IT8822862A0 - Procedimento per la fabbricazione di pellicole a deposito ed apparecchiatura per la sua realizzazione - Google Patents

Procedimento per la fabbricazione di pellicole a deposito ed apparecchiatura per la sua realizzazione

Info

Publication number
IT8822862A0
IT8822862A0 IT8822862A IT2286288A IT8822862A0 IT 8822862 A0 IT8822862 A0 IT 8822862A0 IT 8822862 A IT8822862 A IT 8822862A IT 2286288 A IT2286288 A IT 2286288A IT 8822862 A0 IT8822862 A0 IT 8822862A0
Authority
IT
Italy
Prior art keywords
procedure
manufacture
production
equipment
deposit film
Prior art date
Application number
IT8822862A
Other languages
English (en)
Other versions
IT1228405B (it
Inventor
Atsushi Hirokawa
Kunihiko Ozaki
Original Assignee
Toyo Ink Mfg Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Ink Mfg Co filed Critical Toyo Ink Mfg Co
Publication of IT8822862A0 publication Critical patent/IT8822862A0/it
Application granted granted Critical
Publication of IT1228405B publication Critical patent/IT1228405B/it

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/246Replenishment of source material
IT8822862A 1987-12-17 1988-12-05 Procedimento per la fabbricazione di pellicole a deposito ed apparecchiatura per la sua realizzazione IT1228405B (it)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP31734987 1987-12-17
JP63230462A JP2612602B2 (ja) 1987-12-17 1988-09-14 連続蒸着フィルムの製造方法および装置

Publications (2)

Publication Number Publication Date
IT8822862A0 true IT8822862A0 (it) 1988-12-05
IT1228405B IT1228405B (it) 1991-06-14

Family

ID=26529352

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8822862A IT1228405B (it) 1987-12-17 1988-12-05 Procedimento per la fabbricazione di pellicole a deposito ed apparecchiatura per la sua realizzazione

Country Status (5)

Country Link
US (1) US5107791A (it)
JP (1) JP2612602B2 (it)
DE (1) DE3842506C2 (it)
GB (1) GB2211516B (it)
IT (1) IT1228405B (it)

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US5182567A (en) * 1990-10-12 1993-01-26 Custom Metallizing Services, Inc. Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means
US5167984A (en) * 1990-12-06 1992-12-01 Xerox Corporation Vacuum deposition process
US5527629A (en) * 1990-12-17 1996-06-18 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process of depositing a layer of silicon oxide bonded to a substrate of polymeric material using high pressure and electrical discharge
DE4104415C1 (it) * 1991-02-14 1992-06-04 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De
DE4113221A1 (de) * 1991-04-23 1992-10-29 Leybold Ag Flexible, transparente polymerfolien
DE69221709T2 (de) * 1991-12-24 1998-02-26 Agfa Gevaert Nv Formbeständiges photographisches Element
DE4203632C2 (de) * 1992-02-08 2003-01-23 Applied Films Gmbh & Co Kg Vakuumbeschichtungsanlage
JPH0811718B2 (ja) * 1992-02-27 1996-02-07 大同ほくさん株式会社 ガスソース分子線エピタキシー装置
DE4221800A1 (de) * 1992-07-03 1992-11-12 Hilmar Dipl Ing Weinert Vakuum-bedampfungsanlage zur erzeugung von oxidschichten auf kunststoffolien
US5462779A (en) * 1992-10-02 1995-10-31 Consorzio Ce.Te.V. Centro Tecnologie Del Vuoto Thin film multilayer structure as permeation barrier on plastic film
US5670224A (en) * 1992-11-13 1997-09-23 Energy Conversion Devices, Inc. Modified silicon oxide barrier coatings produced by microwave CVD deposition on polymeric substrates
US5695808A (en) * 1993-04-16 1997-12-09 Crown Roll Leaf Inc. Method for making transparent reflective films
US5410631A (en) * 1993-09-10 1995-04-25 Advanced Ceramics Corporation Clamp assembly for a vaporization boat
CA2130388A1 (en) * 1993-09-23 1995-03-24 Joel L. Williams Process for barrier coating of plastic objects
DE69308859T3 (de) * 1993-11-09 2000-11-02 Galileo Vacuum Systems S R L Verfahren und Vorrichtung zur Herstellung einer Kunststoffolie mit einer dielektrischen Schicht
DE4342574C1 (de) * 1993-12-14 1995-04-13 Hilmar Weinert Bandbedampfungsanlage
WO1996009125A1 (en) * 1994-09-22 1996-03-28 Crown Roll Leaf, Inc. Method for making transparent reflective films
CN1166809C (zh) * 1995-02-01 2004-09-15 旭硝子株式会社 合成树脂成型物及其制造方法
US6651381B2 (en) 1995-02-01 2003-11-25 Asahi Glass Company Ltd. Synthetic resin molded material and method for its production
DE19539986A1 (de) * 1995-10-27 1997-04-30 Leybold Ag Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material
US5951769A (en) 1997-06-04 1999-09-14 Crown Roll Leaf, Inc. Method and apparatus for making high refractive index (HRI) film
US20030230238A1 (en) * 2002-06-03 2003-12-18 Fotios Papadimitrakopoulos Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM)
DE102004051290B4 (de) * 2004-10-13 2007-07-12 Creavac-Creative Vakuumbeschichtung Gmbh Einrichtung zum Beschichten von Substraten durch Aufdampfen in einer evakuierbaren Bearbeitungskammer
US20060102079A1 (en) * 2004-11-15 2006-05-18 Glassman Timothy E Reducing variability in delivery rates of solid state precursors
EP1972699A1 (fr) * 2007-03-20 2008-09-24 ArcelorMittal France Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique
US9249502B2 (en) * 2008-06-20 2016-02-02 Sakti3, Inc. Method for high volume manufacture of electrochemical cells using physical vapor deposition
US7945344B2 (en) * 2008-06-20 2011-05-17 SAKT13, Inc. Computational method for design and manufacture of electrochemical systems
JP5272656B2 (ja) * 2008-10-31 2013-08-28 凸版印刷株式会社 珪素酸化物系多孔質成型体およびその製造方法
US20100159132A1 (en) * 2008-12-18 2010-06-24 Veeco Instruments, Inc. Linear Deposition Source
US20100282167A1 (en) * 2008-12-18 2010-11-11 Veeco Instruments Inc. Linear Deposition Source
WO2011065999A1 (en) * 2008-12-18 2011-06-03 Veeco Instruments Inc. Linear deposition source
US8357464B2 (en) 2011-04-01 2013-01-22 Sakti3, Inc. Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells
JP5729072B2 (ja) * 2011-03-25 2015-06-03 凸版印刷株式会社 蒸着用材料及びガスバリア性蒸着フィルム及び該蒸着フィルムの製造方法
US9065080B2 (en) 2011-04-01 2015-06-23 Sakti3, Inc. Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells
US9127344B2 (en) * 2011-11-08 2015-09-08 Sakti3, Inc. Thermal evaporation process for manufacture of solid state battery devices
DE102012018525A1 (de) * 2012-09-19 2014-03-20 Fresenius Medical Care Deutschland Gmbh Vorrichtung zur Herstellung einer klebefreien Gasbarrierefolie mit einer keramischen Barriereschicht
US9627717B1 (en) 2012-10-16 2017-04-18 Sakti3, Inc. Embedded solid-state battery
US9627709B2 (en) 2014-10-15 2017-04-18 Sakti3, Inc. Amorphous cathode material for battery device

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US2771378A (en) * 1952-04-17 1956-11-20 Libbey Owens Ford Glass Co Method of producing mar resistant surfaces on thermoplastic materials
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GB869927A (en) * 1956-10-27 1961-06-07 Emi Ltd Improvements in or relating to methods of evaporating material to form a spongy layer on a surface
GB876567A (en) * 1957-03-30 1961-09-06 Electrical & Musical Ind Ltd Improvements in or relating to evaporators
DE1521249C3 (de) * 1966-04-29 1975-03-06 Bayer Ag, 5090 Leverkusen Verfahren zum Oberflächenvergüten von Kunststoffen
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US3563202A (en) * 1969-06-25 1971-02-16 Pennwalt Corp Mobile vbaporative firing source
US3620802A (en) * 1969-12-08 1971-11-16 Columbia Ribbon Carbon Mfg Duplicating ribbons and process
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US3991234A (en) * 1974-09-30 1976-11-09 American Optical Corporation Process for coating a lens of synthetic polymer with a durable abrasion resistant vitreous composition
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JPS55110127A (en) * 1979-02-19 1980-08-25 Teijin Lens Kk Preparation of plastic antireflection film
GB2055124B (en) * 1979-05-11 1983-01-06 Univ Kishinevskij Method and apparatus for vacuum deposition of semiconductor layers
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EP0082001A1 (en) * 1981-12-16 1983-06-22 General Engineering Radcliffe 1979 Limited Apparatus for and a method of metallising a length of material
CA1219547A (en) * 1983-04-04 1987-03-24 Prem Nath Apparatus for and method of continuously depositing a highly conductive, highly transmissive film
JPS6029465A (ja) * 1983-07-29 1985-02-14 Sekisui Chem Co Ltd 耐透湿性を有する合成樹脂体
JPS6183029A (ja) * 1984-09-29 1986-04-26 積水化学工業株式会社 耐透湿性を有する透明合成樹脂体
DE3530106A1 (de) * 1985-08-23 1987-02-26 Kempten Elektroschmelz Gmbh Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen
JPS6386860A (ja) * 1986-09-30 1988-04-18 Toyo Ink Mfg Co Ltd 連続蒸着フイルムの製造方法

Also Published As

Publication number Publication date
DE3842506C2 (de) 1997-01-09
GB8829594D0 (en) 1989-02-08
JP2612602B2 (ja) 1997-05-21
GB2211516A (en) 1989-07-05
DE3842506A1 (de) 1989-06-29
IT1228405B (it) 1991-06-14
GB2211516B (en) 1992-04-01
US5107791A (en) 1992-04-28
JPH01252768A (ja) 1989-10-09

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Legal Events

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TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19961227