenze

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3740563A (en) * 1971-06-25 1973-06-19 Monsanto Co Electroptical system and method for sensing and controlling the diameter and melt level of pulled crystals
DE2149093C3 (de) * 1971-10-01 1975-07-24 N.V. Philips' Gloeilampenfabrieken, Eindhoven (Niederlande) Vorrichtung zur Züchtung von Einkristallen durch Ziehen aus einer Schmelze
JPS5130528Y2 (it) * 1972-03-21 1976-07-31
JPS5013862U (it) * 1973-06-04 1975-02-13
DE2337169C2 (de) * 1973-07-21 1975-06-26 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Ziehen von Einkristallstäben
BE872578A (fr) * 1978-12-06 1979-03-30 Centre Rech Metallurgique Dispositif pour controler la surface de la charge d'un four a cuve
DE2903061A1 (de) * 1979-01-26 1980-08-07 Heliotronic Gmbh Verfahren zur herstellung grosskristalliner vorzugsorientierter siliciumfolien
US4282184A (en) * 1979-10-09 1981-08-04 Siltec Corporation Continuous replenishment of molten semiconductor in a Czochralski-process, single-crystal-growing furnace
US4410494A (en) * 1981-04-13 1983-10-18 Siltec Corporation Apparatus for controlling flow of molten material between crystal growth furnaces and a replenishment crucible
US4454096A (en) * 1981-06-15 1984-06-12 Siltec Corporation Crystal growth furnace recharge
US4508970A (en) * 1982-07-15 1985-04-02 Motorola, Inc. Melt level sensing system and method
DE3407456A1 (de) * 1984-02-29 1985-09-05 Werner & Mertz Gmbh, 6500 Mainz Kombiniertes reinigungs-/bleich-mittel fuer die behandlung des spuelwassers von toilettenautomaten und dessen anwendung
CA1261715A (en) * 1984-07-06 1989-09-26 General Signal Corporation Apparatus and process for growing monocrystals of semiconductor materials from shallow crucibles by czochralski technique
JPS6153190A (ja) * 1984-08-17 1986-03-17 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 結晶ブ−ル成長方法
JPS6186493A (ja) * 1984-10-04 1986-05-01 Toshiba Mach Co Ltd 半導体結晶引上機
DD253437A1 (de) * 1986-10-22 1988-01-20 Freiberg Spurenmetalle Veb Verfahren und anordnung zur ueberwachung und regelung von kristallzuechtungsprozessen

Also Published As

Publication number Publication date
FI885595A (fi) 1989-09-04
DE3904858C2 (de) 2001-06-07
IT8919640A0 (it) 1989-03-03
JP2740239B2 (ja) 1998-04-15
IT1229561B (it) 1991-09-04
JPH01317187A (ja) 1989-12-21
FI87660C (fi) 1993-02-10
FI87660B (fi) 1992-10-30
DE3904858A1 (de) 1989-09-14
FI885595A0 (fi) 1988-12-01

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