IT8822862A0 - Procedimento per la fabbricazione di pellicole a deposito ed apparecchiatura per la sua realizzazione - Google Patents
Procedimento per la fabbricazione di pellicole a deposito ed apparecchiatura per la sua realizzazioneInfo
- Publication number
- IT8822862A0 IT8822862A0 IT8822862A IT2286288A IT8822862A0 IT 8822862 A0 IT8822862 A0 IT 8822862A0 IT 8822862 A IT8822862 A IT 8822862A IT 2286288 A IT2286288 A IT 2286288A IT 8822862 A0 IT8822862 A0 IT 8822862A0
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- manufacture
- production
- equipment
- deposit film
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 2
- 238000000034 method Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31734987 | 1987-12-17 | ||
JP63230462A JP2612602B2 (ja) | 1987-12-17 | 1988-09-14 | 連続蒸着フィルムの製造方法および装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8822862A0 true IT8822862A0 (it) | 1988-12-05 |
IT1228405B IT1228405B (it) | 1991-06-14 |
Family
ID=26529352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8822862A IT1228405B (it) | 1987-12-17 | 1988-12-05 | Procedimento per la fabbricazione di pellicole a deposito ed apparecchiatura per la sua realizzazione |
Country Status (5)
Country | Link |
---|---|
US (1) | US5107791A (it) |
JP (1) | JP2612602B2 (it) |
DE (1) | DE3842506C2 (it) |
GB (1) | GB2211516B (it) |
IT (1) | IT1228405B (it) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5284521A (en) * | 1990-09-21 | 1994-02-08 | Anelva Corporation | Vacuum film forming apparatus |
US5182567A (en) * | 1990-10-12 | 1993-01-26 | Custom Metallizing Services, Inc. | Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means |
US5167984A (en) * | 1990-12-06 | 1992-12-01 | Xerox Corporation | Vacuum deposition process |
US5527629A (en) * | 1990-12-17 | 1996-06-18 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process of depositing a layer of silicon oxide bonded to a substrate of polymeric material using high pressure and electrical discharge |
DE4104415C1 (it) * | 1991-02-14 | 1992-06-04 | 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De | |
DE4113221A1 (de) * | 1991-04-23 | 1992-10-29 | Leybold Ag | Flexible, transparente polymerfolien |
DE69221709T2 (de) * | 1991-12-24 | 1998-02-26 | Agfa Gevaert Nv | Formbeständiges photographisches Element |
DE4203632C2 (de) * | 1992-02-08 | 2003-01-23 | Applied Films Gmbh & Co Kg | Vakuumbeschichtungsanlage |
JPH0811718B2 (ja) * | 1992-02-27 | 1996-02-07 | 大同ほくさん株式会社 | ガスソース分子線エピタキシー装置 |
DE4221800A1 (de) * | 1992-07-03 | 1992-11-12 | Hilmar Dipl Ing Weinert | Vakuum-bedampfungsanlage zur erzeugung von oxidschichten auf kunststoffolien |
US5462779A (en) * | 1992-10-02 | 1995-10-31 | Consorzio Ce.Te.V. Centro Tecnologie Del Vuoto | Thin film multilayer structure as permeation barrier on plastic film |
US5670224A (en) * | 1992-11-13 | 1997-09-23 | Energy Conversion Devices, Inc. | Modified silicon oxide barrier coatings produced by microwave CVD deposition on polymeric substrates |
US5695808A (en) * | 1993-04-16 | 1997-12-09 | Crown Roll Leaf Inc. | Method for making transparent reflective films |
US5410631A (en) * | 1993-09-10 | 1995-04-25 | Advanced Ceramics Corporation | Clamp assembly for a vaporization boat |
CA2130388A1 (en) * | 1993-09-23 | 1995-03-24 | Joel L. Williams | Process for barrier coating of plastic objects |
DE69308859T3 (de) * | 1993-11-09 | 2000-11-02 | Galileo Vacuum Systems S R L | Verfahren und Vorrichtung zur Herstellung einer Kunststoffolie mit einer dielektrischen Schicht |
DE4342574C1 (de) * | 1993-12-14 | 1995-04-13 | Hilmar Weinert | Bandbedampfungsanlage |
WO1996009125A1 (en) * | 1994-09-22 | 1996-03-28 | Crown Roll Leaf, Inc. | Method for making transparent reflective films |
CN1166809C (zh) * | 1995-02-01 | 2004-09-15 | 旭硝子株式会社 | 合成树脂成型物及其制造方法 |
US6651381B2 (en) | 1995-02-01 | 2003-11-25 | Asahi Glass Company Ltd. | Synthetic resin molded material and method for its production |
DE19539986A1 (de) * | 1995-10-27 | 1997-04-30 | Leybold Ag | Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material |
US5951769A (en) | 1997-06-04 | 1999-09-14 | Crown Roll Leaf, Inc. | Method and apparatus for making high refractive index (HRI) film |
US20030230238A1 (en) * | 2002-06-03 | 2003-12-18 | Fotios Papadimitrakopoulos | Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM) |
DE102004051290B4 (de) * | 2004-10-13 | 2007-07-12 | Creavac-Creative Vakuumbeschichtung Gmbh | Einrichtung zum Beschichten von Substraten durch Aufdampfen in einer evakuierbaren Bearbeitungskammer |
US20060102079A1 (en) * | 2004-11-15 | 2006-05-18 | Glassman Timothy E | Reducing variability in delivery rates of solid state precursors |
EP1972699A1 (fr) * | 2007-03-20 | 2008-09-24 | ArcelorMittal France | Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique |
US9249502B2 (en) * | 2008-06-20 | 2016-02-02 | Sakti3, Inc. | Method for high volume manufacture of electrochemical cells using physical vapor deposition |
US7945344B2 (en) * | 2008-06-20 | 2011-05-17 | SAKT13, Inc. | Computational method for design and manufacture of electrochemical systems |
JP5272656B2 (ja) * | 2008-10-31 | 2013-08-28 | 凸版印刷株式会社 | 珪素酸化物系多孔質成型体およびその製造方法 |
US20100159132A1 (en) * | 2008-12-18 | 2010-06-24 | Veeco Instruments, Inc. | Linear Deposition Source |
US20100282167A1 (en) * | 2008-12-18 | 2010-11-11 | Veeco Instruments Inc. | Linear Deposition Source |
WO2011065999A1 (en) * | 2008-12-18 | 2011-06-03 | Veeco Instruments Inc. | Linear deposition source |
US8357464B2 (en) | 2011-04-01 | 2013-01-22 | Sakti3, Inc. | Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells |
JP5729072B2 (ja) * | 2011-03-25 | 2015-06-03 | 凸版印刷株式会社 | 蒸着用材料及びガスバリア性蒸着フィルム及び該蒸着フィルムの製造方法 |
US9065080B2 (en) | 2011-04-01 | 2015-06-23 | Sakti3, Inc. | Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells |
US9127344B2 (en) * | 2011-11-08 | 2015-09-08 | Sakti3, Inc. | Thermal evaporation process for manufacture of solid state battery devices |
DE102012018525A1 (de) * | 2012-09-19 | 2014-03-20 | Fresenius Medical Care Deutschland Gmbh | Vorrichtung zur Herstellung einer klebefreien Gasbarrierefolie mit einer keramischen Barriereschicht |
US9627717B1 (en) | 2012-10-16 | 2017-04-18 | Sakti3, Inc. | Embedded solid-state battery |
US9627709B2 (en) | 2014-10-15 | 2017-04-18 | Sakti3, Inc. | Amorphous cathode material for battery device |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2771378A (en) * | 1952-04-17 | 1956-11-20 | Libbey Owens Ford Glass Co | Method of producing mar resistant surfaces on thermoplastic materials |
NL212113A (it) * | 1955-11-26 | |||
GB869927A (en) * | 1956-10-27 | 1961-06-07 | Emi Ltd | Improvements in or relating to methods of evaporating material to form a spongy layer on a surface |
GB876567A (en) * | 1957-03-30 | 1961-09-06 | Electrical & Musical Ind Ltd | Improvements in or relating to evaporators |
DE1521249C3 (de) * | 1966-04-29 | 1975-03-06 | Bayer Ag, 5090 Leverkusen | Verfahren zum Oberflächenvergüten von Kunststoffen |
DE1621246A1 (de) * | 1966-04-29 | 1971-04-29 | Bayer Ag | Verfahren zum Oberflaechenvergueten von Kunststoffen |
US3563202A (en) * | 1969-06-25 | 1971-02-16 | Pennwalt Corp | Mobile vbaporative firing source |
US3620802A (en) * | 1969-12-08 | 1971-11-16 | Columbia Ribbon Carbon Mfg | Duplicating ribbons and process |
JPS5312953B2 (it) * | 1972-08-10 | 1978-05-06 | ||
JPS5148511B2 (it) * | 1972-09-13 | 1976-12-21 | ||
US3991234A (en) * | 1974-09-30 | 1976-11-09 | American Optical Corporation | Process for coating a lens of synthetic polymer with a durable abrasion resistant vitreous composition |
JPS5265183A (en) * | 1975-11-26 | 1977-05-30 | Matsushita Electric Ind Co Ltd | Production process of thin film of compounds |
JPS55110127A (en) * | 1979-02-19 | 1980-08-25 | Teijin Lens Kk | Preparation of plastic antireflection film |
GB2055124B (en) * | 1979-05-11 | 1983-01-06 | Univ Kishinevskij | Method and apparatus for vacuum deposition of semiconductor layers |
JPS569906A (en) * | 1979-07-04 | 1981-01-31 | Nitto Electric Ind Co | Method of manufacturing transparent conductive film |
EP0082001A1 (en) * | 1981-12-16 | 1983-06-22 | General Engineering Radcliffe 1979 Limited | Apparatus for and a method of metallising a length of material |
CA1219547A (en) * | 1983-04-04 | 1987-03-24 | Prem Nath | Apparatus for and method of continuously depositing a highly conductive, highly transmissive film |
JPS6029465A (ja) * | 1983-07-29 | 1985-02-14 | Sekisui Chem Co Ltd | 耐透湿性を有する合成樹脂体 |
JPS6183029A (ja) * | 1984-09-29 | 1986-04-26 | 積水化学工業株式会社 | 耐透湿性を有する透明合成樹脂体 |
DE3530106A1 (de) * | 1985-08-23 | 1987-02-26 | Kempten Elektroschmelz Gmbh | Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen |
JPS6386860A (ja) * | 1986-09-30 | 1988-04-18 | Toyo Ink Mfg Co Ltd | 連続蒸着フイルムの製造方法 |
-
1988
- 1988-09-14 JP JP63230462A patent/JP2612602B2/ja not_active Expired - Fee Related
- 1988-12-05 IT IT8822862A patent/IT1228405B/it active
- 1988-12-16 DE DE3842506A patent/DE3842506C2/de not_active Expired - Fee Related
- 1988-12-19 GB GB8829594A patent/GB2211516B/en not_active Expired - Lifetime
-
1990
- 1990-05-22 US US07/526,719 patent/US5107791A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE3842506C2 (de) | 1997-01-09 |
GB8829594D0 (en) | 1989-02-08 |
JP2612602B2 (ja) | 1997-05-21 |
GB2211516A (en) | 1989-07-05 |
DE3842506A1 (de) | 1989-06-29 |
IT1228405B (it) | 1991-06-14 |
GB2211516B (en) | 1992-04-01 |
US5107791A (en) | 1992-04-28 |
JPH01252768A (ja) | 1989-10-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19961227 |