IT1313979B1 - Cassetta di trasporto di wafer di semiconduttore - Google Patents

Cassetta di trasporto di wafer di semiconduttore

Info

Publication number
IT1313979B1
IT1313979B1 IT1999MI002262A ITMI992262A IT1313979B1 IT 1313979 B1 IT1313979 B1 IT 1313979B1 IT 1999MI002262 A IT1999MI002262 A IT 1999MI002262A IT MI992262 A ITMI992262 A IT MI992262A IT 1313979 B1 IT1313979 B1 IT 1313979B1
Authority
IT
Italy
Prior art keywords
semiconductor wafer
transport box
wafer transport
box
semiconductor
Prior art date
Application number
IT1999MI002262A
Other languages
English (en)
Inventor
Pascal Decamps
Andre Rochet
Daniel Gardellin
Original Assignee
St Microelectronics Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Sa filed Critical St Microelectronics Sa
Publication of ITMI992262A0 publication Critical patent/ITMI992262A0/it
Publication of ITMI992262A1 publication Critical patent/ITMI992262A1/it
Application granted granted Critical
Publication of IT1313979B1 publication Critical patent/IT1313979B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
IT1999MI002262A 1998-10-30 1999-10-29 Cassetta di trasporto di wafer di semiconduttore IT1313979B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9813885A FR2785270B1 (fr) 1998-10-30 1998-10-30 Cassette de transport de plaquettes de semiconducteur

Publications (3)

Publication Number Publication Date
ITMI992262A0 ITMI992262A0 (it) 1999-10-29
ITMI992262A1 ITMI992262A1 (it) 2001-04-29
IT1313979B1 true IT1313979B1 (it) 2002-09-26

Family

ID=9532362

Family Applications (1)

Application Number Title Priority Date Filing Date
IT1999MI002262A IT1313979B1 (it) 1998-10-30 1999-10-29 Cassetta di trasporto di wafer di semiconduttore

Country Status (4)

Country Link
US (1) US6206197B1 (it)
FR (1) FR2785270B1 (it)
IT (1) IT1313979B1 (it)
SG (1) SG87844A1 (it)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6939132B2 (en) * 2002-09-30 2005-09-06 Samsung Austin Semiconductor, L.P. Semiconductor workpiece apparatus
JP4681221B2 (ja) * 2003-12-02 2011-05-11 ミライアル株式会社 薄板支持容器
US20050205502A1 (en) * 2004-03-18 2005-09-22 Brown Steven A Rails for semiconductor wafer carriers
US20080245686A1 (en) * 2004-07-30 2008-10-09 Showa Denko K.K. Magnetic Disk Case
CN2762903Y (zh) * 2004-12-30 2006-03-08 鸿富锦精密工业（深圳）有限公司 光学元件清洗机构
US7241141B2 (en) * 2005-09-19 2007-07-10 Texas Instruments Incorporated Low contact SiC boat for silicon nitride stress reduction
TWI316040B (en) * 2006-11-10 2009-10-21 Innolux Display Corp Packing box for glass substrate and a package structure of a glass substrate using the same
CN102858653B (zh) * 2010-05-24 2014-09-10 未来儿株式会社 基板收纳容器
JP5681412B2 (ja) * 2010-08-27 2015-03-11 川崎重工業株式会社 板状部材収納用ラック、板状部材移載設備、及び板状部材収納方法
US9153466B2 (en) * 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
KR102143884B1 (ko) * 2013-09-11 2020-08-12 삼성전자주식회사 버퍼 영역을 갖는 웨이퍼 로더
KR102325657B1 (ko) * 2017-08-09 2021-11-12 미라이얼 가부시키가이샤 기판 수납 용기
JP6992240B2 (ja) * 2017-11-16 2022-01-13 信越ポリマー株式会社 基板収納容器
CN110993544B (zh) * 2019-11-08 2022-10-21 上海至纯洁净系统科技股份有限公司 一种避免晶圆晃动与偏移的晶圆安装座及晶圆升降装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3486631A (en) * 1967-09-29 1969-12-30 John T Shaler Co Basket for polished wafers
US4566839A (en) * 1983-05-18 1986-01-28 Microglass, Inc. Semiconductor wafer diffusion boat and method
US5555981A (en) * 1992-05-26 1996-09-17 Empak, Inc. Wafer suspension box
US5429251A (en) * 1993-09-22 1995-07-04 Legacy Systems, Inc. Semiconductor wafer end effector
US5785186A (en) * 1994-10-11 1998-07-28 Progressive System Technologies, Inc. Substrate housing and docking system
US5725101A (en) * 1995-06-26 1998-03-10 Kakizaki Manufacturing Co., Ltd. Thin-plate supporting container
TW296361B (it) * 1995-06-26 1997-01-21 Kakizaki Seisakusho Kk

Also Published As

Publication number Publication date
FR2785270B1 (fr) 2001-01-19
ITMI992262A0 (it) 1999-10-29
ITMI992262A1 (it) 2001-04-29
FR2785270A1 (fr) 2000-05-05
SG87844A1 (en) 2002-04-16
US6206197B1 (en) 2001-03-27

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