FI87660C - Foerfarande och anordning foer dragning av monokristaller - Google Patents
Foerfarande och anordning foer dragning av monokristaller Download PDFInfo
- Publication number
- FI87660C FI87660C FI885595A FI885595A FI87660C FI 87660 C FI87660 C FI 87660C FI 885595 A FI885595 A FI 885595A FI 885595 A FI885595 A FI 885595A FI 87660 C FI87660 C FI 87660C
- Authority
- FI
- Finland
- Prior art keywords
- crucible
- melt
- post
- loading
- electrical
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 10
- 239000000155 melt Substances 0.000 claims description 42
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 8
- 230000005855 radiation Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 3
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 239000008187 granular material Substances 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 6
- 239000010439 graphite Substances 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000002609 medium Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 239000012768 molten material Substances 0.000 description 4
- 239000012526 feed medium Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 241001137251 Corvidae Species 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 235000015108 pies Nutrition 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 241000282326 Felis catus Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000011449 brick Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000008207 working material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D9/00—Level control, e.g. controlling quantity of material stored in vessel
- G05D9/12—Level control, e.g. controlling quantity of material stored in vessel characterised by the use of electric means
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3806917 | 1988-03-03 | ||
| DE3806917 | 1988-03-03 |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| FI885595A0 FI885595A0 (fi) | 1988-12-01 |
| FI885595A FI885595A (fi) | 1989-09-04 |
| FI87660B FI87660B (fi) | 1992-10-30 |
| FI87660C true FI87660C (fi) | 1993-02-10 |
Family
ID=6348748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FI885595A FI87660C (fi) | 1988-03-03 | 1988-12-01 | Foerfarande och anordning foer dragning av monokristaller |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2740239B2 (it) |
| DE (1) | DE3904858C2 (it) |
| FI (1) | FI87660C (it) |
| IT (2) | IT8823017A0 (it) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2662803B1 (fr) * | 1990-05-31 | 1992-09-04 | Aerospatiale | Dispositif et installation de cristallogenese pourvus de moyens d'observation. |
| EP0911430B1 (en) * | 1991-04-26 | 2003-04-09 | Mitsubishi Materials Corporation | Single crystal growth method |
| DE4123336A1 (de) * | 1991-07-15 | 1993-01-21 | Leybold Ag | Kristallziehverfahren und vorrichtung zu seiner durchfuehrung |
| DE4301072B4 (de) * | 1993-01-16 | 2006-08-24 | Crystal Growing Systems Gmbh | Verfahren zum Ziehen von Einkristallen aus einer Schmelze |
| DE10120730B4 (de) | 2001-04-27 | 2006-08-24 | Schott Ag | Verfahren und Vorrichtung zur Messung der Phasengrenze |
| CN114675676A (zh) * | 2022-03-15 | 2022-06-28 | 东莞南玻太阳能玻璃有限公司 | 液面深度调节方法和装置、电子设备、存储介质 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3740563A (en) * | 1971-06-25 | 1973-06-19 | Monsanto Co | Electroptical system and method for sensing and controlling the diameter and melt level of pulled crystals |
| DE2149093C3 (de) * | 1971-10-01 | 1975-07-24 | N.V. Philips' Gloeilampenfabrieken, Eindhoven (Niederlande) | Vorrichtung zur Züchtung von Einkristallen durch Ziehen aus einer Schmelze |
| JPS5130528Y2 (it) * | 1972-03-21 | 1976-07-31 | ||
| JPS5013862U (it) * | 1973-06-04 | 1975-02-13 | ||
| DE2337169C2 (de) * | 1973-07-21 | 1975-06-26 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum Ziehen von Einkristallstäben |
| BE872578A (fr) * | 1978-12-06 | 1979-03-30 | Centre Rech Metallurgique | Dispositif pour controler la surface de la charge d'un four a cuve |
| DE2903061A1 (de) * | 1979-01-26 | 1980-08-07 | Heliotronic Gmbh | Verfahren zur herstellung grosskristalliner vorzugsorientierter siliciumfolien |
| US4282184A (en) * | 1979-10-09 | 1981-08-04 | Siltec Corporation | Continuous replenishment of molten semiconductor in a Czochralski-process, single-crystal-growing furnace |
| US4410494A (en) * | 1981-04-13 | 1983-10-18 | Siltec Corporation | Apparatus for controlling flow of molten material between crystal growth furnaces and a replenishment crucible |
| US4454096A (en) * | 1981-06-15 | 1984-06-12 | Siltec Corporation | Crystal growth furnace recharge |
| US4508970A (en) * | 1982-07-15 | 1985-04-02 | Motorola, Inc. | Melt level sensing system and method |
| DE3407456A1 (de) * | 1984-02-29 | 1985-09-05 | Werner & Mertz Gmbh, 6500 Mainz | Kombiniertes reinigungs-/bleich-mittel fuer die behandlung des spuelwassers von toilettenautomaten und dessen anwendung |
| CA1261715A (en) * | 1984-07-06 | 1989-09-26 | General Signal Corporation | Apparatus and process for growing monocrystals of semiconductor materials from shallow crucibles by czochralski technique |
| JPS6153190A (ja) * | 1984-08-17 | 1986-03-17 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 結晶ブ−ル成長方法 |
| JPS6186493A (ja) * | 1984-10-04 | 1986-05-01 | Toshiba Mach Co Ltd | 半導体結晶引上機 |
| DD253437A1 (de) * | 1986-10-22 | 1988-01-20 | Freiberg Spurenmetalle Veb | Verfahren und anordnung zur ueberwachung und regelung von kristallzuechtungsprozessen |
-
1988
- 1988-12-01 FI FI885595A patent/FI87660C/fi not_active IP Right Cessation
- 1988-12-20 IT IT8823017A patent/IT8823017A0/it unknown
-
1989
- 1989-02-17 DE DE3904858A patent/DE3904858C2/de not_active Expired - Lifetime
- 1989-03-02 JP JP1048665A patent/JP2740239B2/ja not_active Expired - Lifetime
- 1989-03-03 IT IT8919640A patent/IT1229561B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2740239B2 (ja) | 1998-04-15 |
| DE3904858A1 (de) | 1989-09-14 |
| IT8823017A0 (it) | 1988-12-20 |
| FI87660B (fi) | 1992-10-30 |
| FI885595A (fi) | 1989-09-04 |
| IT8919640A0 (it) | 1989-03-03 |
| IT1229561B (it) | 1991-09-04 |
| FI885595A0 (fi) | 1988-12-01 |
| JPH01317187A (ja) | 1989-12-21 |
| DE3904858C2 (de) | 2001-06-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| TC | Name/ company changed in patent |
Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING |
|
| MM | Patent lapsed | ||
| MM | Patent lapsed |
Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG |