IT1313979B1 - Cassetta di trasporto di wafer di semiconduttore - Google Patents
Cassetta di trasporto di wafer di semiconduttoreInfo
- Publication number
- IT1313979B1 IT1313979B1 IT1999MI002262A ITMI992262A IT1313979B1 IT 1313979 B1 IT1313979 B1 IT 1313979B1 IT 1999MI002262 A IT1999MI002262 A IT 1999MI002262A IT MI992262 A ITMI992262 A IT MI992262A IT 1313979 B1 IT1313979 B1 IT 1313979B1
- Authority
- IT
- Italy
- Prior art keywords
- semiconductor wafer
- transport box
- wafer transport
- box
- semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9813885A FR2785270B1 (fr) | 1998-10-30 | 1998-10-30 | Cassette de transport de plaquettes de semiconducteur |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI992262A0 ITMI992262A0 (it) | 1999-10-29 |
ITMI992262A1 ITMI992262A1 (it) | 2001-04-29 |
IT1313979B1 true IT1313979B1 (it) | 2002-09-26 |
Family
ID=9532362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT1999MI002262A IT1313979B1 (it) | 1998-10-30 | 1999-10-29 | Cassetta di trasporto di wafer di semiconduttore |
Country Status (4)
Country | Link |
---|---|
US (1) | US6206197B1 (it) |
FR (1) | FR2785270B1 (it) |
IT (1) | IT1313979B1 (it) |
SG (1) | SG87844A1 (it) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6939132B2 (en) * | 2002-09-30 | 2005-09-06 | Samsung Austin Semiconductor, L.P. | Semiconductor workpiece apparatus |
JP4681221B2 (ja) * | 2003-12-02 | 2011-05-11 | ミライアル株式会社 | 薄板支持容器 |
US20050205502A1 (en) * | 2004-03-18 | 2005-09-22 | Brown Steven A | Rails for semiconductor wafer carriers |
WO2006011609A1 (en) * | 2004-07-30 | 2006-02-02 | Showa Denko K.K. | Magnetic disk case |
CN2762903Y (zh) * | 2004-12-30 | 2006-03-08 | 鸿富锦精密工业(深圳)有限公司 | 光学元件清洗机构 |
US7241141B2 (en) * | 2005-09-19 | 2007-07-10 | Texas Instruments Incorporated | Low contact SiC boat for silicon nitride stress reduction |
TWI316040B (en) * | 2006-11-10 | 2009-10-21 | Innolux Display Corp | Packing box for glass substrate and a package structure of a glass substrate using the same |
JP5301731B2 (ja) * | 2010-05-24 | 2013-09-25 | ミライアル株式会社 | 基板収納容器 |
JP5681412B2 (ja) * | 2010-08-27 | 2015-03-11 | 川崎重工業株式会社 | 板状部材収納用ラック、板状部材移載設備、及び板状部材収納方法 |
US9153466B2 (en) * | 2012-04-26 | 2015-10-06 | Asm Ip Holding B.V. | Wafer boat |
KR102143884B1 (ko) * | 2013-09-11 | 2020-08-12 | 삼성전자주식회사 | 버퍼 영역을 갖는 웨이퍼 로더 |
WO2019030863A1 (ja) * | 2017-08-09 | 2019-02-14 | ミライアル株式会社 | 基板収納容器 |
JP6992240B2 (ja) * | 2017-11-16 | 2022-01-13 | 信越ポリマー株式会社 | 基板収納容器 |
CN110993544B (zh) * | 2019-11-08 | 2022-10-21 | 上海至纯洁净系统科技股份有限公司 | 一种避免晶圆晃动与偏移的晶圆安装座及晶圆升降装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3486631A (en) * | 1967-09-29 | 1969-12-30 | John T Shaler Co | Basket for polished wafers |
US4566839A (en) * | 1983-05-18 | 1986-01-28 | Microglass, Inc. | Semiconductor wafer diffusion boat and method |
US5555981A (en) * | 1992-05-26 | 1996-09-17 | Empak, Inc. | Wafer suspension box |
US5429251A (en) * | 1993-09-22 | 1995-07-04 | Legacy Systems, Inc. | Semiconductor wafer end effector |
US5785186A (en) * | 1994-10-11 | 1998-07-28 | Progressive System Technologies, Inc. | Substrate housing and docking system |
US5725101A (en) * | 1995-06-26 | 1998-03-10 | Kakizaki Manufacturing Co., Ltd. | Thin-plate supporting container |
TW296361B (it) * | 1995-06-26 | 1997-01-21 | Kakizaki Seisakusho Kk |
-
1998
- 1998-10-30 FR FR9813885A patent/FR2785270B1/fr not_active Expired - Fee Related
-
1999
- 1999-10-28 US US09/428,357 patent/US6206197B1/en not_active Expired - Lifetime
- 1999-10-29 IT IT1999MI002262A patent/IT1313979B1/it active
- 1999-10-30 SG SG9905387A patent/SG87844A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
FR2785270A1 (fr) | 2000-05-05 |
US6206197B1 (en) | 2001-03-27 |
ITMI992262A0 (it) | 1999-10-29 |
FR2785270B1 (fr) | 2001-01-19 |
ITMI992262A1 (it) | 2001-04-29 |
SG87844A1 (en) | 2002-04-16 |
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